Inertial sensor

Patent metadata

Field	Value
Publication number	US-10254305-B2
Application number	US-201715724385-A
Country	US
Kind code	B2
Filing date	Oct 4, 2017
Priority date	Sep 20, 2013
Publication date	Apr 9, 2019
Grant date	Apr 9, 2019

Abstract

An inertial sensor includes a base portion, a weight portion, a connection portion, and a first sensing element unit. The connection portion connects the weight portion and the base portion and is capable of being deformed in accordance with a change in relative position of the weight portion with respect to the position of the base portion. The first sensing element unit is provided on a first portion of the connection portion and includes a first magnetic layer, a second magnetic layer, and a nonmagnetic first intermediate layer. The nonmagnetic first intermediate layer is provided between the first magnetic layer and the second magnetic layer.

First claim

What is claimed is:

1. A sensor comprising:
a first member;
a second member connected with the first member, the second member being deformable;
a third member connected with the second member, the second member being provided between the first member and the third member;
a first sensing element unit provided at a first portion of the second member, the first sensing element unit being provided between the first member and the third member in a first direction along an outer edge of the second member, the first sensing element including a first magnetic layer, a second magnetic layer, and a first intermediate layer, the first intermediate layer being provided between the first magnetic layer and the second magnetic layer and being nonmagnetic; and
a second sensing element unit provided at a second portion of the second member, the second sensing element unit being provided between the first member and the third member in the first direction, the second sensing element including a third magnetic layer, a fourth magnetic layer, and a second intermediate layer, the second intermediate layer being provided between the third magnetic layer and the fourth magnetic layer and being nonmagnetic,
wherein a length of the second member in the first direction is shorter than a length of the third member in the first direction,
wherein the direction from a part of the first member connected with the second member toward a part of the second member connected with the third member is along the first direction.

2. The sensor according to claim 1 , wherein a second direction from the first sensing element unit toward the second sensing element unit crosses the first direction.

3. The sensor according to claim 1 , wherein the first sensing element unit and the second sensing element unit are electrically connected in series.

4. The sensor according to claim 1 , further comprising:
a third sensing element unit provided at a third portion of the second member and including a fifth magnetic layer, a sixth magnetic layer, and a third intermediate layer, the third intermediate layer being provided between the fifth magnetic layer and the sixth magnetic layer and being nonmagnetic, and
a direction from the first sensing element unit toward the third sensing element unit is along the first direction.

5. The sensor according to claim 1 , wherein
the second member is configured to be deformed in accordance with a change in a relative position of the third member with respect to a position of the first member.

6. The sensor according to claim 1 , wherein at least a part of the first magnetic layer includes iron and has an amorphous structure.

7. The sensor according to claim 6 , wherein the at least the part of the first magnetic layer includes boron.

8. The sensor according to claim 1 , wherein the second member includes a first side extending along the first direction.

9. The sensor according to claim 8 , wherein
the second member further includes a second side extending along the first direction.

10. The sensor according to claim 1 , wherein a length of the second member in a second direction crossing the first direction is shorter than a length of the third member in the second direction.

Assignees

• Toshiba Kk

Inventors

• Fukuzawa Hideaki
• Hara Michiko
• Fuji Yoshihiko
• Higashi Yoshihiro
• Kaji Shiori
• Hori Akio
• Nagata Tomohiko
• Yuzawa Akiko
• Kikitsu Akira

Classifications

• G01P2015/0805

  being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration · CPC title

• G01P15/0802

  Details · CPC title

• G01P15/105 Primary

  by magnetically sensitive devices · CPC title