Method and apparatus for determining a plurality of spatial coordinates on a measurement object

Patent metadata

Field	Value
Publication number	US-10422629-B2
Application number	US-201715426436-A
Country	US
Kind code	B2
Filing date	Feb 7, 2017
Priority date	Feb 15, 2016
Publication date	Sep 24, 2019
Grant date	Sep 24, 2019

Abstract

A method and an apparatus for determining a plurality of spatial coordinates on a measurement object using a working head having an image sensor for recording images of the measurement object. A first image of a first feature of the object with the working head in a first working position is recorded. First spatial coordinates representing a spatial position of the first feature are determined using first position information of the working head supplied by an encoder arrangement. The working head is then moved relative to the object to a second working position, where a second image of the object is recorded. Using the first and the second images, second position information which represents a spatial offset of the working head relative to the object is determined. Spatial coordinates for a second feature of the measurement object are determined on the basis of the second position information.

First claim

What is claimed is:

1. A method for determining a plurality of spatial coordinates on a measurement object having a plurality of features, the method comprising the steps of:
providing a working head having an image sensor which is configured to record an image of the measurement object,
arranging the object at a selected position within a working space in which the working head can move relative to the measurement object,
providing a coordinate system having a number of coordinate axes,
providing an encoder arrangement configured to supply first position information, the first position information representing a respective working position of the working head along at least one of the coordinate axes,
moving the working head relative to the measurement object to a first working position,
recording a first image of the measurement object using the image sensor, with a first feature from the plurality of features being measurably imaged in the first image,
determining first spatial coordinates representing a spatial position of the first feature within the coordinate system using the first position information supplied by the encoder arrangement representing the position of the working head in said first working position,
moving the working head relative to the measurement object to a second working position,
recording a second image in which a second feature from the plurality of features is measurably imaged,
evaluating the first and the second images in order to determine second position information which represents a spatial offset of the working head in said second working position relative to said first working position, and
determining second spatial coordinates representing a spatial position of the second feature within the coordinate system using the second position information.

2. The method according to claim 1 , wherein the second position information is determined on the basis of a selected feature from the plurality of features, wherein the selected feature is imaged in the first image and in the second image.

3. The method according to claim 2 , wherein the selected feature is the first feature.

4. The method according to claim 1 , wherein the second feature is measurably imaged only in the second image.

5. The method according to claim 1 , further comprising a step of providing a parameter data set which represents at least one of the following parameters: a defined working position within the working space, a defined path length within the working space, a defined trajectory within the working space, a current temperature in the region of the working space, and an elapsed time period relative to a defined reference time, wherein the second position information is used in dependence on the parameter data set for determining the second spatial coordinates.

6. The method according to claim 1 , wherein the second spatial coordinates are verified on the basis of the first position information from the encoder arrangement.

7. The method according to claim 1 , wherein correction values for the first position information are determined based on the second position information.

8. The method according to claim 1 , wherein movement parameters for moving the working head relative to the measurement object are determined in dependence on the second position information.

9. The method according to claim 8 , wherein the working head is moved, in dependence on the movement parameters, to a further working position relative to the measurement object in order to determine further spatial coordinates.

10. The method according to claim 1 , wherein a further image of the measurement object is recorded prior to the second image, and wherein, in dependence on the further image, a region of interest containing the second feature is determined for the second image before the working head reaches the second working position.

11. An apparatus for determining a plurality of spatial coordinates on a measurement object having a plurality of features, the apparatus comprising:
a working head having an image sensor configured to record an image of the measurement object,
a holder for arranging the measurement object at a selected position within a working space in which the working head can move relative to the measurement object,
a coordinate system having a number of coordinate axes,
an encoder arrangement configured to supply first position information, wherein the first position information represents a respective working position of the working head along at least one of the coordinate axes,
a drive mechanism for moving the working head relative to the measurement object, and
an evaluation and control unit,
wherein the evaluation and control unit is configured to move, by way of the drive mechanism, the working head to a first working position relative to the measurement object,
wherein the evaluation and control unit is further configured to record a first image of the measurement object using the image sensor at the first working position such that a first feature from the plurality of features is measurably imaged in the first image,
wherein the evaluation and control unit is further configured to determine first spatial coordinates which represent a spatial position of the first feature within the coordinate system using the first position information supplied by the encoder arrangement representing the position of the working head in said first working position,
wherein the evaluation and control unit is further configured to subsequently move the working head, using the drive mechanism, to a second working position relative to the measurement object,
wherein the evaluation and control unit is further configured to record a second image in which a second feature from the plurality of features is measurably imaged using the image sensor,
wherein the evaluation and control unit is further configured to evaluate the first and second images to determine second position information which represents a spatial offset of the working head in said second working position relative to said first working position, and
wherein the evaluation and control unit is further configured to determine second spatial coordinates which represent a spatial position of the second feature within the coordinate system using the second position information.

Assignees

• Zeiss Carl Industrielle Messtechnik Gmbh

Inventors

• Haverkamp Nils
• Held Tobias
• Seitz Dominik

Classifications

• G01B21/045

  Correction of measurements (G01B9/02055 takes precedence) · CPC title

• G01B11/005 Primary

  coordinate measuring machines · CPC title

• G01B11/04

  specially adapted for measuring length or width of objects while moving · CPC title

• G01B5/008

  using coordinate measuring machines · CPC title

• G01B9/02055

  Reduction or prevention of errors; Testing; Calibration · CPC title