Optical mask plate and laser lift-off device

Patent metadata

Field	Value
Publication number	US-10434599-B2
Application number	US-201414436907-A
Country	US
Kind code	B2
Filing date	Sep 29, 2014
Priority date	Mar 12, 2014
Publication date	Oct 8, 2019
Grant date	Oct 8, 2019

Abstract

The present invention provides an optical mask plate and a laser lift-off device. The optical mask plate comprises at least one totally-transmissive region and a blocking region surrounding the totally-transmissive region. The totally-transmissive region allows lasers having a predetermined wavelength to completely pass therethrough, while the blocking region does not allow the lasers having the predetermined wavelength to pass therethrough. The laser lift-off device comprises the optical mask plate. During the whole process of scanning a rigid substrate with the laser beam, as a laser emitter for emitting the laser beam can be in an on state all the time, the energy of the laser beam is nearly uniform in the process of scanning the rigid substrate with the laser beam, and in this way, edge portions of a flexible device can be prevented from being burned by the laser beam.

First claim

The invention claimed is:

1. An optical mask plate for a laser lift-off device, comprising at least one totally-transmissive region and a blocking region surrounding the totally-transmissive region, wherein the totally-transmissive region allows a laser beam having a predetermined wavelength to completely pass therethrough, while the blocking region does not allow the laser beam having the predetermined wavelength to pass therethrough, wherein the optical mask plate further comprises at least one transition region, each of which is located between the totally-transmissive region and the blocking region and allows a part of the laser beam having the predetermined wavelength to pass therethrough, each of the at least one totally-transmissive region is surrounded by one of the at least one transition region, a plurality of second through holes, each having a diameter between 10 and 100 micrometers, are formed in each transition region, and within each transition region, the number of the second through holes in a unit area decreases gradually in a direction from an edge adjacent to the totally-transmissive region to an edge adjacent to the blocking region.

2. The optical mask plate according to claim 1 , wherein the optical mask plate comprises a plurality of totally-transmissive regions, and each totally-transmissive region is surrounded by the blocking region.

3. The optical mask plate according to claim 1 , wherein the blocking region is made of metal material, and each totally-transmissive region is a first through hole.

4. The optical mask plate according to claim 1 , wherein the blocking region is made of metal material, and each totally-transmissive region is made of light transmitting material.

5. The optical mask plate according to claim 4 , wherein each totally-transmissive region is made of quartz material or glass.

6. The optical mask plate according to claim 1 , wherein, in a direction in which the totally-transmissive region has a longer length, a width of the transition region is one twentieth to one tenth of a width of the totally-transmissive region.

7. The optical mask plate according to claim 1 , wherein each transition region is made of metal material.

8. The optical mask plate according to claim 6 , wherein each transition region is made of metal material.

9. The optical mask plate according to claim 1 , wherein each transition region is made of material having a predetermined transmittance so that the transition region allows a part of the laser beam having the predetermined wavelength to pass therethrough.

10. The optical mask plate according to claim 6 , wherein each transition region is made of material having a predetermined transmittance so that the transition region allows a part of the laser beam having the predetermined wavelength to pass therethrough.

11. The optical mask plate according to claim 1 , wherein each transition region comprises a transparent material layer and a blocking layer disposed on the transparent material layer, a plurality of third through holes, each having a diameter between 10 and 100 micrometers, are formed in the blocking layer, the transparent material layer allows the laser beam having the predetermined wavelength to pass therethrough, and portions of the blocking layer without any third through hole formed therein do not allow the laser beam having the predetermined wavelength to pass therethrough.

12. The optical mask plate according to claim 6 , wherein each transition region comprises a transparent material layer and a blocking layer disposed on the transparent material layer, a plurality of third through holes, each having a diameter between 10 and 100 micrometers, are formed in the blocking layer, the transparent material layer allows the laser beam having the predetermined wavelength to pass therethrough, and portions of the blocking layer without any third through hole formed therein do not allow the laser beam having the predetermined wavelength to pass therethrough.

13. The optical mask plate according to claim 11 , wherein, within each transition region, the number of the third through holes in a unit area decreases gradually in a direction from an edge adjacent to the totally-transmissive region to an edge adjacent to the blocking region.

14. A laser lift-off device, comprising an optical mask plate and a laser emitter capable of emitting a laser beam having a predetermined wavelength, wherein the optical mask plate is the optical mask plate according to claim 1 , and the laser emitter is capable of emitting the laser beam towards the optical mask plate from one side of the optical mask plate.

15. A method for lifting off a flexible member from a rigid substrate by using an optical mask plate, the optical mask plate comprising at least one totally-transmissive region and a blocking region surrounding the totally-transmissive region, wherein the totally-transmissive region allows a laser beam having a predetermined wavelength to completely pass therethrough, while the blocking region does not allow the laser beam having the predetermined wavelength to pass therethrough, wherein the optical mask plate further comprises at least one transition region, each of which is located between the totally-transmissive region and the blocking region and allows a part of the laser beam having the predetermined wavelength to pass therethrough, and each of the at least one totally-transmissive region is surrounded by one of the at least one transition region, a plurality of second through holes, each having a diameter between 10 and 100 micrometers, are formed in each transition region, and within each transition region, the number of the second through holes in a unit area decreases gradually in a direction from an edge adjacent to the totally-transmissive region to an edge adjacent to the blocking region;
the flexible member comprising at least one flexible device and a cutoff region surrounding the flexible device; and
the method comprising:
aligning the optical mask plate with the flexible member such that the totally-transmissive region of the optical mask plate is aligned with the flexible device, and the cutoff region is correspondingly aligned with the blocking region of the optical mask plate; and
scanning the rigid substrate with the laser beam.

16. The method for lifting off a flexible member from a rigid substrate by using an optical mask plate according to claim 15 , wherein scanning the rigid substrate with the laser beam comprises: moving the laser beam from one side of the rigid substrate to the other side of the rigid substrate.

17. The method for lifting off a flexible member from a rigid member by using an optical mask plate according to claim 15 , wherein scanning the rigid substrate with the laser beam comprises: keeping the laser beam at a fixed position, while moving the rigid substrate relatively to the laser beam.

18. The method for lifting off a flexible member from a rigid member by using an optical mask plate according to claim 15 , wherein the optical mask plate is located between the laser beam and a surface of the rigid substrate without the flexible member arranged thereon.

Assignees

• Boe Technology Group Co Ltd

Inventors

• Shi Shiming

Classifications

• H10P72/0441

  Apparatus for sealing, encapsulating, glassing, decapsulating or the like · CPC title

• G02F1/133351

  Manufacturing of individual cells out of a plurality of cells, e.g. by dicing · CPC title

• G02F1/133305

  Flexible substrates, e.g. plastics, organic film · CPC title

• G02F1/1333

  Constructional arrangements; {Manufacturing methods}(G02F1/135, G02F1/136 take precedence) · CPC title

• B23K26/0661 Primary

  disposed on the workpiece · CPC title