Adhesion-promoting surface

Patent metadata

Field	Value
Publication number	US-10465308-B2
Application number	US-201715674618-A
Country	US
Kind code	B2
Filing date	Aug 11, 2017
Priority date	Oct 21, 2010
Publication date	Nov 5, 2019
Grant date	Nov 5, 2019

Abstract

A method of adhering a cover layer to a substrate includes forming an array of nano-structures on a substrate. A flowable material is applied to the substrate, the flowable material substantially enveloping the nano-structures on the substrate. The flowable material is solidified to form a cover layer on the substrate, the cover layer being anchored to the substrate via the nano-structures.

First claim

What is claimed is:

1. A method of adhering a cover layer to a substrate, the method comprising:
forming an array of nano-structures on a substrate, including;
forming a template on the substrate, the template defining nano-pores having a first width;
partially filling the nano-pores to define stems of the nano-structures each having a first thickness corresponding to the first width; then
re-shaping the nano-pores to define re-shaped nano-pores having a second width greater than the first width;
at least partially filling the re-shaped nano-pores to define caps of the nano-structures each having a second thickness corresponding to the second width; and
removing the template;

applying a flowable material to the substrate, the flowable material substantially enveloping the nano-structures on the substrate; and
solidifying the flowable material to form a cover layer on the substrate, the cover layer being anchored to the substrate via the nano-structures.

2. The method of claim 1 , wherein partially filling the nano-pores includes:
forming a layer of a first oxidizable material; and
anodizing the layer of first oxidizable material to grow oxide from the first oxidizable material into the nano-pores.

3. The method of claim 2 , wherein at least partially filling the re-shaped nano-pores includes further anodizing the first oxidizable material to grow oxide into the re-shaped nano-pores.

4. The method of claim 3 , wherein forming a template includes:
forming a layer of a second oxidizable material; and
anodizing the layer of second oxidizable material to define the nano-pores.

5. The method of claim 1 , wherein forming an array of nano-structures on a substrate includes forming a first set of nano-structures on a first region of the substrate and forming a second set of nano-structures on a second region of the substrate orthogonal to and intersecting the first region such that the cover layer is locked in place upon solidifying the flowable material.

6. A method of adhering a cover layer to a substrate, the method comprising:
forming multiple nano-pores on a substrate;
partially filling the nano-pores to define a stem of each of multiple nano-structures;
enlarging the unfilled part of each nano-pore;
at least partially filling the enlarged part of each nano-pore to define a cap on each stem;
exposing the cap and stem of each nano-structure;
covering the exposed cap and stem of each nano-structure with a flowable material; and
solidifying the flowable material.

7. The method of claim 6 , wherein;
the substrate is formed from silicon, glass, quartz, alumina, or a combination thereof;
the nano-structures comprise an anodized tantalum oxide; and
the flowable material comprises an epoxy.

8. The method of claim 7 , wherein partially filling the nano-pores includes:
forming a layer of tantalum on the substrate; and
anodizing the tantalum to grow tantalum oxide into the nano-pores.

9. The method of claim 8 , wherein at least partially filling the enlarged nano-pores includes further anodizing the tantalum to grow tantalum oxide into the enlarged nano-pores.

10. The method of claim 6 , comprising:
anodizing a layer of oxidizable material to define the nano-pores; and wherein
exposing the cap and stem of each nano-structure comprises removing the oxidizable material.

11. A method of adhering a cover layer to a substrate, the method comprising:
depositing a first oxidizable material onto the substrate;
depositing a second oxidizable material onto the first oxidizable material;
anodizing the second oxidizable material to form a porous oxide having nano-pores in the porous oxide;
anodizing the first oxidizable material to grow an oxide of the first oxidizable material into the nano-pores and form a nano-structure stem;
etching the porous oxide to enlarge the nano-pores;
anodizing the first oxidizable material to grow the oxide into the enlarged nano-pores and form a nano-structure cap on the nano-structure stem;
removing the porous oxide to expose the nano-structures extending from the substrate;
applying a flowable material to the substrate and covering the nano-structures; and
solidifying the flowable material to form a cover layer on the substrate, the cover layer being anchored to the substrate via the nano-structures.

12. The method of claim 11 , wherein;
the substrate includes a first region and a second region orthogonal to and intersecting the first region; and
the nano-structures and cover layer are formed on the first and second regions of the substrate such that the cover layer is locked in place upon solidifying the flowable material.

Assignees

• Hewlett Packard Development Co

Inventors

• Mardilovich Peter
• Fuller Anthony M
• Wei Qingqiao

Classifications

• C25D1/006 Primary

  Nanostructures, e.g. using aluminium anodic oxidation templates [AAO] · CPC title

• C23C28/3455

  with a refractory ceramic layer, e.g. refractory metal oxide, ZrO2, rare earth oxides or a thermal barrier system comprising at least one refractory oxide layer · CPC title

• C25D11/12

  Anodising more than once, e.g. in different baths · CPC title

• C23C28/322

  only coatings of metal elements only · CPC title

• C25D11/24

  Chemical after-treatment · CPC title