Nanoparticle with plural functionalities, and method of forming the nanoparticle

Patent metadata

Field	Value
Publication number	US-10439136-B2
Application number	US-201715691800-A
Country	US
Kind code	B2
Filing date	Aug 31, 2017
Priority date	Jun 29, 2016
Publication date	Oct 8, 2019
Grant date	Oct 8, 2019

Abstract

A method of forming a nanoparticle includes forming a layer of semiconductor material on a substrate, forming a first layer on the semiconductor material, and etching the semiconductor layer to form the nanoparticle including the first layer on a first side of the nanoparticle and the semiconductor material on a second side of the nanoparticle.

First claim

What is claimed is:

1. A method of forming a nanoparticle, comprising:
forming a layer of semiconductor material on a substrate;
forming a first layer on a first side of the semiconductor material;
forming a second layer on a second side of the semiconductor material; and
etching the semiconductor material to separate the semiconductor material from the substrate and form the nanoparticle which includes:
a first surface comprising the first layer;
a second surface comprising the second layer; and
a third surface comprising the semiconductor material.

2. The method of claim 1 , wherein the first layer comprises a functionality different from a functionality of the semiconductor material.

3. The method of claim 2 , further comprising:
before the forming of the second layer, patterning the layer of semiconductor material to form a pillar of the semiconductor material, the second layer being formed on the pillar,
wherein the etching of the semiconductor material comprises separating the pillar from the substrate to form the nanoparticle.

4. The method of claim 3 , wherein the patterning of the layer of semiconductor material comprises:
a first etch to form a plurality of strips of the semiconductor material.

5. The method of claim 4 , wherein the patterning of the layer of semiconductor material further comprises:
a second etch to divide the plurality of strips into a plurality of pillars of the semiconductor material.

6. The method of claim 5 , wherein the second layer comprises a functionality different from the functionality of the semiconductor material, and different from the functionality of the first layer.

7. The method of claim 6 , wherein the second layer is different from the first layer in at least one of a bonding property, an energy absorption property and a biodegradability property.

8. The method of claim 6 , wherein the forming of the second layer is performed between the first etch and the second etch, so that the nanoparticle comprises a fourth surface including the second layer.

9. The method of claim 6 , wherein the forming of the second layer is performed after the second etch, so that the second layer is formed on four faces of the nanoparticle.

10. The method of claim 6 , wherein the first layer comprises an insulator layer and the second layer comprises a metal layer.

11. The method of claim 10 , wherein the insulator layer comprises a silicon nitride layer and the metal layer comprises a gold layer.

12. The method of claim 3 , wherein the substrate comprises an oxide layer, and the separating of the pillar comprises etching the oxide layer.

13. The method of claim 3 , wherein the substrate comprises a semiconductor-on-insulator (SOI) substrate including a buried oxide layer, and the layer of semiconductor material is formed on the buried oxide layer.

14. The method of claim 13 , wherein the separating of the pillar from the substrate comprises undercutting the buried oxide layer by etching the buried oxide layer.

15. The method of claim 1 , wherein the semiconductor material comprises one of silicon and germanium.

16. A method of forming a nanoparticle, comprising:
forming a first layer on a substrate;
forming a second layer on the first layer;
patterning the first and second layers to form a pillar;
after the patterning of the first and second layers, forming a third layer on a side of the first and second layers in the pillar, to form a pillar structure comprising the first, second and third layers; and
separating the pillar structure from the substrate to form the nanoparticle.

17. The method of claim 1 , wherein a thickness of the first layer is less than a thickness of the layer of semiconductor material.

18. The method of claim 1 , wherein the forming of the second layer comprises forming the second layer on a side of the first layer.

Assignees

• IBM

Inventors

• Cao Qing
• Cheng Kangguo
• Li Zhengwen
• Liu Fei

Classifications

• H10P95/11

  Separation of active layers from substrates · CPC title

• H10P14/69433

  the material being a silicon nitride not containing oxygen, e.g. SixNy or SixByNz · CPC title

• H10P14/3461

  Nanoparticles · CPC title

• H10P14/3411

  Silicon, silicon germanium or germanium · CPC title

• H10P14/2922

  being non-crystalline insulating materials, e.g. glass or polymers · CPC title