Mounting table and plasma processing apparatus

Patent metadata

Field	Value
Publication number	US-10340174-B2
Application number	US-201414160735-A
Country	US
Kind code	B2
Filing date	Jan 22, 2014
Priority date	Jan 22, 2013
Publication date	Jul 2, 2019
Grant date	Jul 2, 2019

Abstract

A mounting table includes an electrostatic chuck having a mounting surface and a backside opposite to the mounting surface, a first through hole being formed in the mounting table; a base joined to the backside of the electrostatic chuck and having a second through hole in communication with the first through hole; a lifter pin which is received in a pin hole formed by the first through hole and the second through hole, the lifter pin being movable up and down to protrude beyond and retract below the mounting surface. An upper end portion of the lifter pin has a shape in which a diameter decreases toward a lower end of the lifter pin to correspond to a shape of the upper end portion of the pin hole. The upper end portion of the lifter pin is in surface contact with the upper end portion of the pin hole.

First claim

What is claimed is:

1. A mounting table, comprising:
an electrostatic chuck having a mounting surface on which a processing target is to be mounted and a backside surface opposite to the mounting surface, a first through hole being formed in the electrostatic chuck;
a base joined to the backside surface of the electrostatic chuck and having a second through hole with a diameter larger than a diameter of the first through hole and in communication with the first through hole;
a cylindrical sleeve inserted in the second through hole and formed of an insulating material; and
a lifter pin which is received in a pin hole formed by the first through hole and the second through hole, the lifter pin being movable up and down to protrude beyond and retract below the mounting surface so as to transfer the processing target in a vertical direction,
a cylindrical spacer inserted in the cylindrical sleeve and in the first through hole and made of an insulating material,
wherein the cylindrical sleeve is in contact with the base in the second through hole and a top end of the cylindrical sleeve is in contact with the backside surface of the electrostatic chuck,
wherein the cylindrical spacer has an accommodating portion and a flange portion, the accommodation portion extending from a bottom end of the cylindrical sleeve up to the mounting surface of the electrostatic chuck and the flange portion having a flange shape protruding outwardly in a radial direction of the accommodation portion, wherein an upper surface of the flange portion faces a lower surface of the base, and
wherein the cylindrical sleeve has a flange portion,
wherein the flange portion of the cylindrical sleeve and a portion of the accommodation portion of the cylindrical spacer are provided in the second through hole of the base.

2. The mounting table of claim 1 , wherein the cylindrical sleeve is formed of a ceramic and the cylindrical spacer is formed of a resin.

3. The mounting table of claim 1 , wherein the electrostatic chuck is configured to electrostatically attract the processing target.

4. The mounting table of claim 1 , wherein an outer surface of the cylindrical spacer in said cylindrical sleeve is adjacent to an inner surface of said cylindrical sleeve, and an outer surface of the cylindrical spacer in said first through hole is adjacent to the electrostatic chuck.

5. The mounting table of claim 1 , wherein an exhaust hole connected to the pin hole is formed in the mounting table, one end of the exhaust hole is open at a sidewall of the cylindrical spacer and the other end of the exhaust hole is open at a sidewall of the base.

6. A mounting table, comprising:
a base;
an electrostatic chuck arranged on the base, the electrostatic chuck having a mounting surface on which a processing target is to be mounted;
a first hole extending through the base and the electrostatic chuck;
a second hole extending through the base and the electrostatic chuck;
a lifter pin which is received in the first hole, the lifter pin being movable up and down to protrude beyond and retract below the mounting surface so as to transfer the processing target in a vertical direction;
a first sleeve and a second sleeve respectively inserted in a first hole portion and in a second hole portion in the base, the first sleeve and the second sleeve being formed of an insulating material;
a first spacer inserted in the first sleeve and in a first hole portion in the electrostatic chuck, the first spacer being formed of an insulating material; and
a second spacer inserted in the second sleeve and in a second hole portion in the electrostatic chuck,
wherein a gas supply path configured to supply a heat transfer gas is formed inside of the second spacer and a radial space in the gas supply path is narrowed by the second sleeve and the second spacer to prevent a discharge in the gas supply path,
wherein the second sleeve is in contact with the base in the second hole portion in the base and a top end of the second sleeve is in contact with a backside surface of the electrostatic chuck,
wherein the second spacer extends from a bottom end of the second sleeve up to the mounting surface of the electrostatic chuck,
wherein the first spacer has an accommodating portion and a flange portion, the accommodation portion extending from a bottom end of the first sleeve up to the mounting surface of the electrostatic chuck and the flange portion having a flange shape protruding outwardly in a radial direction of the accommodation portion, wherein an upper surface of the flange portion faces a lower surface of the base, and
wherein the first sleeve has a flange portion.

7. The mounting table of claim 6 , wherein the second hole has a larger diameter portion in the base, and said larger diameter portion has a diameter larger than the second hole portion in the electrostatic chuck.

8. The mounting table of claim 6 , wherein an upper end portion of the first hole has a tapered shape and an upper end portion of the lifter pin has an inversely tapered shape corresponding to the tapered shape of the upper end portion of the first hole.

9. The mounting table of claim 6 , wherein the second spacer has a larger outer diameter portion in the base and a smaller outer diameter portion in the electrostatic chuck.

10. The mounting table of claim 9 , wherein an outer surface of the second spacer in said second sleeve is adjacent to an inner surface of said second sleeve, and an outer surface of the second spacer in said second hole portion in the electrostatic chuck is adjacent to the electrostatic chuck.

11. The mounting table of claim 6 , wherein the second spacer has a larger inner diameter portion in the base and a smaller inner diameter portion in the electrostatic chuck.

12. The mounting table of claim 6 , wherein the second sleeve is formed of a ceramic and the second spacer is formed of a resin.

13. The mounting table of claim 6 , wherein the electrostatic chuck is configured to electrostatically attract the processing target.

14. The mounting table of claim 6 , wherein an outer surface of the second spacer in said second sleeve is adjacent to an inner surface of said second sleeve, and an outer surface of the second spacer in said second hole portion in the electrostatic chuck is adjacent to the electrostatic chuck.

15. The mounting table of claim 6 , wherein the first sleeve is in contact with the base in the first hole portion in the base and a top end of the first sleeve is in contact with a backside surface of the electrostatic chuck.

16. The mounting table of claim 6 , wherein an exhaust hole connected to the first hole is formed in the mounting table, one end of the exhaust hole is open at a sidewall of the first spacer and the other end of the exhaust hole is open at a sidewall of the base.

Assignees

• Tokyo Electron Ltd

Inventors

• Yamaguchi Shin
• Hayashi Daisuke
• Kudo Yasuhisa

Classifications

• H10P72/72

  using electrostatic chucks · CPC title

• H10P72/7612 Primary

  characterised by lifting arrangements, e.g. lift pins · CPC title

• H01J37/32733

  Means for moving the material to be treated · CPC title

• H01L21/6831

  Electricity · mapped topic

• H01L21/68742 Primary

  Electricity · mapped topic