Cassette holder assembly for a substrate cassette and holding member for use in such assembly

Patent metadata

Field	Value
Publication number	US-10249524-B2
Application number	US-201715673110-A
Country	US
Kind code	B2
Filing date	Aug 9, 2017
Priority date	Aug 9, 2017
Publication date	Apr 2, 2019
Grant date	Apr 2, 2019

Abstract

The invention relates to a cassette holder assembly for holding a cassette for storing at least one semiconductor material substrate in an interior space accessible from a front end of the cassette. The cassette holder assembly may have a base plate for receiving the cassette. Two holding members supported by the base plate may be positioning the cassette on the plate in the assembly. The holding members may be substantially identical to each other.

First claim

What is claimed is:

1. A cassette holder assembly for holding a cassette for storing at least one semiconductor material substrate in an interior space accessible from a front end of the cassette, the cassette holder assembly comprising:
a base plate for receiving the cassette; and,
a right and a left holding member supported by the base plate to position the cassette on the right and left respectively seen from the front,
wherein the right and left holding members are substantially identical to each other,
wherein each of the holding members has at least two end surface to engage with the cassette to limit a position of the cassette in the front to the back direction substantially parallel to the base plate, the at least two end surfaces comprising at least one right end surface and at least one left end surface whereby the right end surface is located at the right of the holding member and the left end surface is located at the left of the holding member seen from the front, and
wherein the right end surface of the right holding member and the left end surface of the left holding member are arranged for engagement with the cassette.

2. The cassette holder assembly according to claim 1 , wherein each of the holding members are mirror symmetrical with respect to a line through the center of the holding member from a back to the front.

3. The cassette holder assembly according to claim 1 , wherein the right end surface of the left holding member and the left end surface of the right holding member are not arranged for engagement with the cassette.

4. The cassette holder assembly according to claim 1 , wherein each of the holding members has a side surface to engage with the cassette and limit the position of the cassette in a right to left direction substantially parallel to the base plate and substantially perpendicular to the front to back direction.

5. The cassette holder assembly according to claim 4 , wherein each of the holding members comprises at least two side surfaces, comprising a right side surface and a left side surface wherein the right side surface is located at the right of the holding member and the left side surface is located at the left of the holding member seen from the front.

6. The cassette holder assembly according to claim 1 , wherein both of the holding members have a side surface to engage with the cassette and limit the position of the cassette in right to left opposite directions.

7. A cassette holder assembly for holding a cassette for storing at least one semiconductor material substrate in an interior space accessible from a front end of the cassette, the cassette holder assembly comprising:
a base plate for receiving the cassette; and,
a right and a left holding member supported by the base plate to position the cassette on the right and left respectively seen from the front wherein the right and left holding members are substantially identical to each other,
wherein each of the holding members has at least two end surface to engage with the cassette to limit a position of the cassette in the front to the back direction substantially parallel to the base plate, the at least two end surfaces comprising at least one right surface and at least one left end surface whereby the right end surface is located at the right of the holding member and the left end surface is located at the left of the holding member seen from the front, and
wherein each of the holding members has at least four end surfaces to engage with the cassette to limit a position of the cassette in a front to back direction substantially parallel to the base plate, a small cassette end surface and a large cassette end surface at each of the right and the left side of the cassette, whereby the small cassette end surface is located towards the front of the base plate with respect to the large cassette end surface to engage with cassettes with a relatively smaller size.

8. A cassette holder assembly for holding a cassette for storing at least one semiconductor material substrate in an interior space accessible from a front end of the cassette, the cassette holder assembly comprising:
a base plate for receiving the cassette; and,
a right and a left holding member supported by the base plate to position the cassette on the right and left respectively seen from the front,
wherein the right and left holding members are substantially identical to each other,
wherein each of the holding members has a side surface to engage with the cassette and limit the position of the cassette in a right to left direction substantially parallel to the base plate and substantially perpendicular to the front to back direction,
wherein each of the holding members comprises at least two side surfaces, comprising a right side surface and a left side surface wherein the right side surface is located at the right of the holding member and the left side surface is located at the left of the holding member seen from the front, and
wherein the right side surface of the right holding member and the left side surface of the left holding member are arranged for engagement with the cassette.

9. The cassette holder assembly according to claim 8 , wherein the right side surface of the left holding member and the left side surface of the right holding member are not arranged for engagement with the cassette.

10. A cassette holder assembly for holding a cassette for storing at least one semiconductor material substrate in an interior space accessible from a front end of the cassette, the cassette holder assembly comprising:
a base plate for receiving the cassette; and,
a right and a left holding member supported by the base plate to position the cassette on the right and left respectively seen from the front,
wherein the right and left holding members are substantially identical to each other,
wherein each of the holding members has a side surface to engage with the cassette and limit the position of the cassette in a right to left direction substantially parallel to the base plate and substantially perpendicular to the front to back direction, and
wherein each of the holding members comprise at least two side surfaces comprising a small cassette side surface and a large cassette side surface whereby the small cassette side surface is located towards the front of the base plate with respect to the large cassette side surface to engage with cassettes with a relatively smaller size.

11. A cassette holder assembly for holding a cassette for storing at least one semiconductor material substrate in an interior space accessible from a front end of the cassette, the cassette holder assembly comprising:
a base plate for receiving the cassette; and,
a right and a left holding member supported by the base plate to position the cassette on the right and left respectively seen from the front,
wherein the right and left holding members are substantially identical to each other, and
wherein at least one of the holding members is detachably secured to the base plate by means of a fastener through a slotted hole and wherein the slot has a direction perpendicular to a line from the front to the back.

12. A cassette holder assembly for holding a cassette for storing at least one semiconductor material substrate in an interior space accessible from a front end of the cassette, the cassette holder assembly comprising:
a base plate for receiving the cassette; and,
a right and a left holding member supported by the base plate to position the cassette on the right and left respectively seen from the front,
wherein the right and left holding members are substantially identical to each other, and
wherein the holding member i

Assignees

• Asm Ip Holding Bv

Inventors

• Den Hartog Besselink Edwin
• Garssen Adriaan
• Dirkmaat Marco

Classifications

• H10P72/1918

  characterised by coupling elements, kinematic members, handles or elements to be externally gripped · CPC title

• H10P72/3408 Primary

  Docking arrangements · CPC title

• H10P72/3404

  Storage means · CPC title

• H10W78/00

  Detachable holders for supporting packaged chips in operation · CPC title

• H10P72/1902 Primary

  specially adapted for a single substrate · CPC title