Low cost flash memory fabrication flow based on metal gate process

Patent metadata

Field	Value
Publication number	US-10211303-B2
Application number	US-201615223109-A
Country	US
Kind code	B2
Filing date	Jul 29, 2016
Priority date	Aug 5, 2015
Publication date	Feb 19, 2019
Grant date	Feb 19, 2019

Abstract

An integrated circuit contains a flash cell in which the top gate of the sense transistor is a metal sense gate over the floating gate. The source/drain regions of the sense transistor extend under the floating gate so that the source region is separated from the drain region by a sense channel length less than 200 nanometers. The floating gate is at least 400 nanometers wide, so the source/drain regions of the sense transistor extend under the floating gate at least 100 nanometers on each side. The integrated circuit is formed by forming the sense transistor source and drain regions before forming the floating gate.

First claim

What is claimed is:

1. An integrated circuit including a flash memory, comprising:
a substrate comprising a semiconductor material;
a sense transistor of the flash memory, comprising:
a gate dielectric layer disposed at a top surface of the substrate;
a floating gate of polysilicon at least 400 nanometers wide disposed on the gate dielectric layer;
dielectric offset spacers and source/drain sidewall spacers located on sides of the floating gate;
first and second source/drain regions disposed in the substrate, extending partway under the floating gate, separated by less than 200 nanometers;
a top gate dielectric layer disposed over the floating gate, the dielectric offset spacers and the source/drain sidewall spacers; and
a metal sense gate disposed on the top gate dielectric layer.

2. The integrated circuit of claim 1 , wherein the metal sense gate includes metal selected from the group consisting of tantalum, tantalum nitride, titanium, and titanium nitride.

3. The integrated circuit of claim 1 , wherein the top gate dielectric layer is a layer stack including a sub-layer of silicon dioxide and a sub-layer of silicon nitride.

4. The integrated circuit of claim 1 , wherein the first and second source/drain regions of the sense transistor include deep source/drain portions disposed outward of the floating gate.

5. The integrated circuit of claim 4 , comprising metal silicide at the top surface of the substrate over the deep source/drain portions of the first and second source/drain regions.

6. The integrated circuit of claim 1 , wherein the metal sense gate has a thickness in a range between about 40 nanometers and about 80 nanometers.

7. The integrated circuit of claim 1 , comprising metal interconnects with a copper damascene structure comprising trench liners of a same metal as the metal sense gate.

8. The integrated circuit of claim 1 , comprising a logic n-channel metal oxide semiconductor (NMOS) transistor having a gate dielectric layer with a same thickness as the gate dielectric layer of the sense transistor.

9. An integrated circuit including a flash memory, comprising:
a substrate comprising a semiconductor material;
a sense transistor of the flash memory, comprising:
a gate dielectric layer disposed at a top surface of the substrate;
a floating gate of polysilicon having a width disposed on the gate dielectric layer;
dielectric offset spacers and source/drain sidewall spacers located on sides of the floating gate;
first and second source/drain regions disposed in the substrate, extending partway under the floating gate by a distance at least 25% of the width;
a top gate dielectric layer disposed over the floating gate, the dielectric offset spacers and the source/drain sidewall spacers; and
a metal sense gate disposed on the top gate dielectric layer.

10. The integrated circuit of claim 9 , comprising an n-type access transistor with a gate and access source/drain regions, wherein the first and second source/drain regions extend under the floating gate further than the access source/drain regions extend under the gate of the n-type access transistor.

11. The integrated circuit of claim 9 , wherein the floating gate width is about 400 nm and the distance the first and second source/drain regions extend under the floating gate is at least 100 nm.

12. The integrated circuit of claim 9 , wherein the metal sense gate does not extend over the first and second source/drain regions past edges of the floating gate.

13. The integrated circuit of claim 9 , wherein the metal sense gate includes metal selected from the group consisting of tantalum, tantalum nitride, titanium, and titanium nitride.

14. The integrated circuit of claim 9 , wherein the top gate dielectric layer is a layer stack including a sub-layer of silicon dioxide and a sub-layer of silicon nitride.

15. An electronic device, comprising:
a substrate comprising a semiconductor material;
a transistor, comprising:
a gate dielectric layer disposed at a top surface of the substrate;
a floating gate of polysilicon at least 400 nanometers wide disposed on the gate dielectric layer;
source/drain spacers located next to sides of the floating gate;
first and second source/drain regions disposed in the substrate, extending partway under the floating gate, separated by less than about 200 nanometers;
a top gate dielectric layer disposed over the floating gate and the source/drain sidewall spacers; and
a metal sense gate disposed on the top gate dielectric layer.

16. The electronic device of claim 15 , wherein first and second source/drain regions are separated by fewer than about 200 nanometers.

17. The electronic device of claim 15 , wherein the top gate dielectric layer includes a layer stack including a sub-layer of silicon dioxide and a sub-layer of silicon nitride.

18. The electronic device of claim 15 , wherein the first and second source/drain regions of the transistor include deep source/drain portions disposed outward of the floating gate.

19. The electronic device of claim 18 , comprising metal silicide at the top surface of the substrate over the deep source/drain portions of the first and second source/drain regions.

20. The electronic device of claim 15 , wherein the metal sense gate has a thickness in a range between about 40 nm and about 80 nm.

Assignees

• Texas Instruments Inc

Inventors

• Tan Ning
• Tian Weidong

Classifications

• H10P30/222

  characterised by the angle between the ion beam and the crystal planes or the main crystal surface (characterised by the angle between the ion beam and the mask H10P30/221) · CPC title

• H10P30/22

  using masks · CPC title

• H10D64/013

  of electrodes having a conductor capacitively coupled to a semiconductor by an insulator · CPC title

• H10W10/031

  of isolation regions comprising PN junctions · CPC title

• H10W10/30

  Isolation regions comprising PN junctions · CPC title