MEMS devices having tethering structures
US-10131541-B2 · Nov 20, 2018 · US
US10268115B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10268115-B2 |
| Application number | US-201514967091-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 11, 2015 |
| Priority date | Dec 19, 2014 |
| Publication date | Apr 23, 2019 |
| Grant date | Apr 23, 2019 |
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A process for manufacturing a timepiece component, in particular a multi-level timepiece component, comprising a step of manufacturing at least one metal layer ( 13 ) of the timepiece component having an upper surface ( 15 ), wherein it comprises the following steps: E 3 : forming at least one cavity ( 14 ) in the upper surface ( 15 ) of the metal layer ( 13 ) of the timepiece component; E 5 : forming another metal layer ( 23 ) at least partially superposed on said upper surface ( 15 ) comprising a cavity ( 14 ), by a galvanic deposition of a metal or of an alloy, filling at least said cavity ( 14 ).
Opening claim text (preview).
The invention claimed is: 1. A timepiece component, comprising two adjacent levels formed by first and second separate metal layers that are at least partially superposed, the second metal layer at least partially covering an upper surface of the first metal layer, wherein the first metal layer has at least one blind cavity and wherein the second metal layer occupies a volume of said blind cavity of the first metal layer, so that the first and second metal layers are interlocked and fastened to one another at an interface thereof. 2. The timepiece component as claimed in claim 1 , which is selected from the group consisting of a jumper, a pallet, a wheel, a cam, and a rack. 3. A timepiece movement or timepiece part, comprising the timepiece component as claimed in claim 1 . 4. The timepiece component as claimed in claim 1 , wherein the second metal layer is beyond the upper surface of the first metal layer and above the cavity, the second metal layer having a height greater than or equal to 10 μm. 5. The timepiece component as claimed in claim 1 , wherein the at least one cavity comprises at least one blind hole, the blind hole having a depth of less than or equal to 90% of a height of the metal layer. 6. A timepiece component, comprising two adjacent levels formed by first and second separate metal layers that are at least partially superposed, the second metal layer at least partially covering the upper surface of the first metal layer, wherein the first metal layer has at least one cavity having a side wall that is not perpendicular to an upper surface of the first metal layer in an area around the cavity, and wherein the second metal layer occupies a volume of said cavity of the first metal layer, so that the first and second metal layers are interlocked and fastened to one another at an interface thereof, wherein the interface includes a portion located at the side wall that is not perpendicular to the upper surface of the first metal layer in the area around the cavity. 7. The timepiece component as claimed in claim 6 , wherein at least one selected from the group consisting of (i) a cross section of the cavity of the first metal layer increases on moving away from the upper surface of the first metal layer, and (ii) a cross section of the cavity of the first metal layer has a dovetail shape in a plane perpendicular to the upper surface of the component. 8. The timepiece component as claimed in claim 6 , which is selected from the group consisting of a jumper, a pallet, a wheel, a cam, and a rack. 9. A timepiece movement or timepiece part, comprising the timepiece component as claimed in claim 6 . 10. The timepiece component as claimed in claim 6 , wherein the second metal layer is beyond the upper surface of the first metal layer and above the cavity, the second metal layer having a height greater than or equal to 10 μm. 11. The timepiece component as claimed in claim 6 , wherein the at least one cavity comprises forming at least one blind hole, the blind hole having a depth of less than or equal to 90% of a height of the metal layer. 12. A process for manufacturing a timepiece component, comprising: manufacturing at least one first metal layer of the timepiece component having an upper surface; forming at least one cavity in the upper surface of the first metal layer of the timepiece component, by machining of said upper surface of the first metal layer; forming a second metal layer at least partially superposed on said upper surface comprising the cavity, by a galvanic deposition of a metal or of an alloy, filling said at least one cavity, so as to obtain the timepiece component according to claim 1 . 13. The process for manufacturing a timepiece component as claimed in claim 12 , wherein the forming of the second metal layer of the timepiece component comprises: depositing a photoresist on the upper surface comprising the at least one cavity; exposing the photoresist through a mask and developing the resist in order to form a mold, freeing up at least one cavity of the upper surface; depositing a metal or an alloy galvanically in the at least one cavity and filling at least one portion of the height of the mold. 14. The process for manufacturing a timepiece component as claimed in claim 12 , wherein the forming of the at least one cavity comprises producing at least one side wall not perpendicular to the upper surface of the first metal layer, so that said cavity comprises a flat cross section greater, at at least one depth below a level of the upper surface, than a cross section of an opening of the cavity level with the upper surface. 15. The process for manufacturing a timepiece component as claimed in claim 12 , comprising: depositing a photoresist on a flat surface of a substrate; exposing the photoresist through a mask and developing the photoresist in order to form a first mold; depositing a metal or an alloy galvanically in the mold in order to form a first metal layer having a surface; optionally superposing one or more other metal layers on the surface of the first metal layer in order to obtain a structure having one or more metal layers including the first metal layer having the upper surface; separating the structure from the substrate; then, forming at least one cavity in the upper surface forming a substantially flat surface of the first metal layer; then producing the at least one second metal layer of the timepiece component, filling said at least one cavity and being superposed on said at least one cavity. 16. The process as claimed in claim 12 , comprising machining the surface of the second metal layer formed by galvanic deposition, in order to increase a flatness of the second metal layer, wherein the second metal layer comprises at least one cavity. 17. A process for manufacturing a timepiece component, comprising: manufacturing at least one metal layer of the timepiece component including a first metal layer having an upper surface; forming at least one cavity in the upper surface of the first metal layer of the timepiece component, by machining of said upper surface of the first metal layer; forming a second metal layer at least partially superposed on said upper surface comprising the cavity, by a galvanic deposition of a metal or of an alloy, filling said at least one cavity, so as to obtain the timepiece component according to claim 6 . 18. The process for manufacturing a timepiece component as claimed in claim 17 , wherein the forming of the second metal layer of the timepiece component comprises: depositing a photoresist on the upper surface comprising the at least one cavity; exposing the photoresist through a mask and developing the resist in order to form a mold, freeing up at least one cavity of the upper surface; depositing a metal or an alloy galvanically in the at least one cavity and filling at least one portion of the height of the mold. 19. The process for manufacturing a timepiece component as claimed in claim 17 , comprising: depositing a photoresist on a flat surface of a substrate; exposing the photoresist through a mask and developing the photoresist in order to form a first mold; depositing a metal or an alloy galvanically in the mold in order to form a metal layer having a surface; optionally superposing one or more other metal layers on the surface of the metal layer in order to obtain a structure having one or more metal layers including the first metal layer having the upper surface; separating the structure from the substrate; then, forming at least
all layers being exclusively metallic {(making layered metal workpieces by pressure cladding B23K20/22; making coatings with a metallic material characterised by its composition C23C30/00)} · CPC title
separating the processed structure from a mother substrate · CPC title
characterised by a layer formed with recesses or projections, e.g. {hollows, grooves, protuberances, ribs (apertured layer B32B3/266; layer with cavities or internal voids B32B3/26)} · CPC title
Component parts or constructional details, e.g. construction of the lever or the escape wheel {(assembly and manufacture of the spring G04B1/145; assembly and manufacture of components, e.g. pinions, spindles G04B13/02; lubrication of clockwork bearings G04B31/008; oils for clockwork bearings in general G04B31/08)} · CPC title
Anchors · CPC title
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