PeakForce photothermal-based detection of IR nanoabsorption

Patent metadata

Field	Value
Publication number	US-9719916-B2
Application number	US-201615256071-A
Country	US
Kind code	B2
Filing date	Sep 2, 2016
Priority date	Nov 13, 2008
Publication date	Aug 1, 2017
Grant date	Aug 1, 2017

Abstract

An apparatus and method of performing photothermal chemical nanoidentification of a sample includes positioning a tip of a probe at a region of interest of the sample, with the tip-sample separation being less than about 10 nm. Then, IR electromagnetic energy having a selected frequency, ω, is directed towards the tip. Using PFT mode AFM operation, absorption of the energy at the region of interest is identified. calorimetry may also be performed with the photothermal PFT system.

First claim

What is claimed is:

1. An apparatus for measuring IR nanoabsorption of a sample, the apparatus comprising:
an atomic force microscope (AFM) probe interacting with the sample in Peak Force Tapping (PFT) mode that uses feedback to control the interaction between the probe and the sample;
a position detector for detecting a motion of the probe;
a monochromatic light source mounted overhead of the probe for directing monochromatic light having a selected frequency, ω, towards a tip of the probe so as to produce a localized enhanced electric field between the tip and the sample; and
a controller that monitors a property of probe-sample interaction based on the detected motion of the probe and identifies a change in a mechanical property of the sample induced by the localized enhanced electric field.

2. The apparatus of claim 1 , wherein a stiffness of the probe is greater than a stiffness of the sample.

3. An apparatus for measuring IR nanoabsorption of a sample, the apparatus comprising:
a probe interacting with the sample in an oscillating mode that uses feedback to control the interaction between the probe and the sample, and wherein the feedback is based on a substantially instantaneous force on the probe in each oscillation cycle;
a position detector for detecting a motion of the probe;
a monochromatic light source mounted overhead of the probe for directing monochromatic light having a selected frequency, ω, towards a tip of the probe so as to produce a localized enhanced electric field between the tip and the sample;
a controller that determines a substantially instantaneous force between the probe and the sample from the detected motion of the probe and identifies a change in a mechanical property of the sample induced by the localized enhanced electric field; and
wherein a stiffness of the probe is greater than a stiffness of the sample.

4. The apparatus of claim 3 , wherein a tip of the probe is metallized with a layer of one of Platinum Silicide and Platinum Iridium, and wherein the probe includes a cantilever having a spring constant between about 10-40 N/m.

5. The apparatus of claim 4 , wherein the probe is a silicon probe.

6. The apparatus of claim 4 , wherein a radius of the tip is 50 nm or less.

7. The apparatus of claim 3 , wherein the probe comprises at least one of doped Silicon and Diamond.

8. The apparatus of claim 3 , wherein the monochromatic light source is a tunable External Cavity Quantum Cascade Laser (QCL).

9. The apparatus of claim 8 , wherein the QCL is operable over a range of IR frequencies which are used in operation to obtain a spectrum of the sample.

10. The apparatus of claim 9 , wherein the QCL is operated in a pulsed mode with a line width below 1 cm −1 and a peak power of at least 1 mW.

11. The apparatus of claim 3 , wherein the oscillating mode is peak force tapping (PFT) mode.

12. The apparatus of claim 3 , where in the oscillating mode is contact resonance mode.

13. The apparatus of claim 9 , wherein the absorptions of energy over the range of frequencies are acquired on a sub-millisecond timescale for at least a 20×20 nm sample area.

14. The apparatus of claim 1 , wherein the probe is a silicon probe.

15. The apparatus of claim 1 , wherein a radius of the tip is 50 nm or less.

16. The apparatus of claim 1 , wherein the monochromatic light source is a tunable External Cavity Quantum Cascade Laser (QCL).

17. The apparatus of claim 16 , wherein the QCL is operable over a range of IR frequencies which are used in operation to obtain a spectrum of the sample.

18. The apparatus of claim 17 , wherein the QCL is operated in a pulsed mode with a line width below 1 cm −1 and a peak power of at least 1 mW.

19. The apparatus of claim 17 , wherein the absorptions of energy over the range of frequencies are acquired on a sub-millisecond timescale for at least a 20×20 nm sample area.

Assignees

• Bruker Nano Inc

Inventors

• Andreev Gregory O
• Su Chanmin

Classifications

• G01N2201/06113

  Coherent sources; lasers · CPC title

• G01N21/3563

  for analysing solids; Preparation of samples therefor · CPC title

• G01N2201/12

  Circuits of general importance; Signal processing · CPC title

• G01N21/171 Primary

  with calorimetric detection, e.g. with thermal lens detection · CPC title

• G01Q60/32

  AC mode · CPC title