Method for determining measurement conditions of a roughness sensor, method for measuring a roughness of a workpiece surface, computer program product, and measuring device designed to perform the methods

Patent metadata

Field	Value
Publication number	US-9982987-B2
Application number	US-201715637860-A
Country	US
Kind code	B2
Filing date	Jun 29, 2017
Priority date	Feb 25, 2015
Publication date	May 29, 2018
Grant date	May 29, 2018

Abstract

A method for determining measurement conditions of a roughness sensor having at least one measuring needle, a computer program product and a measuring device for carrying out the method are provided. The measuring needle is positioned on a surface in a rest state and rests on the surface without being moved. Measurement signals are recorded in the rest state. A signal line of the roughness sensor is electrically grounded and measurement signals are recorded in the grounded rest state. Further, a method for measuring a roughness of a workpiece surface by the roughness sensor is provided in which the measuring needle is guided along a surface section of the workpiece surface to be measured and moved in a measurement direction (x-direction). The movement of the measuring needle in a plane (yz-plane) perpendicular to the measurement direction is recorded during the movement of the measuring needle along the workpiece surface.

First claim

What is claimed is:

1. A method for determining measurement conditions of a roughness sensor having at least one measuring needle, the method comprising the steps of:
(a) positioning the at least one measuring needle of the roughness sensor on a surface, the at least one measuring needle thereby contacting the surface;
(b) resting the at least one measuring needle in a rest state on the surface without moving the at least one measuring needle along the surface and concurrently recording measurement signals of the at least one measuring needle by the roughness sensor; and
(c) electrically grounding a signal line of the roughness sensor in a grounded rest state and concurrently recording the measurement signals of the measuring needle in the grounded rest state.

2. The method of claim 1 , further comprising the step of:
(d) ascertaining characteristics based on statistical averaging of at least one of the measurement signals of the at least one measuring needle recorded in the rest state and the measurement signals of the at least one measuring needle recorded in the grounded rest state.

3. The method of claim 2 , further comprising the step of:
(e) comparing the ascertained characteristics to predetermined threshold values for the at least one of the measurement signals of the at least one measuring needle recorded in the rest state and the measurement signals of the at least one measuring needle recorded in the grounded rest state, and generating a fault signal if the predetermined threshold values are exceeded.

4. The method of claim 2 , further comprising the step of:
(f) storing the characteristics for a subsequent correction of measurement values of the roughness sensor.

5. A method for measuring a roughness of a workpiece surface by a roughness sensor having at least one measuring needle, the method comprising the steps of:
(a) positioning the at least one measuring needle of the roughness sensor on a surface, the at least one measuring needle thereby contacting the surface;
(b) resting the at least one measuring needle in a rest state on the surface without moving the at least one measuring needle along the surface and concurrently recording measurement signals of the at least one measuring needle by the roughness sensor;
(c) guiding the at least one measuring needle along a surface section of the workpiece surface to be measured thereby moving the at least one measuring needle in a measurement direction;
(d) recording a movement of the at least one measuring needle in a plane perpendicular to the measurement direction when moving the at least one measuring needle along the workpiece surface;
(e) ascertaining user information about the roughness of the workpiece surface based on:
measurement values for the movement of the at least one measuring needle recorded in the plane perpendicular to the measurement direction; and
characteristics ascertained based on statistical averaging of at least one of the measurement signals of the at least one measuring needle recorded in the rest state and the measurement signals of the at least one measuring needle recorded in the grounded rest state; and

(f) outputting the user information.

6. A non-transitory computer readable storage medium encoded with program code comprising computer executable instructions for controlling a roughness sensor having at least one measuring needle and when the program code is executed operable to:
(a) position the at least one measuring needle of the roughness sensor on a surface, the at least one measuring needle thereby contacting the surface;
(b) rest the at least one measuring needle in a rest state on the surface without moving the at least one measuring needle along the surface and concurrently record measurement signals of the at least one measuring needle by the roughness sensor; and
(c) electrically grounding a signal line of the roughness sensor in a grounded rest state and concurrently recording the measurement signals of the measuring needle in the grounded rest state.

7. A measuring device comprising:
a roughness sensor having at least one measuring needle;
control electronics for the roughness sensor configured to ground a signal line of the roughness sensor;
an additional switching element for the control electronics configured to selectively ground the signal line; and
a processor coupled to the roughness sensor and being configured to:
(a) position the at least one measuring needle of the roughness sensor on a surface, the at least one measuring needle thereby contacting the surface; and
(b) rest the at least one measuring needle in a rest state on the surface without moving the at least one measuring needle along the surface and concurrently record measurement signals of the at least one measuring needle by the roughness sensor.

Assignees

• Zeiss Carl Industrielle Messtechnik Gmbh

Inventors

• Mayinger Philipp

Classifications

• G01B5/28 Primary

  for measuring roughness or irregularity of surfaces · CPC title

• G01B11/30

  for measuring roughness or irregularity of surfaces · CPC title

• G01B11/00

  Measuring arrangements characterised by the use of optical techniques · CPC title