Method of measuring a temperature of a heat plate and method thereof

Patent metadata

Field	Value
Publication number	US-10359320-B2
Application number	US-201715428818-A
Country	US
Kind code	B2
Filing date	Feb 9, 2017
Priority date	Feb 16, 2016
Publication date	Jul 23, 2019
Grant date	Jul 23, 2019

Abstract

A device that measures a temperature of a heat plate for heating a target substrate mounted thereon, includes: a temperature measurement substrate including a substrate body and temperature sensors installed in the substrate body; a memory part to store correction parameters over a plurality of time zones after the temperature measurement substrate is mounted on the heat plate; and a data processing part configured to acquire time transition data of a temperature by correcting respective temperature detection values sampled at predetermined time intervals after the temperature measurement substrate is mounted on the heat plate, using the correction parameters stored in the memory part in a corresponding relationship with the temperature sensors and the time zones. The correction parameters are obtained in advance based on a standard temperature transition data acquired in advance using the temperature sensors and a time transition data acquired by each of the temperature sensors.

First claim

What is claimed is:

1. A device that measures a temperature of a heat plate configured to heat a target substrate mounted thereon, the device comprising:
a temperature measurement substrate including a substrate body and a plurality of temperature sensors installed in the substrate body;
a heating module configured to change an orientation of the temperature measurement substrate mounted on the heat plate;
a memory part to, for each of the plurality of temperature sensors, store correction parameters over a plurality of time zones after the temperature measurement substrate is mounted on the heat plate; and
a data processing part configured to acquire time transition data of a temperature by correcting respective temperature detection values sampled at predetermined time intervals after the temperature measurement substrate is mounted on the heat plate, using the correction parameters stored in the memory part in a corresponding relationship with the plurality of temperature sensors and the plurality of time zones,
wherein the correction parameters are obtained in advance based on a standard temperature transition data acquired in advance using the plurality of temperature sensors and a time transition data acquired by each of the plurality of temperature sensors,
wherein the heating module is further configured to set an adjustment temperature based on the acquired time transition data, and
wherein the correction parameters include an adjustment parameter T corresponding to a time delay and an adjustment parameter G corresponding to a gain, and a temperature detection value Θ corrected by the correction parameters is obtained by a following formula:
Θ k =G·θ k ′

θ k ′={( T/Δt )·(θ k −θ k-1 )}+θ′ k-1

where θ is a temperature detection value of each of the plurality of temperature sensors, θ′ is a value of an intermediate correction step of the temperature detection value, Δt is a sampling period, k is a certain sampling time, and k−1 is a sampling time just earlier than a kth sampling time.

2. The device of claim 1 , wherein each of the plurality of time zones in which the correction parameters are determined, corresponds to a time zone between preceding and following sampling timings after the temperature measurement substrate is mounted on the heat plate.

3. The device of claim 1 , wherein the correction parameters are set for each process temperature which is a temperature reached when the target substrate is mounted on the heat plate.

4. The device of claim 1 , wherein the standard temperature transition data is a highest temperature among temperatures respectively detected by the plurality of temperature sensors in each of the plurality of time zones in which the correction parameters are determined.

5. The device of claim 1 , wherein the standard temperature transition data is an average value of temperatures respectively detected by the plurality of temperature sensors in each of the plurality of time zones in which the correction parameters are determined.

6. A method of measuring a temperature of a heat plate configured to heat a target substrate mounted thereon, comprising:
mounting a temperature measurement substrate, which includes a substrate body and a plurality of temperature sensors installed in the substrate body, on the heat plate;
changing, by a heating module, an orientation of the temperature measurement substrate mounted on the heat plate;
acquiring, for each of the plurality of temperature sensors, correction parameters over a plurality of time zones after the temperature measurement substrate is mounted on the heat plate, based on a standard temperature transition data acquired using the plurality of temperature sensors and a time transition data acquired by each of the plurality of temperature sensors;
acquiring a time transition data of a temperature by correcting respective temperature detection values sampled at predetermined time intervals after the temperature measurement substrate is mounted on the heat plate, using the correction parameters corresponding to the plurality of temperature sensors and the plurality of time zones; and
setting, by the heating module, an adjustment temperature based on the acquired time transition data,
wherein the correction parameters include an adjustment parameter T corresponding to a time delay and an adjustment parameter G corresponding to a gain, and a temperature detection value Θ corrected by the correction parameters is obtained by a following formula:
Θ k =G·θ k ′

θ k ′={( T/Δt )·(θ k −θ k-1 )}+θ′ k-1

where θ is a temperature detection value of each of the plurality of temperature sensors, θ′ is a value of an intermediate correction step of the temperature detection value, Δt is a sampling period, k is a certain sampling time, and k−1 is a sampling time just earlier than a kth sampling time.

Assignees

• Tokyo Electron Ltd

Inventors

• Nogami Tsuyoshi
• Nakaharada Masahiro

Classifications

• G01K13/00

  Thermometers specially adapted for specific purposes · CPC title

• G01K15/005

  Calibration · CPC title

• G01K3/06 Primary

  in respect of space · CPC title

• G01K3/10 Primary

  in respect of time, e.g. reacting only to a quick change of temperature · CPC title

• G01K2007/422

  Dummy objects used for estimating temperature of real objects · CPC title