Semiconductor device including polygon-shaped standard cell

Patent metadata

Field	Value
Publication number	US-10204920-B2
Application number	US-201615095579-A
Country	US
Kind code	B2
Filing date	Apr 11, 2016
Priority date	Apr 9, 2015
Publication date	Feb 12, 2019
Grant date	Feb 12, 2019

Abstract

A semiconductor device including a standard cell for implementing a logic element includes a first active region and a second active region extending in a second direction on a substrate and spaced apart from each other in a first direction perpendicular to the second direction, gate electrodes intersecting the first active region and the second active region, and source regions and drain regions formed on the first and second active regions at both sides of each of the gate electrodes. A boundary of the standard cell has a polygonal shape, excluding a quadrilateral shape, when viewed in a plan view. As a result, an area of the standard cell may be reduced to reduce a size of the semiconductor device.

First claim

What is claimed is:

1. A semiconductor device comprising:
a standard cell for forming a logic element, the standard cell including:
a first active region including a first PMOS region and a first NMOS region that are spaced apart from each other in a first direction and extend in a second direction on a substrate, the second direction being perpendicular to the first direction;
a second active region including a second PMOS region and a second NMOS region that extend in the second direction on the substrate and are spaced apart from each other in the first direction;
gate electrodes which intersect the first active region and the second active region in the first direction and are spaced apart from each other in the second direction;
first source regions and first drain regions formed on the first active region at both sides of each of the gate electrodes in the second direction;
second source regions and second drain regions formed on the second active region at both sides of each of the gate electrodes in the second direction; and
a first power line extending in the second direction between the first active region and the second active region when viewed in a plan view,
wherein a boundary of the standard cell has a polygonal shape, excluding a quadrilateral shape, when an entirety of the boundary viewed in the plan view.

2. The semiconductor device of claim 1 , wherein the standard cell further comprises:
a second power line extending in the second direction, the first active region including a first edge adjacent to the first power line and a second edge opposite to the first edge and adjacent to the second power line; and
a third power line extending in the second direction, the second active region including a first edge adjacent to the first power line and a second edge opposite to the first edge and adjacent to the third power line,
wherein the boundary of the standard cell overlaps with the first power line, the second power line, and the third power line.

3. The semiconductor device of claim 2 , wherein the standard cell further comprises:
a first region having a first quadrilateral shape and overlapping with the first power line, the second power line, and the third power line; and
a second region having a second quadrilateral shape and overlapping with the first power line and the third power line,
wherein the second region is in contact with the first region, and shares a sub-boundary with the first region.

4. The semiconductor device of claim 3 , wherein the standard cell further comprises a third region having a third quadrilateral shape and overlapping with the first power line and the third power line,
the first region includes a first edge which extends in the first direction, and a second edge which extends in the first direction and is opposite to the first edge,
the second region is in contact with the first edge of the first region, and
the third region is in contact with the second edge of the first region.

5. The semiconductor device of claim 3 , wherein the standard cell further comprises a fourth region having a fourth quadrilateral shape and overlapping with the first power line and the second power line,
the first region includes a first edge which extends in the first direction, and a second edge which extends in the first direction and is opposite to the first edge,
the second region is in contact with the first edge of the first region, and
the fourth region is in contact with the second edge of the first region.

6. The semiconductor device of claim 3 , wherein the standard cell further comprises a fifth region having a fifth quadrilateral shape and overlapping with the first power line, the second power line, and the third power line,
the second region includes a first edge which extends in the first direction, a second edge which extends in the first direction and is opposite to the first edge,
the first region is in contact with the first edge of the second region, and
the fifth region is in contact with the second edge of the second region.

7. The semiconductor device of claim 2 , wherein the first PMOS region and the second PMOS region are adjacent to the first power line.

8. The semiconductor device of claim 4 , wherein the standard cell further comprises:
a third active region which extends adjacent to the third power line on the substrate, and includes a third PMOS region and a third NMOS region that extend in the second direction and are spaced apart from each other in the first direction, the gate electrodes further extending to intersect the third active region;
third source regions and third drain regions formed on the third active region at both sides of each of the gate electrodes in the second direction; and
a fourth power line extending in the second direction,
wherein the third active region includes a first edge which extends in the second direction adjacent to the third power line, and a second edge which is opposite to the first edge and extends in the second direction adjacent to the fourth power line,
the standard cell further comprises a sixth region having a sixth quadrilateral shape and overlapping with the third power line and the fourth power line, and
the sixth region is in contact with the first region.

9. The semiconductor device of claim 8 , wherein the second NMOS region and the third NMOS region are adjacent to the third power line.

10. A semiconductor device comprising:
a standard cell for forming a logic element, the standard cell including:
an NMOS region and a PMOS region which are spaced apart from each other in a first direction and extend in a second direction on a substrate, the second direction being perpendicular to the first direction;
gate electrodes which intersect the NMOS region and the PMOS region in the first direction and are spaced apart from each other in the second direction;
source regions and drain regions formed on the NMOS region and the PMOS region at both sides of each of the gate electrodes in the second direction;
a first power line extending in the second direction adjacent to a first edge of the NMOS region;
a second power line extending in the second direction adjacent to a second edge of the PMOS region;
a first region having a first quadrilateral shape and overlapping with the first power line and the second power line; and
a second region having a second quadrilateral shape and overlapping with the second power line and the PMOS region, the second region not overlapping the first power line,
wherein a boundary of the standard cell has a polygonal shape excluding a quadrilateral shape.

11. The semiconductor device of claim 10 , wherein the NMOS region and the PMOS region are disposed between the first power line and the second power line when viewed in a plan view.

12. The semiconductor device of claim 11 , wherein the second region is in contact with the first region, and shares a sub-boundary with the first region.

13. The semiconductor device of claim 12 , wherein the standard cell further comprises a third region having a third quadrilateral shape and overlapping with the second power line and the PMOS region,
the first region includes a first edge being in contact with the second region and a second edge opposite to the first edge, and
the third region is in contact with the second edge of the first region.

14. The semiconductor device of claim 12 , wherein the standard cell further comprises a fourth region having a fourth quadrilateral shape and overlapping with the first power line and the NMOS region,
the first region includes a first edge being in contact with the second reg

Assignees

• Samsung Electronics Co Ltd

Inventors

• Kim Jintae
• Choi Jaewan

Classifications

• G06F30/39

  Circuit design at the physical level (physical level design for reconfigurable circuits G06F30/347) · CPC title

• G06F30/398

  Design verification or optimisation, e.g. using design rule check [DRC], layout versus schematics [LVS] or finite element methods [FEM] (optical proximity correction [OPC] design processes G03F1/36) · CPC title

• H01L27/11807 Primary

  Electricity · mapped topic

• H01L2027/11859

  Electricity · mapped topic

• H01L2027/11874

  Electricity · mapped topic