Coordinate measuring machine and method for determining spatial coordinates on a measurement object

Patent metadata

Field	Value
Publication number	US-9684149-B2
Application number	US-201313960828-A
Country	US
Kind code	B2
Filing date	Aug 7, 2013
Priority date	Aug 7, 2012
Publication date	Jun 20, 2017
Grant date	Jun 20, 2017

Abstract

A coordinate measuring machine has a workpiece support for holding a measurement object and a measuring head which can be displaced relative to the workpiece support. The measuring head carries an optical sensor. An evaluation and control unit is configured to determine spatial coordinates on the measurement object depending on a position of the measuring head relative to the workpiece support and depending on sensor data from the optical sensor. The optical sensor includes a lens assembly and a camera. The lens assembly comprises at least four separate lens-element groups. Three of these separate lens-element groups can be displaced along the optical axis of the lens assembly. A first lens-element group is arranged fixed in the region of the light-entry opening of the lens assembly. The coordinate measuring machine with the above-described lens assembly allows individual variation of magnification, focusing and resolution.

First claim

What is claimed is:

1. A coordinate measuring machine for determining spatial coordinates on a measurement object, comprising:
a workpiece support for holding the measurement object,
a measuring head which can be displaced relative to the workpiece support and which carries an optical sensor, and
an evaluation and control unit configured to determine spatial coordinates on the measurement object depending on a position of the measuring head relative to the workpiece support and depending on sensor data from the optical sensor;
wherein the optical sensor includes a lens assembly and a camera configured to record an image of the measurement object through the lens assembly,
wherein the lens assembly has a lens body having a light-entry opening and a light-exit opening with an interface for connecting the camera,
wherein the lens assembly further has a stop and a plurality of lens elements defining an optical axis and forming a first lens-element group, a second lens-element group, a third lens-element group and a fourth lens-element group,
wherein the first lens-element group is arranged fixed in the region of the light-entry opening,
wherein the second lens-element group is arranged between the first lens-element group and the stop,
wherein the third lens-element group and the fourth lens-element group are arranged between the stop and the light-exit opening, and
wherein the positions of the stop and the second lens-element group, the third lens-element group and the fourth lens-element group each are individually moveable relative to the first lens-element group along the optical axis.

2. The coordinate measuring machine of claim 1 , further comprising individual control curves for each of the second, third and fourth lens-element groups and for the stop, with the evaluation and control unit being configured to individually move the second, third and fourth lens-element groups and the stop along the optical axis as a function of the individual control curves.

3. The coordinate measuring machine of claim 2 , wherein the individual control curves are configured to alternatively generate a variable magnification with substantially constant focusing on a defined working distance or variable focusing on different working distances with a substantially constant magnification.

4. The coordinate measuring machine of claim 2 , wherein the first and second lens-element groups together define a focus, which lies between the second and third lens-element groups, and wherein the individual control curves for the stop and the second lens-element group are selected such that the stop is always arranged in said focus.

5. The coordinate measuring machine of claim 1 , wherein the stop has a variable aperture, and wherein the evaluation and control unit is configured to control the variable aperture depending on a position of the stop along the optical axis.

6. The coordinate measuring machine of claim 1 , wherein the lens assembly further comprises a plurality of carriages and a plurality of motor drives for moving the carriages, with the second, third and fourth lens-element groups and the stop each being coupled to an individual carriage of their own.

7. The coordinate measuring machine of claim 1 , wherein the first lens-element group has positive refractive power, wherein the second lens-element group has negative refractive power, wherein the third lens-element group has positive refractive power and wherein the fourth lens-element group has negative refractive power.

8. The coordinate measuring machine of claim 1 , wherein the lens body has a beam splitter arranged between the first and the second lens-element groups and a further interface, said beam splitter being configured for coupling light from said further interface through the first lens-element group to the light-entry opening, or for coupling light from the light-entry opening through the first lens-element group to the further interface.

9. The coordinate measuring machine of claim 1 , wherein the first lens-element group is configured to produce a defined longitudinal chromatic aberration, which is corrected for by at least one of the second, third and fourth lens-element groups.

10. The coordinate measuring machine of claim 1 , wherein the lens assembly has a separate cover glass, which is arranged upstream of the first lens-element group in the region of the light-entry opening.

11. The coordinate measuring machine of claim 1 , wherein the first, second, third and fourth lens-element groups each comprise at least two lens elements.

12. The coordinate measuring machine of claim 1 , wherein the plurality of lens elements form exactly four separate lens-element groups.

13. The coordinate measuring machine of claim 1 , wherein the plurality of lens elements form five separate lens-element groups.

14. A lens assembly for an optical coordinate measuring machine for determining spatial coordinates on a measurement object, comprising a lens body which has a light-entry opening and a light-exit opening with an interface for connecting a camera, and a plurality of lens elements and a stop which are arranged in the lens body; wherein the lens elements form at least four separate lens-element groups which together define an optical axis, wherein at least two of the four lens-element groups can be displaced along the optical axis, wherein a first lens-element group of the at least four lens-element groups is arranged fixed in the region of the light-entry opening, and wherein the positions of the stop and a second lens-element group, a third lens-element group and a fourth lens-element group of the at least four lens-element groups are individually moveable relative to the first lens-element group along the optical axis, wherein the second lens-element group is arranged between the first lens-element group and the stop, and further wherein the third and fourth lens-element groups are arranged between the stop and the light-exit opening.

15. A method for determining spatial coordinates on a measurement object, comprising the steps of:
arranging the measurement object on a workpiece support,
providing a measuring head, which comprises a lens assembly and a camera, wherein the lens assembly comprises a lens body which has a light-entry opening and a light-exit opening with an interface for connecting the camera,
positioning the measuring head relative to the workpiece support,
recording at least one image of the measurement object through the lens assembly, and
determining the spatial coordinates on the measurement object depending on the position of the measuring head relative to the workpiece support and depending on the image;
wherein the lens assembly comprises a stop and a plurality of lens elements which are arranged in the lens body,
wherein the lens elements form at least four separate lens-element groups which together define an optical axis,
wherein at least two of the four lens-element groups are moveable along the optical axis, and
wherein a first lens-element group of the at least four lens-element groups is arranged fixed in the region of the light-entry opening, and wherein the positions of the stop and a second lens-element group, a third lens-element group and a fourth lens-element group of the at least four lens-element groups are individually moved relative to the first lens-element group along the optical axis in order to achieve both a predefined magnification and predefined focusing of the measurement object in the image, wherein the second lens-element group is arranged between the first lens-element group and the stop and further wherein the third and

Assignees

• Zeiss Carl Industrielle Messtechnik Gmbh

Inventors

• Winterot Johannes
• Engel Thomas

Classifications

• G02B21/0016

  Technical microscopes, e.g. for inspection or measuring in industrial production processes · CPC title

• G02B21/025

  with variable magnification (variable magnification G02B15/00) · CPC title

• G02B9/34 Primary

  having four components only · CPC title

• G02B21/364

  Projection microscopes · CPC title

• G02B21/088

  for both incident illumination and transillumination · CPC title