Scanning probe microscopy system for mapping nanostructures on a surface of a sample and metrology frame therefore

Patent metadata

Field	Value
Publication number	US-10451650-B2
Application number	US-201615744289-A
Country	US
Kind code	B2
Filing date	Jul 14, 2016
Priority date	Jul 15, 2015
Publication date	Oct 22, 2019
Grant date	Oct 22, 2019

Abstract

A scanning probe microscopy system for mapping nanostructures on a surface of a sample, comprises a metrology frame, a sensor head including a probe tip, and an actuator for scanning the probe tip relative to the sample surface. The system comprises a clamp for clamping of the sample, which clamp is fixed to the metrology frame and arranged underneath the sensor head. The clamp is arranged for locally clamping of the sample in a clamping area underneath the probe tip, the clamping area being smaller than a size of the sample such as to clamp only a portion of the sample. Moreover, a metrology frame for use in scanning probe microscopy system as described includes a clamp for clamping of a sample, wherein the clamp is fixed to the metrology frame such as to be arranged underneath the sensor head.

First claim

The invention claimed is:

1. A scanning probe microscopy system for mapping nanostructures on a surface of a sample, the system comprising:
a metrology frame;
a sensor head including a probe tip; and
an actuator for scanning the probe tip relative to the surface of the sample for mapping of the nanostructures,
wherein the system comprises a clamp for clamping the sample, wherein the clamp is fixed to the metrology frame, wherein the clamp is arranged underneath the sensor head, wherein the clamp is arranged for locally clamping the sample in a clamping surface area of a further surface of the sample opposite the surface of the sample scanable by the probe tip, the clamping surface area being smaller in size than the further surface of the sample such as to clamp the sample using only a portion of the further surface of the sample,
wherein the system further comprises a sample support structure for supporting the sample,
wherein the sample support structure comprises a plurality of support struts,
wherein the clamp is arranged for clamping at a first lateral stiffness, and
wherein the support struts are arranged for supporting the sample at a second lateral stiffness lower than the first lateral stiffness.

2. The scanning probe microscopy system according to claim 1 , wherein the clamp is arranged underneath the sensor head such that, during a scanning carried out by operating the actuator, a measurement axis through the probe tip and transverse to the surface of the sample can intersect the clamping surface area.

3. The scanning probe microscopy system according to claim 1 , wherein the clamp has a size taken from the group consisting of:
the clamping surface area of the further surface of the sample is a same size as an area to be scanned on the surface of the sample in use for mapping of said nanostructures; and
the clamping surface area of the further surface of the sample has a diameter in cross section within a range between 1 millimeter and 60 millimeters.

4. The scanning probe microscopy system of claim 3 wherein the clamping surface area has a diameter between 20 millimeters and 50 millimeters.

5. The scanning probe microscopy system of claim 3 wherein the clamping surface area has a diameter between 25 millimeters and 40 millimeters.

6. The scanning probe microscopy system according to claim 1 , wherein the support struts are arranged on a sample support structure such as to support the sample outside the clamping area.

7. The scanning probe microscopy system according to claim 1 , wherein the support struts include at least one of the group consisting of: support burls, support knobs, flexible support poles, and rigid support poles.

8. A scanning probe microscopy system according to claim 1 , wherein the system further comprises a sample positioner for positioning of the sample on the clamp,
wherein the sample positioner is external to a metrology loop,
wherein the metrology loop is a virtual path going from the clamping surface area, via the clamp and the metrology frame, to the sensor head and the probe tip.

9. A scanning probe microscopy system according to claim 8 , wherein the sample positioner is external to the sample support structure and separated therefrom.

10. A scanning probe microscopy system according to claim 8 , wherein the sample positioner comprises a robot arm for positioning the sample on the sample support structure.

11. A scanning probe microscopy system according to claim 8 , further comprising a sample support structure for supporting the sample, wherein the sample support structure comprises one or more lifting pins enabling lifting of the sample such as to allow gripping of the sample by the sample positioner.

12. A scanning probe microscopy system according to claim 1 , wherein the clamp is of a material taken from the group consisting of:
a material having either a same or at least a similar thermal expansion coefficient as the sample, and
a silicon carbide material.

13. A scanning probe microscopy system according to claim 1 , wherein the clamp is a suction clamp for clamping the sample by suction force.

14. A scanning probe microscopy system according to claim 1 , wherein the sample support structure is external to the metrology frame.

15. A metrology frame structurally configured for incorporation into a scanning probe microscopy system for mapping nanostructures on a surface of a sample,
wherein the system further comprises:
a sensor head including a probe tip, and
an actuator for scanning the probe tip relative to the surface of the sample for mapping of the nanostructures,

wherein the metrology frame includes a clamp for clamping the sample, wherein the clamp is arranged underneath the sensor head,
wherein the system further comprises a sample support structure for supporting the sample,
wherein the sample support structure comprises a plurality of support struts,
wherein the clamp is arranged for clamping at a first lateral stiffness, and wherein the support struts are arranged for supporting the sample at a second lateral stiffness lower than the first lateral stiffness.

16. The metrology frame of claim 15 wherein the clamp is arranged for locally clamping the sample at a clamping surface area of a further surface of the sample opposite the surface of the sample scanable by the probe tip, the clamping surface area being smaller in size than the lower surface of the sample such as to clamp the sample using only a portion of the further surface of the sample.

Assignees

• TNO

Inventors

• Kuiper Stefan
• Crowcombe William Edward

Classifications

• G01Q30/20 Primary

  Sample handling devices or methods · CPC title

• G01Q70/04

  with compensation for temperature or vibration induced errors · CPC title