MEMS device

Patent metadata

Field	Value
Publication number	US-10287159-B2
Application number	US-201615363431-A
Country	US
Kind code	B2
Filing date	Nov 29, 2016
Priority date	Jun 5, 2014
Publication date	May 14, 2019
Grant date	May 14, 2019

Abstract

A MEMS device including a fixed member and a movable member supported via a resilient body. The MEMS device includes an impact alleviation mechanism provided at a position where the movable member and the fixed member collide during operation. The impact alleviation mechanism includes a stopper provided to either the fixed member or the movable member and that protrude to be parallel between sides of the two members with at least one side edge fixed to the respective member. Moreover, the impact alleviation mechanism includes an elongate protruding member provided on the other of the fixed member and the movable member. The elongate protruding member and the stopper are configured such that as collision force increases between the movable member and the fixed member during operation, an abutment area of an outer edge position of the elongate protruding member approaches the fixed side edge of the stopper.

First claim

The invention claimed is:

1. A MEMS device comprising:
a fixed member;
a movable member coupled to the fixed member by at least one resilient body; and
an impact alleviation mechanism having:
a stopper disposed between the fixed member and the movable member and extending in a direction parallel to respective sides of the fixed member and the movable member, the stopper having side edges of which at least one of the side edges is fixed to the fixed member or the movable member, and
an elongate protruding member disposed on the other of the fixed member and the movable member that is not fixed to the stopper, such that the elongate protruding member protrudes towards the stopper
wherein the stopper includes a pair of side edges and is fixed to the fixed member or the movable member to define a space between the stopper and the fixed member or the movable member to which the stopper is fixed.

2. The MEMS device according to claim 1 , wherein the elongate protruding member and the stopper are configured such that as a collision force increases between the movable member and the fixed member when the movable member vibrates, an outer edge position of an abutment area of the elongate protruding member approaches the fixed side edge of the stopper.

3. The MEMS device according to claim 1 , wherein only one side edge of the stopper is fixed to the fixed member or the movable member and the other side edge of the stopper is not fixed and extends between the fixed member and the movable member.

4. The MEMS device according to claim 3 , wherein the elongate protruding member has an abutment surface that is curved to be raised between an apex of the elongate protruding member facing the stopper and a portion of the elongate protruding member adjacent to the fixed side edge of the stopper.

5. The MEMS device according to claim 1 , wherein, when the elongate protruding member abuts against the fixed side edge of the stopper, the stopper does not abut against the fixed member or the movable member to which the stopper is fixed.

6. The MEMS device according to claim 1 , wherein the elongate protruding member is a strip protruding from the other of the fixed member and the movable member.

7. The MEMS device according to claim 6 , wherein the elongate protruding member includes a pair of side edges fixed to the other of the fixed member and the movable member and the strip is curved to protrude towards the stopper.

8. The MEMS device according to claim 1 , wherein at least one of the elongate protruding member or the stopper is formed to be integrated with the fixed member or the movable member.

9. The MEMS device according to claim 1 , wherein the stopper has a width that increases as the stopper extends towards the side edge fixed to the fixed member or the movable member.

10. The MEMS device according to claim 1 , wherein the impact alleviation mechanism comprises another elongate protruding member on the stopper and facing the elongate protruding member.

11. The MEMS device according to claim 1 , wherein the elongate protruding member has an asymmetrical shape with one side extending from an apex of the elongate protruding member being longer than the other side extending from the apex of the elongate protruding member.

12. A MEMS device comprising:
a movable member having a stopper with at least one side edge of the stopper fixed to a side of the movable member such that the stopper extends in a direction parallel to the side of the movable member to define a space therebetween; and
a fixed member coupled to the movable member by at least one resilient body, the fixed member including an elongate protruding member disposed on a side of the fixed member facing the side of the movable member, such that the elongate protruding member protrudes towards the stopper,
wherein the stopper includes a pair of side edges and is fixed to the movable member to define the space between the stopper and the movable member.

13. The MEMS device according to claim 12 , wherein the elongate protruding member and the stopper are configured such that as a collision force increases between the movable member and the fixed member when the movable member vibrates, an outer edge position of an abutment area of the elongate protruding member approaches the fixed side edge of the stopper.

14. The MEMS device according to claim 12 , wherein only one side edge of the stopper is fixed to the movable member and the other side edge of the stopper is not fixed and extends between the movable member and the fixed member.

15. The MEMS device according to claim 12 , wherein the elongate protruding member has an asymmetrical shape with one side extending from an apex of the elongate protruding member being longer than the other side extending from the apex of the elongate protruding member.

16. A MEMS device comprising:
a fixed member having a stopper with at least one side edge of the stopper fixed to a side of the fixed member such that the stopper extends in a direction parallel to the side of the fixed member to define a space therebetween; and
a movable member coupled to the fixed member by at least one resilient body, the movable member including an elongate protruding member disposed on a side of the movable member facing the side of the fixed member, such that the elongate protruding member protrudes towards the stopper,
wherein the stopper includes a pair of side edges and is fixed to the fixed member to define the space between the stopper and the fixed member.

17. The MEMS device according to claim 16 , wherein the elongate protruding member and the stopper are configured such that as a collision force increases between the movable member and the fixed member when the movable member vibrates, an outer edge position of an abutment area of the elongate protruding member approaches the fixed side edge of the stopper.

18. The MEMS device according to claim 16 , wherein the elongate protruding member has an asymmetrical shape with one side extending from an apex of the elongate protruding member being longer than the other side extending from the apex of the elongate protruding member.

Assignees

• Murata Manufacturing Co

Inventors

• Matsuoka Junya
• Tsuji Nobuaki
• Ueya Yuki
• Okami Tsuyoshi
• Mizota Takashi

Classifications

• H01L29/84

  Electricity · mapped topic

• B81B3/0013 Primary

  Structures dimensioned for mechanical prevention of stiction, e.g. spring with increased stiffness · CPC title

• B81B3/00

  Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (B81B5/00 takes precedence) · CPC title

• B81B2201/0235

  Accelerometers · CPC title

• B81B2201/0242

  Gyroscopes · CPC title