Workpiece support jig

Patent metadata

Field	Value
Publication number	US-10297488-B2
Application number	US-201615245977-A
Country	US
Kind code	B2
Filing date	Aug 24, 2016
Priority date	Sep 10, 2015
Publication date	May 21, 2019
Grant date	May 21, 2019

Abstract

A workpiece support jig includes a support plate supporting a workpiece on a first surface while covering a support surface of a chuck table with a second surface opposite to the first surface and a retainer plate including an area sufficient to cover the whole of the workpiece and sandwiching the workpiece, held on the first surface of the support plate, between the support plate and itself. The support plate includes a plurality of groove parts corresponding to projected division lines of the supported workpiece and a plurality of through holes formed in chip-holding regions demarcated and divided by the intersecting groove parts. When the workpiece divided by a processing unit into chips is unloaded from the chuck table, the workpiece is unloaded while being sandwiched between the support plate and the retainer plate.

First claim

What is claimed is:

1. A system to be used for processing a plate-shaped workpiece, the system comprising:
a processing device comprising a chuck table including a suction means for holding the plate-shaped workpiece including a plurality of regions demarcated by a plurality of intersecting projected division lines, a solenoid selector for controlling the suction means, and processing means for dividing the workpiece held by the chuck table into a plurality of chips along the projected division lines;
a workpiece support jig comprising:
a support plate supporting the workpiece on a first surface while covering a support surface of the chuck table with a second surface opposite to the first surface; and
a retainer plate including an area sufficient to cover the whole of the workpiece and sandwiching the workpiece, held on the first surface of the support plate, between the support plate and itself,

wherein the support plate includes a plurality of groove parts corresponding to the projected division lines of the supported workpiece and a plurality of through holes formed in chip-holding regions demarcated and divided by the intersecting groove parts,
wherein the through holes extend from the first surface to the second surface, the through holes are configured to receive a suction force from the suction means of the chuck table, and the through holes abut the support surface of the chuck table when the jig is on the chuck table to form a vacuum seal;
wherein the jig is detachable from the chuck table without disassembly, so that when the workpiece is unloaded from the chuck table, the workpiece is unloaded while being sandwiched between the support plate and the retainer plate; and
wherein the solenoid selector is configured to interrupt the suction force for removing the jig from the surface of the chuck table, simultaneously breaking the vacuum seal.

2. The system according to claim 1 , further comprising elastic members covering regions for supporting the workpiece on the first surface of the support plate.

3. The system according to claim 1 , wherein the support plate is formed of resin.

4. The system according to claim 1 , wherein the retainer plate includes a pair of rotatable latches, removably securing the retainer plate to the support plate.

Assignees

• Disco Corp

Inventors

• Fukuoka Takeomi

Classifications

• H10P72/7416

  used during dicing or grinding · CPC title

• H10P72/74

  using temporarily an auxiliary support · CPC title

• H10P72/18

  characterised by being specially adapted for supporting a single substrate or by comprising a stack of such individual supports · CPC title

• H10P72/78 Primary

  using vacuum or suction, e.g. Bernoulli chucks · CPC title

• H01L2221/68327

  Electricity · mapped topic