Multi-blade and processing method of workpiece

Patent metadata

Field	Value
Publication number	US-10403520-B2
Application number	US-201816113496-A
Country	US
Kind code	B2
Filing date	Aug 27, 2018
Priority date	Aug 30, 2017
Publication date	Sep 3, 2019
Grant date	Sep 3, 2019

Abstract

A multi blade that processes semiconductor packages into a desired shape while dividing a package substrate includes plural cutting blades that divide the package substrate into the individual semiconductor packages and a spacer provided between two cutting blades adjacent to each other, and is configured in such a manner that the cutting blades and the spacer have the same rotation axis center. The outer surface of the spacer is formed into a transfer shape of the semiconductor package and is covered by an abrasive grain layer, and the upper surface of the package substrate is ground by the outer surface of the spacer simultaneously with cutting of the package substrate by the plural cutting blades.

First claim

What is claimed is:

1. A multi-blade that processes a workpiece into a desired shape while dividing the workpiece, the multi-blade comprising:
a shaft that is rotationally driven;
a plurality of cutting blades that are mounted to the shaft and divide the workpiece into individual chips; and
a spacer that is mounted to the shaft between two adjacent cutting blades,
wherein an outer surface of the spacer exposed from between the cutting blades is formed into a transfer shape that forms the desired shape in an outer circumference of the chip and is covered by an abrasive grain layer.

2. A processing method in which chips after dividing are processed into a desired shape while a workpiece having a front surface in which a plurality of planned dividing lines that intersect are formed is divided along the planned dividing lines by using a multi-blade including a shaft that is rotationally driven, a plurality of cutting blades that are mounted to the shaft and divide the workpiece into individual chips, and spacer that is mounted to the shaft between two adjacent cutting blades, the processing method comprising:
a holding step of holding a back surface of the workpiece by a holding jig or a holding tape; and
a dividing step of carrying out cutting to middle of the holding tape or into the holding jig by the cutting blades of the multi-blade along the planned dividing lines to divide the workpiece into the individual chips after carrying out the holding step,
wherein the desired shape is formed in an upper surface and/or a side surface of each chip by an abrasive grain layer of an outer surface of the spacer when dividing the workpiece into the individual chips in the dividing step.

3. The processing method according to claim 2 ,
wherein the workpiece is a package substrate in which semiconductor components on a wiring board are sealed by a resin layer,
the chip is a semiconductor package obtained by dividing a package substrate,
an inclined surface or a step part is formed in an end part of the spacer which is to be in contact with the cutting blade,
inclinations or steps are formed in package side surfaces by the inclined surface or the step part of the outer surface of the spacer in such a manner that a lower surface side of each semiconductor package becomes larger than an upper surface side of the semiconductor package in the dividing step, and
the processing method further comprises a shield layer forming step of forming a shield layer on the upper surfaces and inclined surfaces of a plurality of the semiconductor packages.

Assignees

• Disco Corp

Inventors

• Jang Byeongdeck
• Kim Youngsuk
• Ishii Takahiro
• Sakai Maki

Classifications

• H10W74/00

  Encapsulations, e.g. protective coatings · CPC title

• H10W90/754

  between a chip and a stacked insulating package substrate, interposer or RDL · CPC title

• H10P54/00

  Cutting or separating of wafers, substrates or parts of devices · CPC title

• H10W74/117

  the substrate having spherical bumps for external connection · CPC title

• H10W74/016

  using moulds · CPC title