Joined body manufacturing method and joined body

Patent metadata

Field	Value
Publication number	US-10332771-B2
Application number	US-201615244397-A
Country	US
Kind code	B2
Filing date	Aug 23, 2016
Priority date	Mar 7, 2014
Publication date	Jun 25, 2019
Grant date	Jun 25, 2019

Abstract

In a step (a), a ceramic substrate, a brazing material including a metal having a large thermal expansion coefficient, a porous body having a smaller thermal expansion coefficient than the brazing material, and a feeding terminal are placed on a joint surface in such a way that a joint surface of the feeding terminal faces a joint surface of the ceramic substrate. In a step (b), the brazing material is fused to allow the brazing material to penetrate into the pores of the porous body. In this manner, a joint layer containing the brazing material and the porous body is formed, and the joint surface of the ceramic substrate and the joint surface of the feeding terminal are joined to each other through the joint layer.

First claim

What is claimed is:

1. A joined body comprising:
a first member including a ceramic;
an electrode embedded in the first member;
a second member including a metal; and
a joint layer that joins the first member and the second member to each other such that the second member is electrically continuous with the electrode, the joint layer including a porous body that has pores filled with a metal having a larger thermal expansion coefficient than the first member, is made of a material having a smaller thermal expansion coefficient than the metal, and has a porosity of 30% to 50% when the metal is assumed to be absent.

2. The joined body according to claim 1 , wherein the first member and the porous body are members that are different from each other.

3. The joined body according to claim 2 , wherein the first member is a ceramic substrate in an electrostatic chuck and the second member is a feeding terminal in the electrostatic chuck.

4. A method for manufacturing the joined body according to claim 1 in which a joint surface of a first member made of a ceramic and a joint surface of a second member made of a metal are joined to each other through a joint layer, the method comprising the steps of:
(a) disposing, on the joint surface of the first member, a brazing material including a metal having a larger thermal expansion coefficient than the first member, a porous body having a smaller thermal expansion coefficient than the brazing material, and the second member; and
(b) fusing the brazing material to impregnate pores of the porous body with the brazing material to thereby form a joint layer including the brazing material and the porous body, whereby the joint surface of the first member and the joint surface of the second member are joined to each other through the joint layer.

5. The method for manufacturing a joined body according to claim 4 , wherein the porous body has a porosity of 30% to 50%.

6. The method for manufacturing a joined body according to claim 4 , wherein the porous body is a porous sintered body made of the same ceramic material as the first member.

7. The method for manufacturing a joined body according to claim 4 , wherein in the step (a), the surface of the pores of the porous body is coated in advance with a material having higher wettability to the brazing material than the porous body.

8. The method for manufacturing a joined body according to claim 4 , wherein in the step (a), the joint surface of the first member is coated in advance with a material having higher wettability to the brazing material than the joint surface of the first member, and/or the joint surface of the second member is coated in advance with a material having higher wettability to the brazing material than the joint surface of the second member.

9. The method for manufacturing a joined body according to claim 4 , wherein the first member does not have a portion rising from the joint surface thereof.

Assignees

• Ngk Insulators Ltd

Inventors

• Minami Tomoyuki
• Nobori Kazuhiro
• Kawajiri Tetsuya

Classifications

• H10P72/7626

  characterised by the construction of the shaft · CPC title

• H10P72/7616

  characterised by a coating, a hardness or a material · CPC title

• H10P72/0432

  mainly by conduction · CPC title

• H10P72/0431

  Apparatus for thermal treatment · CPC title

• H10P72/72 Primary

  using electrostatic chucks · CPC title