Method of releasing graphene from substrate

Patent metadata

Field	Value
Publication number	US-10369775-B2
Application number	US-201715836737-A
Country	US
Kind code	B2
Filing date	Dec 8, 2017
Priority date	Dec 9, 2016
Publication date	Aug 6, 2019
Grant date	Aug 6, 2019

Abstract

The disclosed technology generally relates to preparing two-dimensional material layers, and more particularly to releasing a graphene layer from a template substrate. According to an aspect, a method of releasing a graphene layer includes providing a template substrate on which the graphene layer is provided, the method comprising: subjecting the graphene layer and the template substrate to a water treatment by soaking the graphene layer and the template substrate in water such that water is intercalated between the template substrate and the graphene layer; and subjecting the graphene layer and the template substrate to a delamination process, thereby releasing the graphene layer from the template substrate.

First claim

What is claimed is:

1. A method of releasing a graphene layer formed on a template substrate, the method comprising:
soaking the graphene layer and the template substrate in water such that water is intercalated between the template substrate and the graphene layer; and
delaminating the graphene layer from the template substrate, thereby releasing the graphene layer.

2. The method according to claim 1 , wherein soaking is performed for a predetermined duration prior to delaminating.

3. The method according to claim 2 , wherein soaking is performed for at least 1 hour.

4. The method according to claim 1 , wherein soaking comprises soaking in water at a temperature of at least 30° C.

5. The method according to claim 1 , further comprising:
prior to delaminating, transferring the template substrate and the graphene layer to a target substrate and bonding the graphene layer to the target substrate,
wherein delaminating comprises releasing the graphene layer from the template substrate while keeping the graphene layer bonded to the target substrate.

6. The method according to claim 5 , wherein bonding comprises bonding the graphene layer to a hydrophobic surface of the target substrate.

7. The method according to claim 6 , wherein the hydrophobic surface comprises a self-assembled monolayer (SAM) formed on the target substrate.

8. The method according to claim 7 , wherein the SAM is a monolayer selected from the group consisting of perfluorodecyltrichlorosilane (FDTS), octadecyltrichlorosilane (ODTS) and hexamethyldisilazane (HMDS).

9. The method according to claim 1 , further comprising:
forming a carrier layer on a second surface of the graphene layer facing away from the template substrate; and
subsequent to releasing the graphene layer from the template substrate, transferring and bonding the graphene layer to a target substrate with a first surface of the graphene layer facing the target substrate.

10. The method according to claim 1 , wherein delaminating includes submerging the template substrate and the graphene layer in a liquid and forming bubbles at an interface between the template substrate and the graphene layer.

11. The method according to claim 1 , wherein delaminating includes submerging the template substrate and the graphene layer in a solution comprising an electrolyte and causing an electrolysis reaction.

12. The method according to claim 11 , wherein the electrolysis reaction is caused by applying a voltage between two electrodes, wherein the template substrate serves as one of the electrodes.

13. The method according to claim 1 , wherein delaminating includes subjecting the template substrate and the graphene layer to ultrasound.

14. The method according to claim 1 , further comprising providing the graphene layer formed on the template substrate, wherein providing the graphene layer comprises growing on the template substrate.

15. The method according to claim 1 , wherein the template substrate comprises a surface formed of one of a transition metal, an alloy of transition metals, a group III element or a group IV element.

16. The method according to claim 15 , wherein the surface of the template substrate is formed of Pt.

17. The method according to claim 1 , wherein the template substrate includes a growth layer on which the graphene layer is provided and a support layer on which the growth layer is arranged.

Assignees

• Imec Vzw
• Univ Leuven Kath

Inventors

• Brems Steven
• Huyghebaert Cedric
• Verguts Ken
• De Gendt Stefan

Classifications

• B81C1/00

  Manufacture or treatment of devices or systems in or on a substrate (B81C3/00 takes precedence) · CPC title

• B32B37/00

  Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding · CPC title

• C07F7/10

  containing nitrogen {having a Si-N linkage} · CPC title

• Y10T156/11

  Methods of delaminating, per se; i.e. , separating at bonding face · CPC title

• C07F7/081

  comprising at least one atom selected from the elements N, O, halogen, S, Se or Te · CPC title