Defect detection using thermal laser stimulation and atomic force microscopy
US-2024069095-A1 · Feb 29, 2024 · US
US10330698B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10330698-B2 |
| Application number | US-201715785791-A |
| Country | US |
| Kind code | B2 |
| Filing date | Oct 17, 2017 |
| Priority date | Oct 18, 2016 |
| Publication date | Jun 25, 2019 |
| Grant date | Jun 25, 2019 |
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A holding device for detachably holding a magnetic sample holder or a sample body, in particular for a scanning probe microscope, wherein the holding device includes an accommodation unit for accommodating the magnetic sample holder or the sample body, a magnetic field guiding unit which, in a holding mode, is adapted for guiding a magnetic field for applying a magnetic holding force at the accommodation unit for holding the magnetic sample holder or sample body which is accommodated at the accommodation unit, and a magnetic field switching unit which is adapted for switching between at least two relative arrangements between the magnetic field guiding unit and the magnetic field switching unit, in order to selectively adjust the holding mode or a release mode, wherein in the release mode the magnetic sample holder or sample body is released for being detached from the accommodation unit.
Opening claim text (preview).
The invention claimed is: 1. A holding device for detachably holding a magnetic sample holder or sample body, in particular for a scanning probe microscope, wherein the holding device comprises: an accommodation unit for accommodating a magnetic sample holder or a sample body; a magnetic field guiding unit which, in a holding mode, is adapted for guiding a magnetic field for applying a magnetic holding force at the accommodation unit for holding the magnetic sample holder or the sample body which is accommodated at the accommodation unit; a magnetic field switching unit which is adapted for switching between at least two relative spatial arrangements between the magnetic field guiding unit and the magnetic field switching unit, in order to selectively adjust the holding mode or a release mode, wherein in the release mode the magnetic sample holder or sample body is released for being detached from the accommodation unit, and wherein the magnetic field switching unit is configured to switch between the at least two relative spatial arrangements by moving the magnetic field switching unit, such that, in at least one of the two relative spatial arrangements, the magnetic field switching unit is at least partially inserted longitudinally into a recess in the magnetic field guiding unit. 2. The holding device according to claim 1 , wherein the magnetic field switching unit comprises a magnet for generating the magnetic field. 3. The holding device according to claim 1 , wherein the magnetic field guiding unit comprises or consists of magnetizable material. 4. The holding device according to claim 1 , wherein in the release mode the magnetic field is guided away from the accommodation unit. 5. The holding device according to claim 1 , wherein the magnetic field switching unit is adapted for switching between the at least two relative spatial arrangements by linearly moving at least a part of the magnetic field switching unit. 6. The holding device according to claim 1 , wherein the magnetic field switching unit is adapted for purely mechanically switching between the at least two relative spatial arrangements. 7. The holding device according to claim 1 , wherein the magnetic field guiding unit and the magnetic field switching unit are adapted for, in the release mode, switching off the magnetic holding force which is acting in the holding mode for holding the magnetic sample holder or sample body which is accommodated at the accommodation unit. 8. The holding device according to claim 1 , wherein the magnetic field guiding unit and the magnetic field switching unit are adapted, in the holding mode, for forming magnetic field lines passing through the sample holder or the sample body at the accommodation unit, and in the release mode, for forming magnetic field lines passing through an alternative path. 9. The holding device according to claim 1 , comprising at least one of the following features: wherein the magnetic field guiding unit and the magnetic field switching unit are adapted in the holding mode, for forming a magnetic circuit through the sample holder or sample body at the accommodation unit, and in the release mode, for forming an alternative magnetic circuit past the sample holder or sample body at the accommodation unit; wherein the magnetic field switching unit is adapted as a source of a magnetic flux, whose magnetic flux, by switching between the at least two relative spatial arrangements, is guidable through two different magnetic paths which are defined by the magnetic field guiding unit; wherein the magnetic field guiding unit and the magnetic field switching unit are adapted such that during converting between the at least two relative spatial arrangements, a sum of the magnetic resistances of the both magnetic paths is substantially constant; wherein at least one of the at least two relative spatial arrangements is assigned to an associated stop position of the magnetic field switching unit at a boundary wall in a recess in an interior of the magnetic field guiding unit; wherein the holding device further comprises: a bias unit configured for mechanically biasing the magnetic field switching unit in one of the at least two relative spatial arrangements. 10. The holding device according to claim 1 , wherein the magnetic field guiding unit comprises a magnetic shoe with a recess, and the magnetic field switching unit comprises a magnetic carriage which is mounted for displacing in the recess. 11. The holding device according to claim 10 , comprising at least one of the following features: wherein the magnetic shoe comprises, substantially perpendicular with respect to a displacement direction of the magnetic carriage, a magnetic barrier which is defined by a nonmagnetic material in one or more air gaps; wherein a permanent magnetic block of the magnetic carriage has a contact surface with a first interface surface of an adjacent wall of the recess on a side of the magnetic barrier in the release mode, and/or with a second interface surface of an adjacent wall of the recess on another side of the magnetic barrier in the holding mode, which contact surface is smaller than the first interface surface and/or is smaller than the second interface surface. 12. The holding device according to claim 10 , wherein the magnetic shoe at a surface which is facing the accommodation unit comprises two pole projections made of magnetic material. 13. The holding device according to claim 10 , wherein the magnetic carriage comprises a permanent magnetic block which is molded to a nonmagnetic material of the magnetic carriage. 14. The holding device according to claim 1 , configured as energetically autarkic holding device operable without an electric energy supply. 15. The holding device according to claim 1 , comprising at least one further magnetic field guiding unit and at least one further magnetic field switching unit with the features according to claim 1 , wherein the magnetic field guiding unit and the magnetic field switching unit and the at least one further magnetic field guiding unit and the at least one further magnetic field switching unit are adapted for commonly acting on the same accommodation unit. 16. The holding device according to claim 15 , comprising a control body which is drivable for simultaneously acting upon the magnetic field switching unit and the at least one further magnetic field switching unit. 17. The holding device according to claim 16 , wherein the control body is configured as a control disk which is drivable in a rotating manner to simultaneously act upon the magnetic field switching unit and the at least one further magnetic field switching unit which, and wherein the control body together with the magnetic field guiding unit and the at least one further magnetic field guiding unit, are arranged circumferentially around the control disk and/or within the control disk. 18. A scanning probe microscope for determining surface information with respect to a sample body by scanningly sampling a surface of a sample body, wherein the scanning probe microscope comprises: a magnetic sample holder for holding the sample body, or a magnetic sample body; a holding device for detachably holding the magnetic sample holder or the sample body, the holding device having: an accommodation unit for accommodating a magnetic sample holder or a sample body; a magnetic field guiding unit which, in a holding mode, is adapted for guiding a magnetic field for applying a magnetic holding force at the accommodation unit for holding the
AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes · CPC title
Fine scanning or positioning · CPC title
Sample handling devices or methods · CPC title
Methods or apparatus for measurement or analysis of nanostructures · CPC title
Means for protecting or isolating the interior of a sample chamber from external environmental conditions or influences, e.g. vibrations or electromagnetic fields · CPC title
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