Selective deposition with surface treatment

Patent metadata

Field	Value
Publication number	US-10378105-B2
Application number	US-201715610165-A
Country	US
Kind code	B2
Filing date	May 31, 2017
Priority date	May 31, 2016
Publication date	Aug 13, 2019
Grant date	Aug 13, 2019

Abstract

Embodiments of the invention provide methods for selective deposition on different materials using a surface treatment. According to one embodiment, the method includes providing a substrate containing a first material layer having a first surface and a second material layer having a second surface, and performing a chemical oxide removal process that terminates that second surface with hydroxyl groups. The method further includes modifying the second surface by exposure to a process gas containing a hydrophobic functional group, the modifying substituting the hydroxyl groups on the second surface with the hydrophobic functional group, and selectively depositing a metal-containing layer on the first surface but not on the modified second surface by exposing the substrate to a deposition gas.

First claim

What is claimed is:

1. A method of processing a substrate, comprising:
providing a substrate containing a first material layer having a first surface and a second material layer having a second surface, wherein the first material layer includes an initial metal-containing layer and the second material layer consists of silicon;
performing a chemical oxide removal process that includes exposing the substrate to HF and NH 3 gases, wherein the chemical oxide removal process removes a first oxide layer from the first surface, partially removes a second oxide layer from the second surface, and terminates the second surface with hydroxyl groups;
modifying the second surface by exposure to a process gas containing a hydrophobic functional group, the modifying substituting the hydroxyl groups on the second surface with the hydrophobic functional group; and
selectively depositing a metal-containing layer on the first surface but not on the modified second surface by exposing the substrate to a deposition gas.

2. The method of claim 1 , wherein the initial metal-containing layer includes a metal layer or a metal-compound layer.

3. The method of claim 2 , wherein the metal layer and the metal-compound layer contain Cu, Al, Ta, TaN, Ti, TiN, W, TiW, Ru, Co, Mo, W, Pt, Ir, Rh, or Re, or a combination thereof.

4. The method of claim 1 , wherein the process gas comprises a silicon-containing gas selected from an alkyl silane, an alkoxysilane, an alkyl alkoxysilane, an alkyl siloxane, an alkoxysiloxane, an alkyl alkoxysiloxane, an aryl silane, an acyl silane, an aryl siloxane, an acyl siloxane, a silazane, or any combination thereof.

5. The method of claim 1 , wherein the metal layer and the metal-compound layer contain Al, Ta, TaN, Ti, TiN, W, TiW, Ru, Co, Mo, W, Pt, Ir, Rh, or Re, or a combination thereof.

Assignees

• Tokyo Electron Ltd

Inventors

• Yu Kai-Hung
• Tapily Kandabara N
• HAKAMATA Takahiro
• Kal Subhadeep
• Leusink Gerrit J

Classifications

• H10P95/062

  involving a dielectric removal step · CPC title

• H10P95/00

  Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass · CPC title

• H10P70/20

  Cleaning during device manufacture · CPC title

• H10P14/432

  using selective deposition · CPC title

• H10P14/60

  of insulating materials · CPC title