Analysis device including a MEMS and/or NEMS network

Patent metadata

Field	Value
Publication number	US-10216698-B2
Application number	US-201113702790-A
Country	US
Kind code	B2
Filing date	Jun 6, 2011
Priority date	Jun 7, 2010
Publication date	Feb 26, 2019
Grant date	Feb 26, 2019

Abstract

A device for analyzing a fluid, including a layer including a plurality of sensors of MEMS and/or NEMS type, a layer including a mechanism controlling the sensor and for processing information transmitted by the sensors, the control and processing mechanism being electrically connected to the detectors, and a layer positioned on the layer including the sensors on a side of a face including the sensors including a mechanism spatially and temporally distributing the fluid on the sensors.

First claim

The invention claimed is:

1. A device for analyzing a fluid, comprising:
only one sensor layer including a plurality of sensors of MEMS or NEMS to generate information associated with a chemical composition of the fluid, each sensor of the plurality of sensors including at least one mobile component that reacts to one or more characteristic stimuli of the fluid, the mobile component being suspended relatively to a fixed component, and each mobile component configured to move independently from mobile components of other sensors of the plurality of sensors;
a processing circuitry layer including processing circuitry configured to process the information transmitted by the sensors, the processing circuitry being electrically connected to the sensors; and
a distribution layer positioned on the only one sensor layer on a side of a face including the sensors, the distribution layer including a distributor to spatially and temporally distribute stimulus or stimuli to the sensors, the distributor comprising a plurality of channels to bring onto each sensor or group of sensors independently the stimulus or the stimuli simultaneously or quasi simultaneously or one channel to bring onto each sensor or group of sensors the stimulus or the stimuli successively, the only one sensor layer, the processing circuitry layer, and the distribution layer being arranged in a stacked fashion with the only one sensor layer being between the distribution layer and the processing circuitry layer.

2. The analysis device according to claim 1 , wherein the distributor including a plurality of channels, one end of which, as an inlet end, is configured to be connected to a supply of fluid to be analyzed.

3. The analysis device according to claim 2 , wherein the sensors form resonators, and wherein the distributor includes an injector to inject or an ionizer to ionize the fluid on each sensor or a group of sensors, the plurality of channels including a second end connected to the injector or ionizer, the injector facing the sensor of the group or sensors and injecting or projecting the stimulus or stimuli directly on the sensor or the group of sensors.

4. The analysis device according to claim 3 , wherein the injector includes at least one injector of electrospray ionization.

5. The analysis device according to claim 1 , wherein the distribution layer includes at least one filter to filter certain compounds contained in the fluid.

6. The analysis device according to claim 1 , wherein the distributor includes a plurality of channels configured to deliver fluid containing cells to each of the sensors, a second outlet end of each of the channels opening out above a sensor or a group of sensors, the sensors forming sensors of forces applied by the cells on the mobile component of the sensors.

7. The analysis device according to claim 1 , wherein the distributor including a channel forming a gas chromatography microcolumn.

8. The analysis device according to claim 7 , wherein the channel of the distributor includes at least one groove made in the distribution layer, an open end of the groove covering a succession of sensors, so the fluid circulating in the groove comes into contact with the succession of sensors.

9. The analysis device according to the claim 8 , wherein the at least one groove includes at least one stationary phase.

10. The analysis device according to claim 7 , wherein the sensors are chemically functionalized by depositing at least one material providing a certain affinity with species to be separated from the fluid to be analyzed.

11. The analysis device according to claim 7 , wherein a gap between the sensors is less than half a width of a detection peak.

12. The analysis device according to claim 1 , further comprising an interconnection layer between the only one sensor layer and the processing circuitry layer, the interconnection layer electrically connecting the sensors to the processing circuitry.

13. The analysis device according to claim 1 , wherein the processing circuitry layer is divided into interconnected first and second sublayers, the first sublayer including near-pixel basic electronics for analog preprocessing of each sensor, and the second sublayer including electronics configured to achieve digital processing of the information.

14. The analysis device according to claim 1 , wherein a top surface of the only one sensor layer faces a bottom surface of the distribution layer, and a bottom surface of the only one sensor layer faces a top surface of the processing circuitry layer.

15. The analysis device according to claim 1 , wherein the distribution layer is adhesively bonded onto the only one sensor layer, and the processing circuitry layer is adhesively bonded to the only one sensor layer.

16. The analysis device according to claim 1 , wherein the processing circuitry layer includes a plurality of processing circuitry disposed thereon.

17. A device for analyzing a fluid, comprising:
only one sensor layer including a plurality of sensors of MEMS or NEMS to generate information associated with a chemical composition of the fluid, each sensor of the plurality of sensors including at least one mobile component that reacts to one or more characteristic stimuli of the fluid, the mobile component being suspended relatively to a fixed component, and each mobile component configured to move independently from mobile components of other sensors of the plurality of sensors;
a processing circuitry layer including processing circuitry configured to process the information transmitted by the sensors, the processing circuitry being electrically connected to the sensors; and
a distribution layer positioned on the only one sensor layer on a side of a face including the sensors, the distribution layer including a distributor to spatially and temporally distribute stimulus or stimuli to the sensors, the distributor including one channel to bring onto each sensor or group of sensors the stimulus or the stimuli successively, the only one sensor layer, the processing circuitry layer, and the distribution layer being arranged in a stacked fashion with the only one sensor layer being between the distribution layer and the processing circuitry layer.

18. The analysis device according to claim 17 , wherein a top surface of the only one sensor layer faces a bottom surface of the distribution layer, and a bottom surface of the only one sensor layer faces a top surface of the processing circuitry layer and wherein a bottom of the channel is made by the top surface of the only one sensor layer, such that the sensors are located in the channel.

19. A device for analyzing a fluid, comprising:
only one sensor layer including a plurality of sensors of MEMS or NEMS to generate information associated with a chemical composition of the fluid, each sensor of the plurality of sensors including at least one mobile component that reacts to one or more characteristic stimuli of the fluid, the mobile component being suspended relatively to a fixed component, and each mobile component configured to move independently from mobile components of other sensors of the plurality of sensors;
a processing circuitry layer including processing circuitry configured to process the information transmitted by the sensors, the processing circuitry being electrically connected to the sensors; and
a distribution layer positioned on the only one sensor layer on a side of a face including the sensors, the distribution layer including a distributor to spatially and temporally distribute stimulus or stimuli t

Assignees

• Ernst Thomas
• Andreucci Philippe
• Colinet Eric
• Duraffourg Laurent
• Myers Edward B
• Roukes Michael L
• Commissariat A L Energie Atomique Et Aux Energies Alternatives
• California Inst Of Techn

Inventors

• Ernst Thomas
• Andreucci Philippe
• Colinet Eric
• Duraffourg Laurent
• Myers Edward B
• Roukes Michael L

Classifications

• B81B2201/06

  Bio-MEMS · CPC title

• G01N30/6095

  Micromachined or nanomachined, e.g. micro- or nanosize · CPC title

• B81C2203/0771

  Stacking the electronic processing unit and the micromechanical structure · CPC title

• G01N2291/0256

  Adsorption, desorption, surface mass change, e.g. on biosensors · CPC title

• G06F17/00 Primary

  Digital computing or data processing equipment or methods, specially adapted for specific functions (information retrieval, database structures or file system structures therefor G06F16/00) · CPC title