Edge-emitting semiconductor laser and method for operating a semiconductor laser

Patent metadata

Field	Value
Publication number	US-10177533-B2
Application number	US-201715628406-A
Country	US
Kind code	B2
Filing date	Jun 20, 2017
Priority date	Jun 20, 2016
Publication date	Jan 8, 2019
Grant date	Jan 8, 2019

Abstract

An edge-emitting semiconductor laser and a method for operating a semiconductor laser are disclosed. In an embodiment, the edge-emitting semiconductor laser includes an active zone within a semiconductor layer sequence and a stress layer. The active zone is configured for being energized only in a longitudinal strip perpendicular to a growth direction of the semiconductor layer sequence. The semiconductor layer sequence has a constant thickness throughout in the region of the longitudinal strip so that the semiconductor laser is gain-guided. The stress layer may locally stress the semiconductor layer sequence in a direction perpendicular to the longitudinal strip and in a direction perpendicular to the growth direction. A refractive index of the semiconductor layer sequence, in regions which, seen in plan view, are located next to the longitudinal strip, for the laser radiation generated during operation is reduced by at least 2×10 −4 and by at most 5×10 −3 .

First claim

What is claimed is:

1. An edge-emitting semiconductor laser comprising:
an active zone within a semiconductor layer sequence; and
a stress layer, wherein the stress layer has a roughened surface on a side facing towards the semiconductor layer sequence so that by the roughened surface an interlocking engagement with a material abutting the stress layer in a direction towards the semiconductor layer sequence is created, and adhesion of the stress layer to that material is geometrically enhanced, and wherein a mean roughness of the roughened surface is at least 0.02 μm and at most 0.2 μm,
wherein the active zone is configured to be energized only in a longitudinal strip perpendicular to a growth direction of the semiconductor layer sequence,
wherein the semiconductor layer sequence has a constant thickness throughout in a region of the longitudinal strip so that the semiconductor laser is gain-guided, and
wherein, as a result of the stress layer, the semiconductor layer sequence is mechanically stressed in a direction perpendicular to the longitudinal strip and in a direction perpendicular to the growth direction so that a refractive index next to the longitudinal strip, seen in plan view, for laser radiation generated during operation is reduced by at least 2×10 −4 and by at most 5×10 −3 thereby obtaining index guidance of the laser radiation.

2. The semiconductor laser according to claim 1 , wherein tensile stress induced by the stress layer is at least 50 MPa and at most 0.5 GPa, and wherein a spacing between the stress layer and the active zone in a direction parallel to the growth direction is at least 0.1 μm and at most 3 μm.

3. The semiconductor laser according to claim 1 , wherein the longitudinal strip is free of the stress layer, and wherein a thickness of the stress layer is between 40 nm and 0.3 μm inclusive and the thickness of the stress layer does not vary.

4. The semiconductor laser according to claim 1 , wherein at least one passivation layer is located between the stress layer and the semiconductor layer sequence so that the stress layer does not touch the semiconductor layer sequence.

5. The semiconductor laser according to claim 1 , wherein the stress layer is located directly on the semiconductor layer sequence.

6. The semiconductor laser according to claim 1 , wherein the stress layer is composed of a plurality of sublayers.

7. The semiconductor laser according to claim 1 , further comprising an electrical contact structure, wherein the stress layer is a part of the electrical contact structure, and wherein the stress layer is electrically conducting.

8. The semiconductor laser according to claim 1 , wherein the stress layer essentially consists of a metal oxide.

9. The semiconductor laser according to claim 8 , wherein the stress layer is made of TiO 2 .

10. The semiconductor laser according to claim 1 , wherein the stress layer essentially consists of a semiconductor material, and wherein the stress layer is at least partially grown epitaxially.

11. The semiconductor laser according to claim 1 , wherein the stress layer essentially consists of a dielectric nitride or oxide.

12. The semiconductor laser according to claim 1 , wherein a reduction in the refractive index brought about by the stress layer takes place on both sides of the longitudinal strip across a region having in each case a width of at most 30% of a width of the longitudinal strip, and wherein the refractive index is otherwise constant.

13. The semiconductor laser according to claim 1 , wherein trenches having oblique side faces are formed in the semiconductor layer sequence parallel to the longitudinal strip and on both sides of the longitudinal strip, and wherein a spacing between the longitudinal strip and the trenches is in each case at least 20 μm and the trenches do not contribute to a guidance of the laser radiation in a direction parallel to the longitudinal strip.

14. The semiconductor laser according to claim 1 , wherein the stress layer is applied with a thickness gradient so that a thickness of the stress layer increases from the outside in the direction towards the longitudinal strip, seen in cross-section perpendicular to the longitudinal strip.

15. The semiconductor laser according to claim 1 , wherein the stress layer has a constantly increasing or a constantly decreasing width in a direction towards an outcoupling side of the laser radiation.

16. A method comprising:
operating the edge-emitting semiconductor laser according to claim 1 , wherein a tensile stress in the semiconductor layer sequence as a result of the stress layer occurs only during operation of the semiconductor laser on approaching an operating temperature.

Assignees

• Osram Opto Semiconductors Gmbh

Inventors

• Bachmann Alexander

Classifications

• H01S5/2036

  Broad area lasers · CPC title

• H01S2301/176

  Specific passivation layers on surfaces other than the emission facet · CPC title

• H01S5/20 Primary

  Structure or shape of the semiconductor body to guide the optical wave {; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers} · CPC title

• H01S5/3201

  incorporating bulkstrain effects, e.g. strain compensation, strain related to polarisation · CPC title

• H01S2301/17

  Semiconductor lasers comprising special layers · CPC title