Thin heated substrate support

Patent metadata

Field	Value
Publication number	US-10204805-B2
Application number	US-201615222689-A
Country	US
Kind code	B2
Filing date	Jul 28, 2016
Priority date	Mar 1, 2011
Publication date	Feb 12, 2019
Grant date	Feb 12, 2019

Abstract

The present disclosure relates to an apparatus for heating and supporting a substrate in a processing chamber. A substrate support assembly includes a heated plate having a substrate supporting surface on a front side and a cantilever arm extending from a backside of the heated plate. The heated plate is configured to support and heat a substrate on the substrate supporting surface. The cantilever arm has a first end attached to the heated plate near a central axis of the heated plate, and a second end extending radially outwards from the central axis.

First claim

What is claimed is:

1. A substrate support assembly, comprising:
a heated plate having a front side and a backside, the front side including a substrate supporting surface;
a heating element disposed in the heated plate;
a cantilever arm extending from the backside of the heated plate, wherein the cantilever arm has a first end attached to the heated plate near a central axis of the heated plate, and a second end extending radially outwards from the central axis;
a pumping pipe disposed in a passage formed in the cantilever arm; and
a bi-metal joint disposed on the backside of the heated plate, wherein the bi-metal joint couples to the pumping pipe and is configured to thermally isolate the heated plate from the pumping pipe, wherein the bi-metal joint comprises a first portion formed from a first metal and a second portion formed from a second metal dissimilar to the first metal.

2. The substrate support assembly of claim 1 further comprising:
a thermal isolator coupled to the backside of the heated plate at the central axis of the heated plate, wherein the thermal isolator extends through an opening in the cantilever arm.

3. The substrate support assembly of claim 1 , further comprising an extension tube attached to the cantilever arm near the second end, wherein a second bi-metal joint connects between the cantilever arm and the extension tube, the heated plate and the cantilever arm are formed from the first metal and the extension tube is formed from the second metal.

4. The substrate support assembly of claim 3 , wherein the first metal is aluminum and the second metal is stainless steel.

5. The substrate support assembly of claim 3 , wherein the extension tube comprises a bellows.

6. The substrate support assembly of claim 3 , further comprising:
a bellows coupled to the extension tube by the second bi-metal joint.

7. The substrate support assembly of claim 1 , wherein the heated plate comprises:
an upper heated plate forming the substrate supporting surface;
a lower heated plate attached to the upper heated plate, wherein the heating element is sandwiched between the upper heated plate and the lower heated plate; and
a heating lead attached to the heating element, the heating lead disposed in a passage formed in the cantilever arm.

8. The substrate support assembly of claim 1 , wherein the pumping pipe is fluidly connected to chucking channels formed on the substrate supporting surface.

9. The substrate support assembly of claim 8 , wherein the pumping pipe comprises:
a horizontal tube disposed within a recess formed in the cantilever arm, wherein the heated plate and the horizontal tube are formed from dissimilar metals.

10. The substrate support assembly of claim 1 , further comprising:
one or more sensors disposed in the heated plate; and
a sensing lead connecting the one or more sensors, wherein the sensing lead is disposed in a passage formed in the cantilever arm.

11. The substrate support assembly of claim 1 , further comprising:
a pumping pipe coupled to the heated plate by the bi-metal joint.

12. The substrate support assembly of claim 1 , wherein the first portion and the second portion of the bi-metal joint are coupled together by explosion bond.

13. A method for processing a substrate, comprising:
placing the substrate on a substrate supporting surface of a substrate support assembly, wherein the substrate support assembly is supported by a thermal insert disposed in a processing chamber so that the substrate support assembly does not directly contact a chamber body, and the substrate support assembly comprises:
a heated plate having a front side and a backside, the front side including the substrate supporting surface;
a heating element disposed in the heated plate;
a cantilever arm extending from the backside of the heated plate, wherein the cantilever arm has a first end attached to the heated plate near a central axis of the heated plate, and a second end extending radially outwards from the central axis;
a pumping pipe disposed in a passage formed in the cantilever arm; and
a bi-metal joint disposed on the backside of the heated plate, wherein the bi-metal joint couples to the pumping pipe and is configured to thermally isolate the heated plate form the pumping pipe, wherein the bi-metal joint comprises a first portion formed from a first metal and a second portion formed from a second metal dissimilar to the first metal; and

heating the substrate using the heated plate of the substrate support assembly.

14. The method of claim 13 , further comprising cooling the chamber body by supplying a cooling fluid to a cooling adaptor connected to the substrate support assembly and the chamber body.

15. The method of claim 13 , further comprising coupling a thermal isolator to the backside of the heated plate at the central axis of the heated plate, wherein the thermal isolator extends through an opening in the cantilever arm.

16. The method of claim 13 , further comprising thermally isolating the heated plate using the bi-metal joint.

17. The method of claim 16 , further comprising attaching an extension tube to the cantilever arm near the second end, wherein a second bi-metal joint connects between the cantilever arm and the extension tube, the heated plate and the cantilever arm are formed from the first metal and the extension tube is formed from the second.

18. The method of claim 16 , further comprising coupling the first portion and the second portion of the bi-metal joint together by explosion bond.

19. The method of claim 16 , further comprising attaching a heating lead to the heating element, wherein the heating lead is disposed in a passage formed in the cantilever arm.

Assignees

• Applied Materials Inc

Inventors

• Yousif Imad
• Salinas Martin Jeffrey
• Reuter Paul B
• Pal Aniruddha
• Lee Jared Ahmad

Classifications

• H10P95/90

  Thermal treatments, e.g. annealing or sintering · CPC title

• H10P72/7626

  characterised by the construction of the shaft · CPC title

• H10P72/0602

  Temperature monitoring · CPC title

• H10P72/0434

  mainly by convection · CPC title

• H10P72/78

  using vacuum or suction, e.g. Bernoulli chucks · CPC title