Micro heater and micro sensor and manufacturing methods thereof

Patent metadata

Field	Value
Publication number	US-10015841-B2
Application number	US-201514864184-A
Country	US
Kind code	B2
Filing date	Sep 24, 2015
Priority date	Sep 24, 2014
Publication date	Jul 3, 2018
Grant date	Jul 3, 2018

Abstract

A micro heater and a micro sensor is capable of providing a heater having a small thermal capacity by forming an air gap which surrounds the heater wire, and forming the heater wire on a porous substrate.

First claim

What is claimed is:

1. A micro heater comprising:
a porous substrate formed of an aluminum oxide porous layer;
a heater electrode which is formed on said porous substrate and includes a heater wire and a heater electrode pad which is connected to said heater wire; and
an air gap which surrounds said heater wire is formed in said porous substrate,
wherein said air gap is formed by completely penetrating said porous substrate.

2. The micro heater according to claim 1 ,
wherein a discoloration protection layer is formed on the upper side of said heater electrode and said discoloration protection layer comprises silicon dioxide or oxide series material.

3. A micro heater comprising:
a porous substrate; and
a heater electrode which is formed in said porous substrate and includes a heater wire and a heater electrode pad which is connected to said heater wire,
wherein a first supporting portion which supports said heater wire and a second supporting portion which supports said heater electrode pad are formed on said porous substrate, and an air gap is formed between said first supporting portion and said second supporting portion, and the shape of said second supporting portion is formed to be identical or similar to the shape of said heater electrode pad,
wherein said air gap is formed by completely penetrating said porous substrate.

4. A micro sensor comprising:
a porous substrate formed of an aluminum oxide porous layer;
a sensor electrode which is formed on said porous substrate and includes a sensor wire and a sensor electrode pad which is connected to said sensor wire;
a heater electrode which is formed on said porous substrate and includes a heater electrode pad, and a heater wire which is connected to said heater electrode pad and disposed closer to said sensor wire than said sensor electrode pad; and
an air gap which surrounds said heater wire and said sensor wire is formed in said porous substrate, wherein said air gap is formed by completely penetrating said porous substrate.

5. The micro sensor according to claim 4 , wherein a sensing material covering said heater wire and said sensor wire is further included.

6. A micro sensor comprising:
a heater electrode which includes a heater wire wherein a plurality of first protrusions are formed in the end portion thereof, and a heater electrode pad being connected to said heater wire;
a sensor electrode which includes a sensor wire wherein a plurality of second protrusions disposed between said first protrusions, and a sensor electrode pad being connected to said sensor wire; and
an aluminum oxide porous layer which supports said heater electrode and said sensor electrode; and
an air gap formed between said heater electrode pad and said sensor electrode pad by removing a portion of said aluminum oxide porous layer, wherein said air gap is formed by completely penetrating said aluminum oxide porous layer.

7. The micro sensor according to claim 6 ,
wherein said aluminum oxide porous layer includes a first supporting portion which supports said heater wire and said sensor wire, wherein said air gap is formed outside of said first supporting portion.

8. The micro sensor according to claim 7 ,
wherein a sensing material is additionally formed in the location corresponding to said first supporting portion.

9. The micro sensor according to claim 6 ,
wherein said aluminum oxide porous layer includes:
a first supporting portion which supports said heater wire and said sensor wire;
a heater electrode pad support which supports said heater electrode pad and formed to have a same outline of said heater electrode pad but having a wider width than that of said heater electrode pad; and
a sensor electrode pad support which supports said sensor electrode pad and formed to have a same outline of said sensor electrode pad but having a wider width than that of said sensor electrode pad.

10. The micro sensor according to claim 6 ,
wherein a discoloration protection layer is formed on the upper side of said heater electrode or said sensor electrode, and said discoloration protection layer comprises silicon dioxide or oxide series material.

11. A micro sensor comprising:
a porous substrate;
a sensor electrode which is formed on said porous substrate and includes a sensor wire and a sensor electrode pad which is connected to said sensor wire; and
a heater electrode which is formed on said porous substrate and includes a heater wire and heater electrode pad which is connected to said heater wire,
wherein said porous substrate includes:
a sensor electrode pad support which supports said sensor electrode pad; and
a heater electrode pad support which supports said heater electrode pad; and
an air gap is formed between said heater electrode pad support and said sensor electrode pad support, wherein said air gap is formed by completely penetrating said porous substrate.

12. A micro sensor comprising:
a porous substrate;
a sensor electrode which is formed on said porous substrate and includes a sensor wire, and a sensor electrode pad which is connected to said sensor wire; and
a heater electrode which is formed on said porous substrate and includes a heater wire, and a heater electrode pad which is connected to said heater wire,
wherein said porous substrate includes:
a first supporting portion which supports said heater wire and said sensor wire;
a heater electrode pad support which supports said heater electrode pad;
a sensor electrode pad support which supports said sensor electrode pad; and
an air gap is formed by removing all portions of said porous substrate except said first supporting portion, said heater electrode pad support, and said sensor electrode pad support, wherein said air gap is formed by completely penetrating said porous substrate.

13. A micro sensor comprising:
a heater electrode which includes a heater wire wherein a plurality of first protrusions are formed in the end portion thereof, and a first and a second heater electrode pads which are connected to both sides of said heater wire;
a sensor electrode which includes a sensor wire wherein a plurality of second protrusions are disposed between said first protrusions, and a sensor electrode pad which is connected to said sensor wire; and
a porous substrate which supports said heater electrode and said sensor electrode,
wherein said porous substrate includes:
a first supporting portion supporting said heater wire and said sensor wire;
a first heater electrode pad support which supports said first heater electrode pad;
a second heater electrode pad support which supports said second heater electrode pad;
a sensor electrode pad support which supports said sensor electrode pad; and
an air gap which is formed on an outer side of said first supporting portion, wherein said air gap is formed by completely penetrating said porous substrate.

14. The micro sensor according to claim 13 ,
wherein at least a portion of said first heater electrode pad support, said second heater electrode pad support, and said sensor electrode pad support is separated from each other by said air gap.

15. A micro heater comprising:
a porous substrate formed of an aluminum oxide porous layer;
a heater electrode which is formed on said porous substrate and includes a heater wire and a heater electrode pad which is connected to said heater wire;
an air gap which surrounds said heater wire is formed in said porous substrate, wherein said air gap is formed by completely penetrating said porous substrate; and
an opening, which is disposed in the lower portion of said heater wire and

Assignees

• Point Engineering Co Ltd

Inventors

• Ahn Bum Mo
• Park Seung Ho
• Byun Sung Hyun

Classifications

• H05B3/262

  the insulating base being an insulated metal plate · CPC title

• G01N27/12

  of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid {, for detecting components in the fluid} · CPC title

• H05B3/03 Primary

  Electrodes · CPC title

• H05B2203/014

  Heaters using resistive wires or cables not provided for in H05B3/54 · CPC title

• H05B2203/017

  Manufacturing methods or apparatus for heaters · CPC title