Amorphous thin metal film

Patent metadata

Field	Value
Publication number	US-10449763-B2
Application number	US-201616067788-A
Country	US
Kind code	B2
Filing date	Jun 24, 2016
Priority date	Jun 24, 2016
Publication date	Oct 22, 2019
Grant date	Oct 22, 2019

Abstract

An amorphous thin metal film can include a combination of metals or metalloids including: 5 at % to 74 at % of a metalloid selected from the group of carbon, silicon, and boron; 5 at % to 74 at % of a first metal; 5 at % to 74 at % of a second metal; and 5 at % to 70 at % of a dopant. The first and second metals can be independently selected from the group of titanium, vanadium, chromium, iron, cobalt, nickel, zirconium, niobium, molybdenum, ruthenium, rhodium, palladium, hafnium, tantalum, tungsten, osmium, iridium, or platinum, wherein the first metal and the second metal can be different metals. The dopant can be selected from the group of oxygen, nitrogen, or combinations thereof. The metalloid, first metal, second metal, and dopant can account for at least 70 at % of the amorphous thin metal film.

First claim

What is claimed is:

1. An amorphous thin metal film, comprising:
5 at % to 74 at % of a metalloid, wherein the metalloid is carbon, silicon, or boron;
5 at % to 74 at % of a first metal, wherein the first metal is titanium, vanadium, chromium, iron, cobalt, nickel, zirconium, niobium, molybdenum, ruthenium, rhodium, palladium, hafnium, tantalum, tungsten, osmium, iridium, or platinum;
5 at % to 74 at % of a second metal, wherein the second metal is titanium, vanadium, chromium, iron, cobalt, nickel, zirconium, niobium, molybdenum, ruthenium, rhodium, palladium, hafnium, tantalum, tungsten, osmium, iridium, or platinum, wherein the second metal is different than the first metal; and
16 at % to 70 at % of a dopant of nitrogen, oxygen, or mixture thereof,
wherein the metalloid, the first metal, the second metal, and the dopant account for at least 70 at % of the amorphous thin metal film.

2. The amorphous thin metal film of claim 1 , wherein the amorphous thin metal film has a thickness ranging from 10 angstroms to 100 microns.

3. The amorphous thin metal film of claim 1 , wherein the amorphous thin metal film is devoid of aluminum, silver, and gold.

4. The amorphous thin metal film of claim 1 , wherein the dopant is present in an amount from 20 at % to 60 at %.

5. The amorphous thin metal film of claim 1 , wherein the first metal, the second metal, or both are a refractory metal, the refractory metal being titanium, vanadium, chromium, zirconium, niobium, molybdenum, ruthenium, rhodium, hafnium, tantalum, tungsten, osmium, or iridium.

6. The amorphous thin metal film of claim 1 , wherein the amorphous thin metal film has a surface RMS roughness of less than 1 nm.

7. The amorphous thin metal film of claim 1 , wherein the amorphous thin metal film has a bulk resistivity of from 800 μΩ·cm to 150,000 μΩ·cm.

8. A method, comprising:
depositing an amorphous thin metal film on a substrate, wherein the amorphous thin metal film, comprises:
5 at % to 74 at % of a metalloid, wherein the metalloid is carbon, silicon, or boron;
5 at % to 74 at % of a first metal, wherein the first metal is titanium, vanadium, chromium, iron, cobalt, nickel, zirconium, niobium, molybdenum, ruthenium, rhodium, palladium, hafnium, tantalum, tungsten, osmium, iridium, or platinum;
5 at % to 74 at % of a second metal, wherein the second metal is titanium, vanadium, chromium, iron, cobalt, nickel, zirconium, niobium, molybdenum, ruthenium, rhodium, palladium, hafnium, tantalum, tungsten, osmium, iridium, or platinum, and wherein the second metal is different than the first metal; and
16 at % to 70 at % of a dopant of nitrogen, oxygen, or mixture thereof.

9. The method of claim 8 , wherein the depositing includes sputtering.

10. The method of claim 8 , wherein prior to depositing, the metalloid, the first metal, and the second metal are mixed to form a blend.

11. A thermal inkjet printhead stack with an amorphous thin metal resistor, comprising:
an insulated substrate;
a resistor applied to the insulated substrate, the resistor comprising an amorphous thin metal film, comprising:
5 at % to 74 at % of a metalloid, wherein the metalloid is carbon, silicon, or boron;
5 at % to 74 at % of a first metal, wherein the first metal is titanium, vanadium, chromium, iron, cobalt, nickel, zirconium, niobium, molybdenum, ruthenium, rhodium, palladium, hafnium, tantalum, tungsten, osmium, iridium, or platinum;
5 at % to 74 at % of a second metal, wherein the second metal is titanium, vanadium, chromium, iron, cobalt, nickel, zirconium, niobium, molybdenum, ruthenium, rhodium, palladium, hafnium, tantalum, tungsten, osmium, iridium, or platinum, wherein the second metal is different than the first metal; and
16 at % to 70 at % of a dopant, the dopant being nitrogen, oxygen, or mixtures thereof,
wherein the metalloid, the first metal, the second metal, and the dopant account for at least 70 at % of the amorphous thin metal film.

12. The thermal inkjet printhead stack of claim 11 , wherein the amorphous layer further comprises from 5 at % to 70 at % of a third metal, wherein the third metal is titanium, vanadium, chromium, iron, cobalt, nickel, zirconium, niobium, molybdenum, ruthenium, rhodium, palladium, hafnium, tantalum, tungsten, osmium, iridium, or platinum, wherein the third metal is different than the first metal and the second metal.

13. The thermal inkjet printhead stack of claim 11 , further comprising a pair of conductors electrically coupled with the resistor, the pair of conductors including passivation layers applied to a top surface of the pair of conductors, but not to the resistor.

14. The thermal inkjet printhead stack of claim 11 , further comprising a thin electrical insulating film applied to the resistor.

15. The thermal inkjet printhead stack of claim 11 , wherein the resistor has a bulk resistivity of from 800 μΩ·cm to 150,000 μΩ·cm.

Assignees

• Hewlett Packard Development Co
• The State Of Oregon State Board Of Higher Education On Behalf Of Oregon State Univ
• Univ Oregon State

Inventors

• Abbott Jr James Elmer
• Mcglone John M
• Olsen Kristopher
• Pugliese Roberto A
• Long Greg Scott
• Keszler Douglas A
• Wager John

Classifications

• C23C28/04

  only coatings of inorganic non-metallic material · CPC title

• C22C1/11

  Making amorphous alloys · CPC title

• C23C14/08

  Oxides (C23C14/10 takes precedence) · CPC title

• C22C45/10

  with molybdenum, tungsten, niobium, tantalum, titanium, or zirconium {or Hf} as the major constituent · CPC title

• C23C14/0036

  Reactive sputtering · CPC title