Method for depositing a layer using a magnetron sputtering device

Patent metadata

Field	Value
Publication number	US-10407767-B2
Application number	US-201715696924-A
Country	US
Kind code	B2
Filing date	Sep 6, 2017
Priority date	Sep 7, 2016
Publication date	Sep 10, 2019
Grant date	Sep 10, 2019

Abstract

A method is provided for depositing a layer on a substrate inside a vacuum chamber by a magnetron sputtering device comprising at least two magnetron cathodes, each equipped with one target, at least one additional electrode, wherein a separate power supply unit is allocated to each magnetron cathode and wherein, in addition to at least one working gas, at least one reactive gas is introduced into the vacuum chamber. In a first phase, a pulsed negative direct current voltage is conducted from each power supply unit to the corresponding magnetron cathode, wherein the power supply units are operated in the push-pull mode. In a second phase, the pulsed direct current voltages provided by the power supply units are switched between the corresponding magnetron cathode and the additional electrode. An electric voltage is applied to the substrate or an electrode at the back of the substrate.

First claim

The invention claimed is:

1. A method for depositing a layer on a substrate inside a vacuum chamber by a magnetron sputtering device comprising at least two magnetron cathodes each equipped with a target, at least one additional electrode, wherein a separate power supply unit is allocated to each magnetron cathode, and wherein, in addition to at least one working gas, at least one reactive gas is introduced into the vacuum chamber, the method comprising:
in a first phase, conducting a pulsed, negative direct current voltage from each power supply unit to the corresponding magnetron cathode, wherein the power supply units are operated in the push-pull mode;
in a second phase, switching the pulsed direct current voltages provided by the power supply units between the corresponding magnetron cathode and the additional electrode, wherein the power supply units are operated in the common mode or overlapping with regard to pulse sections;
switching between the first phase and the second phase with a frequency in a range from 1 Hz to 10 kHz;
forming an electric voltage with a frequency higher than 1 MHz at the substrate or an electrode at the back of the substrate; and
controlling the introduction of the reactive gas into the vacuum chamber such that the sputtering of the targets occurs in the transition mode.

2. The method according to claim 1 , wherein time periods of the first phases are set overall to a ratio from 5% to 60%.

3. The method according to claim 1 , wherein time periods of the first phases are set overall to a ratio from 10% to 35%.

4. The method according to claim 1 , wherein for the forming of the electric voltage with the frequency higher than 1 MHz, electric power is used amounting to 5 to 50% of the electric power for the sputtering of all targets.

5. The method according to claim 4 , wherein for the forming of the electric voltage with the frequency higher than 1 MHz, electric power is used amounting to 10 to 35% of the electric power for the sputtering of all targets.

6. The method according to claim 1 , wherein at least one silicon-containing target is used.

7. The method according to claim 1 , wherein at least one aluminum-containing target is used.

8. The method according to claim 1 , wherein an at least oxygen-containing reactive gas is introduced into the vacuum chamber.

9. The method according to claim 8 , wherein a mixture of oxygen and nitrogen or a mixture of oxygen and a gas comprising a fluorine compound is introduced into the vacuum chamber as the reaction gas.

10. The method according to claim 1 , wherein the pressure inside the vacuum chamber is set to a value of less than 0.5 Pa.

Assignees

• Fraunhofer Ges Forschung

Inventors

• Bartzsch Hagen
• Frach Peter
• Hildisch Jan

Classifications

• H01J37/3444

  Associated circuits · CPC title

• H01J37/3417

  Arrangements · CPC title

• H01J37/3408

  Planar magnetron sputtering · CPC title

• H01J37/3467

  Pulsed operation, e.g. HIPIMS · CPC title

• C23C14/345

  using substrate bias · CPC title