Wafer releasing

Patent metadata

Field	Value
Publication number	US-10186445-B2
Application number	US-201615209390-A
Country	US
Kind code	B2
Filing date	Jul 13, 2016
Priority date	May 15, 2014
Publication date	Jan 22, 2019
Grant date	Jan 22, 2019

Abstract

Embodiments of the present invention provide a chuck system for handling a wafer that comprises a first and a second main surface. The chuck system includes a chuck configured to hold the wafer at the second main surface facing the chuck and a release device. The chuck system further includes an actuator configured to lift the release device away from the chuck. The release device is configured such that the release device mechanically engages with the wafer at an edge portion of the second main surface of the wafer when being lifted, thereby releasing the wafer from the chuck.

First claim

What is claimed is:

1. A chuck system for handling a wafer including a first and a second main surface, the chuck system comprising:
a chuck configured to hold the wafer at the second main surface facing the chuck;
a release device configured to release the wafer from the chuck by mechanically engaging the wafer at an edge portion of the second main surface of the wafer;
an edge protection device configured to protect an edge portion of the first main surface of the wafer, wherein the edge protection device comprises a housing cavity configured to incorporate the release device; and
a lift member configured to lift the edge protection device away from the edge portion of the first main surface of the wafer and to lift the release device so as to release the wafer.

2. The chuck system in accordance with claim 1 , wherein the lift member is configured to mechanically engage the release device while not engaging the edge protection device in a first state of the chuck system and to engage the release device and the edge protection device in a second state of the chuck system.

3. The chuck system in accordance with claim 1 , wherein the lift member is configured to space the edge protection device from the wafer at a first instance of time and actuate the release device such that the wafer is released from the chuck at a second instance of time subsequent to the first instance of time.

4. The chuck system in accordance with claim 1 , wherein the lift member is configured to lift the edge protection device from the wafer before lifting the release device so as to release the wafer from the chuck.

5. The chuck system in accordance with claim 1 , wherein the edge portion forms an outer ring of the wafer, the outer ring comprising 10% or less of a dimension of the wafer.

6. The chuck system in accordance with claim 1 , further comprising an actuator configured to lift the lift member.

7. The chuck system in accordance with claim 1 , wherein the lift member comprises a first contact region to mechanically engage the edge protection device and a second contact region to mechanically engage the release device.

8. The chuck system in accordance with claim 1 , wherein the chuck is an electrostatic chuck.

9. The chuck system in accordance with claim 1 , wherein the release device is configured to mechanically engage the wafer at a number of discrete sections of the edge portion of the second main surface of the wafer.

10. A wafer processing apparatus comprising:
a chuck system for handling a wafer comprising a first and a second main surface, the chuck system comprising:
a chuck configured to hold the wafer at the second main surface facing the chuck;
a release device configured to release the wafer from the chuck by mechanically engaging the wafer at an edge portion of the second main surface of the wafer;
an edge protection device configured to protect an edge portion of the first main surface of the wafer, wherein the edge protection device comprises a housing cavity configured to incorporate the release device; and
a lift member configured to lift the edge protection device away from the edge portion of the first main surface of the wafer and to lift the release device so as to release the wafer; and
a processing chamber surrounding the chuck system, the processing chamber configured to adjust an ambient pressure inside the processing chamber, wherein the ambient pressure is smaller than an atmospheric pressure.

11. A method for handling a wafer including a first and a second main surface, the method comprising:
holding the wafer with a chuck at the second main surface facing the chuck;
moving an edge protection device from a first state in which the edge protection device covers an edge portion of the first main surface of the wafer to a second state in which the edge protection device is lifted away from the edge portion of the first main surface; and
lifting a release device, the release device mechanically engaging the wafer at an edge portion of the second main surface of the wafer releasing the wafer from the chuck,
wherein moving the edge protection device and lifting the release device comprise lifting a common lift member, and
wherein the release device is temporarily incorporated by a housing cavity of the edge protection device.

12. The method in accordance with claim 11 , wherein the release device is mechanically engaged while the edge protection device is not engaged in a first state and engaging the release device and the edge protection device in a second state.

13. The method in accordance with claim 11 , wherein the edge protection device is spaced from the wafer at a first instance of time and the release device is actuated such that the wafer is released from the chuck at a second instance of time subsequent to the first instance of time.

14. The method in accordance with claim 11 , wherein the edge protection device is lifted from the wafer before lifting the release device so as to release the wafer from the chuck.

15. The method in accordance with claim 11 , wherein the edge portion forms an outer ring of the wafer, the outer ring comprising 10% or less of a dimension of the wafer.

16. The method in accordance with claim 11 , wherein the lift member is lifted by an actuator.

17. The method in accordance with claim 11 , wherein the lift member mechanically engages the edge protection device at a first contact region, and wherein the lift member mechanically engages the release device at a second contact region.

18. The method in accordance with claim 11 , wherein the chuck is an electrostatic chuck.

19. The method in accordance with claim 11 , wherein the release device mechanically engages the wafer at a number of discrete sections of the edge portion of the second main surface of the wafer.

Assignees

• Infineon Technologies Ag

Inventors

• Male Mathias
• Maier Christian
• Schweizer Philemon
• Bucher Manfred
• Steiner Thomas

Classifications

• H10P72/7624

  characterised by the mechanical construction of the susceptor, stage or support · CPC title

• H10P72/7612 Primary

  characterised by lifting arrangements, e.g. lift pins · CPC title

• H10P72/7611

  characterised by edge profile or support profile · CPC title

• H10P72/72 Primary

  using electrostatic chucks · CPC title

• H10P72/722 Primary

  Details of electrostatic chucks · CPC title