Atomic layer etching using a boron-containing gas and hydrogen fluoride gas

Patent metadata

Field	Value
Publication number	US-10283369-B2
Application number	US-201715671404-A
Country	US
Kind code	B2
Filing date	Aug 8, 2017
Priority date	Aug 10, 2016
Publication date	May 7, 2019
Grant date	May 7, 2019

Abstract

Embodiments of the invention provide a method for atomic layer etching (ALE) of a substrate. According to one embodiment, the method includes providing a substrate, and exposing the substrate to hydrogen fluoride (HF) gas and a boron-containing gas to etch the substrate. According to another embodiment, the method includes providing a substrate containing a metal oxide film, exposing the substrate to HF gas to form a fluorinated surface layer on the metal oxide film, and exposing the substrate to a boron-containing gas to remove the fluorinated surface layer from the metal oxide film. The exposures may be repeated at least once to further etch the metal oxide film.

First claim

What is claimed is:

1. A method of atomic layer etching (ALE), the method comprising:
providing a substrate containing a metal oxide film having a first fluorinated surface layer;
exposing the substrate to a first boron-containing gas to remove the first fluorinated surface layer from the metal oxide film;
exposing the substrate to hydrogen fluoride (HF) gas to form a second fluorinated surface layer on the metal oxide film; and
exposing the substrate to a second boron-containing gas to remove the second fluorinated surface layer from the metal oxide film.

2. The method of claim 1 , wherein the exposures to the HF gas and the second boron-containing gas are repeated at least once to further etch the metal oxide film.

3. The method of claim 1 , wherein the metal oxide film is selected from the group consisting of Al 2 O 3 , HfO 2 , TiO 2 , ZrO 2 , Y 2 O 3 , La 2 O 3 , UO 2 , Lu 2 O 3 , Ta 2 O 5 , Nb 2 O 5 , ZnO, MgO, CaO, BeO, V 2 O 5 , FeO, FeO 2 , CrO, Cr 2 O 3 , CrO 2 , MnO, Mn 2 O 3 , RuO, CoO, WO 3 , and combinations thereof.

4. The method of claim 1 , wherein the metal oxide film is formed by oxidizing a metal layer.

5. The method of claim 1 , further comprising gas purging with an inert gas between the exposing steps.

6. The method of claim 1 , wherein the first fluorinated surface layer is formed using wet processing with aqueous HF.

7. The method of claim 1 , wherein the first and second boron-containing gases contain a boron hydride, a boron halide, a boron amide, an organo boride, or a combination thereof.

8. The method of claim 7 , wherein the first and second boron-containing gases are selected from the group consisting of BH 3 , BCl 3 , B(CH 3 ) 3 , and B(N(CH 3 ) 2 ) 3 .

9. The method of claim 1 , wherein the first fluorinated surface layer is formed by dry processing.

10. The method of claim 9 , wherein the dry processing includes HF gas or an organic fluorine-containing etching gas.

11. The method of claim 1 , wherein the first and second boron-containing gases contain a boron hydride, a boron amide, an organo boride, or a combination thereof.

12. The method of claim 11 , wherein the first and second boron-containing gases are selected from the group consisting of BH 3 , B(CH 3 ) 3 , and B(N(CH 3 ) 2 ) 3 .

Assignees

• Tokyo Electron Ltd

Inventors

• Clark Robert D
• Tapily Kandabara N

Classifications

• H10P50/287

  by chemical means · CPC title

• H10P50/285

  of materials not containing Si, e.g. PZT or Al2O3 · CPC title

• H10P50/283 Primary

  by chemical means · CPC title

• C01B35/06

  Boron halogen compounds · CPC title

• C01B35/02

  Boron; Borides · CPC title