MEMS devices having tethering structures
US-10131541-B2 · Nov 20, 2018 · US
US10088748B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10088748-B2 |
| Application number | US-201514967079-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 11, 2015 |
| Priority date | Dec 19, 2014 |
| Publication date | Oct 2, 2018 |
| Grant date | Oct 2, 2018 |
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A process for manufacturing a multilayer timepiece component, wherein it comprises the following steps: E 1 , E 2 : manufacturing at least one first metal layer ( 13 ) of the timepiece component on the upper surface of a substrate ( 10 ); E 13 : separating the substrate ( 10 ) from the structure obtained by the preceding step, in order to obtain a sheet; then E 4 , E 5 ; E 14 , E 15 : producing at least one other metal layer ( 23; 33 ) of the timepiece component and/or carrying out an operation for machining a metal layer after separation of the substrate ( 10 ) on the upper and/or lower surface of the sheet.
Opening claim text (preview).
The invention claimed is: 1. A process for manufacturing a multilayer timepiece component, comprising: manufacturing at least one first metal layer of the timepiece component on an upper surface of a substrate in order to obtain a structure; separating the substrate from the structure, in order to obtain a sheet; then on at least one of an upper surface and a lower surface of the sheet, performing at least one action selected from the group consisting of (i) depositing at least one other metal layer of the timepiece component and (ii) carrying out an operation for machining a metal layer of the timepiece component after separation of the substrate. 2. The process for manufacturing a timepiece component as claimed in claim 1 , wherein the producing of the at least one other metal layer of the timepiece component after separation of the substrate comprises performing at least once the following actions: depositing a photoresist on the upper surface of the sheet; exposing the photoresist through a mask and developing the photoresist in order to form a mold; and depositing a metal galvanically in the mold. 3. The process for manufacturing a timepiece component as claimed in claim 2 , wherein the producing of the at least one other metal layer of the timepiece component after separation of the substrate further comprises performing a least once the following actions: depositing a photoresist on the lower surface of the sheet; exposing the photoresist through a mask and developing the resist in order to form a mold; and depositing a metal galvanically in the mold. 4. The process for manufacturing a timepiece component as claimed in claim 3 , comprising, after performing the depositing a photoresist, exposing the photoresist, and depositing a metal, performing at least once more the depositing a photoresist, exposing the photoresist, and depositing a metal, to add one or more other metal layers on top of the first metal layer. 5. The process for manufacturing a timepiece component as claimed in claim 3 , wherein the metal is an alloy. 6. The process for manufacturing a timepiece component as claimed in claim 2 , comprising, after performing the depositing a photoresist, exposing the photoresist, and depositing a metal, performing at least once more the depositing a photoresist, exposing the photoresist, and depositing a metal, to add one or more other metal layers on top of the first metal layer. 7. The process for manufacturing a timepiece component as claimed in claim 2 , wherein the metal is an alloy. 8. The process as claimed in claim 1 , comprising performing at least one of the following additional actions, after separation of the substrate: machining a surface of a the metal layer, in order to increase a flatness of the metal layer; depositing a conductive layer on the metal layer formed by galvanic deposition; dissolving photoresist forming one or more mold(s) for manufacturing one or more metal layer(s). 9. The process for manufacturing a timepiece component as claimed in claim 1 , comprising: in a first phase, performing at least once the following actions: depositing a photoresist on the upper surface of the substrate; exposing the photoresist through a mask and developing the photoresist in order to form a mold; and depositing a metal galvanically in the mold in order to form the first metal layer; then in a second phase after the first phase, performing the following action: separating the substrate from the structure obtained in order to obtain a sheet comprising one or more layer(s) each comprising juxtaposed photoresist and metal regions. 10. The process for manufacturing a timepiece component as claimed in claim 9 , comprising, in the first phase, after performing the depositing a photoresist, exposing the photoresist, and depositing a metal, performing at least once more the depositing a photoresist, exposing the photoresist, and depositing a metal, to add one or more other metal layers on top of the first metal layer. 11. The process for manufacturing a timepiece component as claimed in claim 9 , wherein the metal is an alloy. 12. The process for manufacturing a timepiece component as claimed in claim 1 , comprising performing the following actions, after separation of the substrate: forming at least one cavity in a surface of a metal layer; depositing a photoresist on the surface comprising the cavity of the metal layer; exposing the photoresist through a mask and developing the photoresist in order to form a mold, freeing up the at least one cavity of the surface of the metal layer; and depositing a metal galvanically in the at least one cavity and in the mold. 13. The process for manufacturing a timepiece component as claimed in claim 12 , wherein the metal is an alloy. 14. The process for manufacturing a timepiece component as claimed in claim 1 , which is one element selected from the group consisting of a jumper, a pallet, a wheel, a cam, and a rack. 15. The process for manufacturing a timepiece component as claimed in claim 14 , wherein the metal is an alloy. 16. The process for manufacturing a timepiece component as claimed in claim 1 , wherein the producing of the at least one other metal layer of the timepiece component after separation of the substrate comprises performing at least once the following actions: depositing a photoresist on the lower surface of the sheet; exposing the photoresist through a mask and developing the resist in order to form a mold; and depositing a metal galvanically in the mold. 17. The process for manufacturing a timepiece component as claimed in claim 16 , comprising, after performing the depositing a photoresist, exposing the photoresist, and depositing a metal, performing at least once more the depositing a photoresist, exposing the photoresist, and depositing a metal, to add one or more other metal layers on top of the first metal layer. 18. The process for manufacturing a timepiece component as claimed in claim 16 , wherein the metal is an alloy. 19. The process for manufacturing a timepiece component as claimed in claim 1 , wherein the metal is an alloy.
Component parts or constructional details, e.g. construction of the lever or the escape wheel {(assembly and manufacture of the spring G04B1/145; assembly and manufacture of components, e.g. pinions, spindles G04B13/02; lubrication of clockwork bearings G04B31/008; oils for clockwork bearings in general G04B31/08)} · CPC title
Wheels; Pinions; Spindles; Pivots (bearings G04B31/00 {; chain wheels, spindles for chain wheels, also chains and driving weights G04B1/08}) · CPC title
separating the processed structure from a mother substrate · CPC title
Multiple processes, e.g. applying a further resist layer on an already in a previously step, processed pattern or textured surface · CPC title
Treatment with inorganic or organometallic reagents after imagewise removal · CPC title
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