Compound containing phenolic hydroxy group, photosensitive composition, composition for resists, resist coating film, curable composition, composition for resist underlayer films, and resist underlayer film
US-9828457-B2 · Nov 28, 2017 · US
US10179828B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10179828-B2 |
| Application number | US-201515535839-A |
| Country | US |
| Kind code | B2 |
| Filing date | Nov 19, 2015 |
| Priority date | Jan 16, 2015 |
| Publication date | Jan 15, 2019 |
| Grant date | Jan 15, 2019 |
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A curable composition and a permanent resist film made using this curable composition are provided. The composition dissolves well in solvents, gives coatings superior in alkali developability, thermal decomposition resistance, light sensitivity, and resolution, and is particularly suitable for the formation of permanent resist films. Specifically, the composition is a curable composition for permanent resist films and contains a phenolic hydroxyl-containing compound (A) that has a molecular structure represented by structural formula (1): (where R 1 is hydrogen, alkyl, or aryl, and n is an integer of 2 to 10; R 2 is alkyl, alkoxy, aryl, aralkyl, or halogen, and m is an integer of 0 to 4; if m is 2 or more, the plurality of R 2 s may be the same or different from one another, and may be bonded to either of the two aromatic rings in the naphthylene structure) and a photosensitizer (B1) or curing agent (B2).
Opening claim text (preview).
The invention claimed is: 1. A calix[2-10]arene compound which is obtained by reacting only an 1,6-dihydroxynaphthalene compound with an aromatic aldehyde as reactants in the presence of a catalyst; wherein the 1,6-dihydroxynaphthalene is unsubstituted or substituted by any of alkyl, alkoxy, aryl, aralkyl or halogen; and wherein the aromatic aldehyde is represented by structure where R 6 and R 7 are each independently hydroxyl, halogen, alkyl, alkoxy, aryl, or aralkyl, p is an integer of 0 to 5, and q is an integer of 0 to 7; and if p or q is 2 or more, the plurality of R 6 s or R 7 s may be the same or different from one another. 2. The calix[2-10]arene compound according to claim 1 , wherein the aromatic aldehyde is selected from a group consisting of salicylaldehyde, 3-hydroxybenzaldehyde, 4-hydroxybenzaldehyde, 2-hydroxy-4-methylbenzaldehyde, 2,4-dihydroxybenzaldehyde, 3,4-dihydroxybenzaldehyde, 2-hydroxy-3-methoxybenzaldehyde, 3-hydroxy-4-methoxybenzaldehyde, 4-hydroxy-3-methoxybenzaldehyde, 3-ethoxy-4-hydroxybenzaldehyde, 4-hydroxy-3,5-dimethoxybenzaldehyde, methoxybenzaldehyde, ethoxybenzaldehyde, 1-hydroxy-2-naphthaldehyde, 2-hydroxy-1-naphthaldehyde, 6-hydroxy-2-naphthaldehyde, or combination thereof. 3. A composition comprising the calix[2-10]arene compound according to claim 2 and a photosensitizer (B1) or curing agent (B2), wherein the composition is a curable composition. 4. A permanent resist film comprising the curable composition according to claim 3 . 5. The calix[2-10]arene compound according to claim 1 is a product of reacting the 1,6-dihydroxynaphthalene compound with the aromatic aldehyde in the presence of an acidic catalyst. 6. The calix[2-10]arene compound according to claim 5 , wherein the aromatic aldehyde is 4-hydroxybenzaldehyde or salicylaldehyde. 7. A composition comprising the calix[2-10]arene compound according to claim 6 and a photosensitizer (B1) or curing agent (B2), wherein the composition is a curable composition. 8. A permanent resist film comprising the curable composition according to claim 7 . 9. A composition comprising the calix[2-10]arene compound according to claim 5 and a photosensitizer (B1) or curing agent (B2) wherein the composition is a curable composition. 10. A permanent resist film comprising the curable composition according to claim 9 . 11. A composition comprising the calix[2-10]arene compound according to claim 1 and a photosensitizer (B1) or curing agent (B2). 12. The composition according to claim 11 , wherein the photosensitizer (B1) constitutes 5 to 50 parts by mass per 100 parts by mass of the phenolic hydroxyl-containing compound (A). 13. The composition according to claim 12 , wherein the composition is a curable composition. 14. A permanent resist film comprising the curable composition according to claim 13 . 15. The composition according to claim 11 , wherein the curing agent (B2) constitutes 0.5 to 20 parts by mass per 100 parts by mass of the phenolic hydroxyl-containing compound (A). 16. The composition according to claim 15 , wherein the composition is a curable composition. 17. A permanent resist film comprising the curable composition according to claim 16 . 18. The composition according to claim 11 , wherein the composition is a curable composition for permanent resist films. 19. A permanent resist film comprising the curable composition according to claim 18 for permanent resist films.
characterised by the non-macromolecular additives · CPC title
of aldehydes · CPC title
Finishing the coated layer, e.g. drying, baking, soaking · CPC title
with polyhydric phenols · CPC title
with at least one hydroxy group on a condensed ring system containing two rings · CPC title
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