Micro heater and micro sensor and manufacturing methods thereof
US-10015841-B2 · Jul 3, 2018 · US
Micro heater, micro sensor and micro sensor manufacturing method
US10241094B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10241094-B2 |
| Application number | US-201615344672-A |
| Country | US |
| Kind code | B2 |
| Filing date | Nov 7, 2016 |
| Priority date | Nov 11, 2015 |
| Publication date | Mar 26, 2019 |
| Grant date | Mar 26, 2019 |
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- Title
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- Abstract
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- Assignees and inventors
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- First independent claim
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- CPC / IPC classifications
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- Citations and related patents
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Abstract
Official abstract text for this publication.
A micro heater includes a substrate formed of an anodized film and a heater electrode formed on the substrate and provided with a heat generation wiring line. The heat generation wiring line is formed in a laminated state. Also disclosed are a micro sensor and a micro sensor manufacturing method.
First claim
Opening claim text (preview).
What is claimed is: 1. A micro heater, comprising: a substrate having an upper surface and a lower surface and including a first support portion; a heater electrode formed on the substrate and provided with a heat generation wiring line supported by the first support portion; and a plurality of air gaps formed in the substrate around the heat generation wiring line, wherein the air gaps are formed discontinuously around the periphery of the first support portion among the regions excluding the portion supporting the heater electrode and includes a space formed penetrating from the upper surface to the lower surface of the substrate, wherein the heat generation wiring line includes at least a first heat generation wiring line and a second heat generation wiring line laminated along the up-down direction, wherein a passivation layer is formed between the first heat generation wiring line and the second heat generation wiring line, wherein the substrate is formed of an aluminum oxide porous layer, characterized in that the aluminum oxide porous layer is formed to form pores penetrating from the upper surface to the lower surface of the substrate. 2. The micro heater of claim 1 , wherein the first heat generation wiring line is formed on the substrate, the second heat generation wiring line is laminated above the first heat generation wiring line, and the heat generation wiring line further includes a connection wiring line configured to interconnect the first heat generation wiring line and the second heat generation wiring line. 3. The micro heater of claim 1 , wherein the first heat generation wiring line is formed on the substrate, the second heat generation wiring line is at least partially formed at an upper side of a space where the first heat generation wiring line is not disposed, and the heat generation wiring line further includes a connection wiring line configured to interconnect the first heat generation wiring line and the second heat generation wiring line. 4. A micro sensor, comprising: a substrate having an upper surface and a lower surface and including a first support portion; a sensor electrode formed on the substrate; and a heater electrode formed on the substrate and provided with a heat generation wiring line supported by the first support portion; and a plurality of air gaps formed in the substrate around the heat generation wiring line, wherein the air gaps are formed discontinuously around the periphery of the first support portion among the regions excluding the portion supporting the heater electrode and includes a space formed penetrating from the upper surface to the lower surface of the substrate, wherein the heat generation wiring line is includes at least a first heat generation wiring line and a second heat generation wiring line laminated along the up-down direction, wherein a passivation layer is formed between the first heat generation wiring line and the second heat generation wiring line, wherein the substrate is formed of an aluminum oxide porous layer, characterized in that the aluminum oxide porous layer forms pores penetrating from the upper surface to the lower surface of the substrate. 5. The micro sensor of claim 4 , wherein the first heat generation wiring line is formed on the substrate, the second heat generation wiring line is laminated above the first heat generation wiring line, and the heat generation wiring line further includes a connection wiring line configured to interconnect the first heat generation wiring line and the second heat generation wiring line. 6. The micro sensor of claim 4 , wherein the first heat generation wiring line is formed on the substrate, a second heat generation wiring line is at least partially formed at an upper side of a space where the first heat generation wiring line is not disposed, and the heat generation wiring line further includes a connection wiring line configured to interconnect the first heat generation wiring line and the second heat generation wiring line.
Assignees
Inventors
Classifications
heating conductor mounted on insulating base {(for transparent areas H05B3/84, H05B3/86)} · CPC title
- G01N33/0027Primary
concerning the detector · CPC title
- G01N27/123Primary
for controlling the temperature (temperature control per se G05D23/00) · CPC title
Heater elements structurally combined with coupling elements or holders · CPC title
Microapparatus · CPC title
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Frequently asked questions
Answers are generated from the same data shown on this page.
- What does patent US10241094B2 cover?
- A micro heater includes a substrate formed of an anodized film and a heater electrode formed on the substrate and provided with a heat generation wiring line. The heat generation wiring line is formed in a laminated state. Also disclosed are a micro sensor and a micro sensor manufacturing method.
- Who is the assignee on this patent?
- Point Engineering Co Ltd
- What technology area does this patent fall under?
- Primary CPC classification G01N33/0027. Mapped technology areas include Physics.
- When was this patent published?
- Publication date Tue Mar 26 2019 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 4 related publications on this page (citations in our corpus or others sharing the same primary CPC).