Method for acquiring image and ion beam apparatus

Patent metadata

Field	Value
Publication number	US-10276343-B2
Application number	US-201815982175-A
Country	US
Kind code	B2
Filing date	May 17, 2018
Priority date	Sep 30, 2015
Publication date	Apr 30, 2019
Grant date	Apr 30, 2019

Abstract

A method of acquiring an image of an image acquiring region of a sample comprises a first step of irradiating and scanning an ion beam in a first scan pattern on a first scan region of a sample, the scan region including therein the image acquiring region, and a second step of detecting secondary charged particles generated by irradiating and scanning the ion beam on the first scan region of the sample and generating first image data of the image acquiring region. The first and second steps are repeated a plurality of times using different scan patterns on different scan regions that differ from the first scan and the first scan region and from one another, each of the different scan regions including therein the image acquiring region, to generate a plurality of image data of the image acquiring region. Image data of the image acquiring region are generated by synthesizing all the image data generated by scanning the different scan region, and the synthesized image data of the image acquiring region are displayed on a display unit.

First claim

What is claimed is:

1. A method of acquiring an image of an image acquiring region of a sample, comprising:
a first step of irradiating and scanning an ion beam in a first scan pattern on a first scan region of a sample, the scan region including therein the image acquiring region;
a second step of detecting secondary charged particles generated by irradiating and scanning the ion beam on the first scan region of the sample and generating first image data of the image acquiring region;
repeating the first and second steps a plurality of times using different scan patterns on different scan regions that differ from the first scan and the first scan region and from one another, each of the different scan regions including therein the image acquiring region, and generating a plurality of image data of the image acquiring region;
generating image data of the image acquiring region by synthesizing all the image data generated by scanning the different scan regions; and
displaying the synthesized image data of the image acquiring region,
wherein the scan patterns differ from one another by having different scan directions of the ion beam.

2. The method according to claim 1 ; wherein each of the different scan regions has a parallelogram shape.

3. The method according to claim 1 ; wherein the scan patterns differ from one another by having different sweep directions of the ion beam.

4. The method according to claim 2 ; wherein the scan patterns differ from one another by having different sweep directions of the ion beam.

5. The method according to claim 2 ; further comprising, before synthesizing the same data,
detecting an amount of position offset between the image data in the first scan region and the image data in the last scan region; and
correcting the amount of position offset of the image data in the plurality of the scan regions on the basis of the detected amount of position offset.

6. The method according to claim 1 ; further comprising, before synthesizing the same data,
detecting an amount of position offset between the image data in the first scan region and the image data in the last scan region; and
correcting the amount of position offset of the image data in the plurality of the scan regions on the basis of the detected amount of position offset.

Assignees

• Hitachi High Tech Science Corp

Inventors

• Kozakai Tomokazu
• Aramaki Fumio
• Matsuda Osamu
• Shiina Kensuke
• Aita Kazuo
• Yasaka Anto

Classifications

• H01J2237/226

  Image reconstruction · CPC title

• H01J2237/2067

  Surface alteration · CPC title

• H01J2237/20

  Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated · CPC title

• H01J37/1474

  Scanning means · CPC title

• H01J2237/2817

  Pattern inspection · CPC title