Electrostatic chuck and semiconductor manufacturing apparatus

Patent metadata

Field	Value
Publication number	US-10276420-B2
Application number	US-201715449255-A
Country	US
Kind code	B2
Filing date	Mar 3, 2017
Priority date	Sep 15, 2016
Publication date	Apr 30, 2019
Grant date	Apr 30, 2019

Abstract

An electrostatic chuck includes a first electrode provided in a first plane, a second electrode provided in a second plane parallel to the first plane, and an insulator. The second electrode includes a plurality of portions which intersect with an intersection line between a region in which the first electrode is orthogonally projected to the second plane and a third plane vertical to the second plane. The insulator is provided between the first and second electrodes.

First claim

What is claimed is:

1. An electrostatic chuck comprising:
a first electrode that is provided in a first plane;
a second electrode that is provided in a second plane parallel to the first plane and includes a plurality of portions which intersect with an intersection line between a region in which the first electrode is orthogonally projected to the second plane and a third plane vertical to the second plane; and
an insulator that is provided between the first and second electrodes.

2. The electrostatic chuck according to claim 1 ,
wherein a distance between the portions on the intersection line is equal to or greater than 1 mm and equal to or less than 3 mm,
lengths of the portions on the intersection line are equal to or greater than 0.5 mm and equal to or less than 1 mm, and
a distance between the first electrode and the second electrode is equal to or greater than 25 μm and equal to or less than 70 μm.

3. The electrostatic chuck according to claim 1 ,
wherein polarity of a voltage applied to the first electrode is different from polarity of a voltage applied to the second electrode.

4. The electrostatic chuck according to claim 1 , further comprising:
a plate,
wherein the second electrode is provided between the plate and the insulator.

5. The electrostatic chuck according to claim 1 ,
wherein an end of the second electrode in the region has a vertex.

6. The electrostatic chuck according to claim 1 ,
wherein the second electrode in the region has a hole.

7. A semiconductor manufacturing apparatus comprising:
a chamber; and
the electrostatic chuck according to claim 1 disposed in the chamber.

8. An electrostatic chuck comprising:
a first electrode that is provided in a first plane;
a second electrode that is provided in a second plane spaced from the first plane and includes a plurality of portions;
a substrate; and
a power supply connected to the first and second electrodes,
wherein voltages applied to the first and second electrodes are configured to generate dielectric polarization in the substrate such that adsorption force is generated by gradient force from the dielectric polarization and gradient with an intensity of an electric field generated between the second electrode and the first electrode.

9. The electrostatic chuck according to claim 8 , wherein in applying the voltages to the first and second electrodes, a voltage with negative polarity is applied to the first electrode and a voltage with positive polarity is applied to the second electrode.

10. The electrostatic chuck according to claim 8 , wherein in generating the dielectric polarization, electric force lines is generated from the second electrode, and the generated electric force lines enters the substrate, subsequently returns to the electrostatic chuck, passes between the second electrodes, and reaches the first electrode.

Assignees

• Toshiba Kk

Inventors

• Ito Shinya
• Sanda Hiroshi
• Nagumo Eiichi
• Saito Makoto

Classifications

• H10P72/722 Primary

  Details of electrostatic chucks · CPC title

• H01L21/6833 Primary

  Electricity · mapped topic