Monolithic image chip for near-to-eye display

Patent metadata

Field	Value
Publication number	US-10217911-B2
Application number	US-201715814993-A
Country	US
Kind code	B2
Filing date	Nov 16, 2017
Priority date	Sep 26, 2014
Publication date	Feb 26, 2019
Grant date	Feb 26, 2019

Abstract

A set of light emitting devices can be formed on a substrate A growth mask having a first aperture in a first area and a second aperture in a second area is formed on a substrate. A first nanowire and a second nanowire are formed in the first and second apertures, respectively. The first nanowire includes a first active region having a first band gap and a second active region having a second band gap. The first band gap is greater than the second hand gap. The second nanowire includes an active region having the first band gap and does not include, or is adjoined to, any material having the second band gap.

First claim

The invention claimed is:

1. A semiconductor structure including light emitting devices, comprising:
a first light emitting device containing a first nanowire located on a substrate, wherein the first nanowire comprises a first active region, the first active region including a first lower active region having a first band gap and a first upper active region having a second band gap, wherein the first band gap is greater than the second band gap; and
a second light emitting device containing a second nanowire located on the substrate, wherein the second nanowire comprises a second active region having the first band gap and does not include, nor is in physical contact with, any material having the second band gap.

2. The semiconductor structure of claim 1 , wherein:
the first active region comprises a first III-V compound semiconductor material; and
the second active region comprises a second III-V compound semiconductor material.

3. The semiconductor structure of claim 2 , wherein:
the first III-V compound semiconductor material provides light emission at a first peak emission wavelength; and
the second III-V compound semiconductor material provides light emission at a second peak emission wavelength that is longer than the first peak emission wavelength.

4. The semiconductor structure of claim 1 , wherein:
the first nanowire comprises a first growth template including a first nanowire core;
the second nanowire comprises a second growth template including a second nanowire core; and
the first nanowire core and the second nanowire core comprises a semiconductor material having a first conductivity type.

5. The semiconductor structure of claim 4 , wherein:
the first lower active region is located around a lower portion of the first nanowire core and comprises at least one first quantum well that has the first band gap;
the first upper active region is located around an upper portion of the first nanowire core and comprises at least one second quantum well that has the second band gap; and
the second active region is located around the second nanowire core and comprises at least one third quantum well that has the first band gap.

6. The semiconductor structure of claim 5 , wherein:
the first nanowire core and the second nanowire core comprise gallium nitride;
the at least one first quantum well and the at least one third quantum well comprise indium gallium nitride having the first band gap; and
the at least one second quantum well comprises indium gallium nitride having the second band gap.

7. The semiconductor structure of claim 4 , further comprising a growth mask located on the substrate and including a first aperture and a second aperture therein, wherein:
the first nanowire core extends within the first aperture and is epitaxially aligned to a single crystalline semiconductor material of the substrate; and
the second nanowire core extends within the second aperture and is epitaxially aligned to the single crystalline semiconductor material of the substrate.

8. The semiconductor structure of claim 7 , further comprising:
the first growth template comprising the first nanowire core extends laterally beyond the first aperture over the growth mask; and
the second growth template comprising the second nanowire core extends laterally beyond the second aperture over the growth mask.

9. The semiconductor structure of claim 7 , wherein the first growth template and the second growth template differ from each other by at least one of:
a respective growth area defined by an area of the first aperture and an area of the second aperture, respectively;
a respective facet area for a same type of crystallographic plane; and
a respective nearest-neighbor spacing from adjacent growth templates that are present on the substrate.

10. The semiconductor structure of claim 7 , wherein the first aperture has an area that is at least twice the area of the second aperture.

11. semiconductor structure of claim 4 , further comprising:
a first junction forming element having a doping of a second conductivity type that is the opposite of the first conductivity type and located around the first active region to provide a first junction selected from a p-n junction and a p-i-n junction; and
a second junction forming element having a doping of the second conductivity type and located around the second active region to provide a second junction selected from a p-n junction and a p-i-n junction.

12. The semiconductor structure of claim 4 , wherein:
the first growth template comprises a III-V compound semiconductor material and has m-planes as sidewalls and p-planes as faceted top surfaces; and
the second growth template comprises the III-V compound semiconductor material and has m-planes as sidewalls and a generally horizontal top surface.

13. The semiconductor structure of claim 4 , wherein:
the first growth template comprises a III-V compound semiconductor material and has m-planes as side-walls and p-planes as faceted top surfaces; and
the second growth template comprises the III-V compound semiconductor material and has p-planes as faceted surfaces that are adjoined at an apex.

14. The semiconductor structure of claim 13 , further comprising a growth mask located on the substrate and including a first aperture and a second aperture therein, wherein:
the first nanowire core extends within the first aperture and is epitaxially aligned to a single crystalline semiconductor material of the substrate; and
the second nanowire core extends within the second aperture and is epitaxially aligned to the single crystalline semiconductor material of the substrate,
wherein a bottom periphery of the p-planes of the second growth template contacts a top surface of the growth mask.

15. The semiconductor structure of claim 4 , further comprising:
a first junction forming element having a doping of a second conductivity type that is the opposite of the first conductivity type and located around the first active region to provide a first junction selected from a p-n junction and a p-i-n junction; and
a second junction forming element having a doping of the second conductivity type and located around the second active region to provide a second junction selected from a p-n junction and a p-i-n junction.

16. The semiconductor device of claim 4 , further comprising a third light emitting device comprising:
a third growth template located on the substrate, wherein the third growth template has as nanopyramid shape; and
a third active region having a third band gap that is less that the second band gap.

17. The semiconductor device of claim 16 , further comprising a growth mask located on the substrate and including a first aperture, a second aperture, and a third aperture therein, wherein:
the first nanowire core extends within the first aperture and is epitaxially aligned to a single crystalline semiconductor material of the substrate;
the second nanowire core extends within the second aperture and is epitaxially aligned to the single crystalline semiconductor material of the substrate; and
the third growth template extends within the third aperture and is epitaxially aligned to the single crystalline semiconductor material of the substrate.

18. The semiconductor device of claim 17 , wherein:
additional light emitting devices are present on the substrate around each of the first, second, and third light emitting devices;
the third aperture has an area that is substantially the same as second aperture; and
a nearest-neighbor spacing of the

Assignees

• Glo Ab

Inventors

• Schubert Martin
• Thompson Daniel Bryce
• Grundmann Michael
• Gardner Nathan

Classifications

• G02F2202/36

  Micro- or nanomaterials · CPC title

• H01L33/08

  Electricity · mapped topic

• H01L33/0062

  Electricity · mapped topic

• H01L33/24

  Electricity · mapped topic

• H01L33/502

  Electricity · mapped topic