Near-substrate supplemental plasma density generation with low bias voltage within inductively coupled plasma processing chamber

Patent metadata

Field	Value
Publication number	US-10242845-B2
Application number	US-201715408326-A
Country	US
Kind code	B2
Filing date	Jan 17, 2017
Priority date	Jan 17, 2017
Publication date	Mar 26, 2019
Grant date	Mar 26, 2019

Abstract

A substrate is positioned on a substrate support structure within a plasma processing volume of an inductively coupled plasma processing chamber. A first radiofrequency signal is supplied from a first radiofrequency signal generator to a coil disposed outside of the plasma processing volume to generate a plasma in exposure to the substrate. A second radiofrequency signal is supplied from a second radiofrequency signal generator to an electrode within the substrate support structure. The first and second radiofrequency signal generators are controlled independent of each other. The second radiofrequency signal has a frequency greater than or equal to about 27 megaHertz. The second radiofrequency signal generates supplemental plasma density at a level of the substrate within the plasma processing volume while generating a bias voltage of less than about 200 volts at the level of the substrate.

First claim

What is claimed is:

1. A method for operating an inductively coupled plasma processing chamber, comprising:
having a substrate on a substrate support structure within a plasma processing volume of the inductively coupled plasma processing chamber;
supplying a first radiofrequency signal from a first radiofrequency signal generator to a coil disposed outside of the plasma processing volume of the inductively coupled plasma processing chamber, the first radiofrequency signal generating a plasma in exposure to the substrate; and
supplying a second radiofrequency signal from a second radiofrequency signal generator to an electrode within the substrate support structure simultaneously with supplying of the first radiofrequency signal from the first radiofrequency signal generator to the coil, the first and second radiofrequency signal generators controlled independent of each other, the second radiofrequency signal having a frequency greater than or equal to about 27 megaHertz, the second radiofrequency signal generating supplemental plasma density at a level of the substrate within the plasma processing volume without substantially changing a bias voltage at the level of the substrate.

2. The method as recited in claim 1 , wherein the first radiofrequency signal is supplied at a frequency within a range extending from about 10 megaHertz to about 15 megaHertz, and wherein the first radiofrequency signal is supplied at a power within a range extending from about 1 kiloWatt to about 4 kiloWatts.

3. The method as recited in claim 1 , wherein the second radiofrequency signal is supplied at a frequency within a range extending from about 27 megaHertz to about 140 megaHertz, and wherein the second radiofrequency signal is supplied at a power within a range extending from about 5 Watts to about 1 kiloWatt.

4. The method as recited in claim 1 , wherein the second radiofrequency signal is supplied at a frequency of about 27 megaHertz, and wherein the second radiofrequency signal is supplied at a power within a range extending from about 5 Watts to about 1 kiloWatt.

5. The method as recited in claim 1 , wherein the second radiofrequency signal is supplied at a frequency of about 60 megaHertz, and wherein the second radiofrequency signal is supplied at a power within a range extending from about 5 Watts to about 1 kiloWatt.

6. The method as recited in claim 1 , wherein the coil includes multiple independently controllable radial zones, the method further comprising controlling radiofrequency signals supplied to the multiple independently controllable radial zones of the coil to compensate for a perturbation in plasma density profile across the substrate caused by the supplemental plasma density generated at the level of the substrate by the second radiofrequency signal.

7. The method as recited in claim 1 , further comprising:
supplying a third radiofrequency signal from a third radiofrequency signal generator to the electrode within the substrate support structure in accordance with a process recipe performed on the substrate, the first and second and third radiofrequency signal generators controlled independent of each other, the third radiofrequency signal having a frequency within a range extending from about 100 kiloHertz to about 15 megaHertz, the third radiofrequency signal supplied at a power within a range extending from about 5 Watts to about 6 kiloWatts, the third radiofrequency signal generating a bias voltage greater than about 200 volts at the level of the substrate.

8. The method as recited in claim 7 , wherein the first radiofrequency signal is supplied at a frequency within a range extending from about 10 megaHertz to about 15 megaHertz, and wherein the first radiofrequency signal is supplied at a power within a range extending from about 1 kiloWatt to about 4 kiloWatts, and
wherein the second radiofrequency signal is supplied at a frequency within a range extending from about 27 megaHertz to about 140 megaHertz, and wherein the second radiofrequency signal is supplied at a power within a range extending from about 5 Watts to about 1 kiloWatt.

9. The method as recited in claim 8 , wherein the third radiofrequency signal has a frequency of about 13.56 megaHertz.

10. The method as recited in claim 7 , wherein the third radiofrequency signal is supplied from the third radiofrequency signal generator to the electrode within the substrate support structure during directional ion-based processing of the substrate, and wherein the third radiofrequency signal is not supplied from the third radiofrequency signal generator to the electrode within the substrate support structure during isotropic processing of the substrate.

11. The method as recited in claim 7 , further comprising:
supplying a fourth radiofrequency signal from a fourth radiofrequency signal generator to the electrode within the substrate support structure in accordance with the process recipe performed on the substrate, the first and second and third and fourth radiofrequency signal generators controlled independent of each other, the fourth radiofrequency signal having a frequency within a range extending from about 100 kiloHertz to about 1 megaHertz, the fourth radiofrequency signal supplied at a power within a range extending from about 5 Watts to about 6 kiloWatts, the fourth radiofrequency signal controlling a directionality of ions at the level of the substrate.

12. The method as recited in claim 11 , wherein the first radiofrequency signal is supplied at a frequency within a range extending from about 10 megaHertz to about 15 megaHertz, and wherein the first radiofrequency signal is supplied at a power within a range extending from about 1 kiloWatt to about 4 kiloWatts, and
wherein the second radiofrequency signal is supplied at a frequency within a range extending from about 27 megaHertz to about 140 megaHertz, and wherein the second radiofrequency signal is supplied at a power within a range extending from about 5 Watts to about 1 kiloWatt.

13. The method as recited in claim 12 , wherein the third radiofrequency signal has a frequency of about 13.56 megaHertz, and wherein the fourth radiofrequency signal has a frequency of about 1 megaHertz.

14. The method as recited in claim 13 , wherein the second radiofrequency signal has a frequency of about 60 megaHertz.

15. The method as recited in claim 13 , wherein the second radiofrequency signal has a frequency of about 27 megaHertz.

Assignees

• Lam Res Corp

Inventors

• Tan Zhongkui
• Zhang Yiting
• Fu Qian
• Xu Qing
• Wu Ying
• Sriraman Saravanapriyan
• Paterson Alex

Classifications

• H10P50/287

  by chemical means · CPC title

• H10P50/283

  by chemical means · CPC title

• H10P50/267

  using plasmas · CPC title

• H01J37/32715

  Workpiece holder · CPC title

• H01J37/32119

  Windows · CPC title