Substrate treating apparatus

Patent metadata

Field	Value
Publication number	US-10170349-B2
Application number	US-201615346063-A
Country	US
Kind code	B2
Filing date	Nov 8, 2016
Priority date	Nov 13, 2015
Publication date	Jan 1, 2019
Grant date	Jan 1, 2019

Abstract

A substrate treating apparatus includes a plurality of solution treating units for performing solution treatment of substrates, and a plurality of individual gas supply devices provided to correspond individually to the solution treating units, each for supplying gas at a variable rate only to one of the solution treating units. The solution treating units perform the solution treatment by supplying treating solutions to the substrates. The individual gas supply devices supply gas only to the solution treating units corresponding thereto. The individual gas supply devices supply the gas at adjustable rates to the solution treating units. The rate of gas supply to the solution treating units can therefore be varied for each solution treating unit.

First claim

What is claimed is:

1. A substrate treating apparatus comprising:
a first solution treating unit for performing solution treatment of substrates;
a second solution treating unit for performing solution treatment of the substrates;
a third solution treating unit arranged substantially in an up-down direction with the first solution treating unit for performing solution treatment of the substrates;
a fourth solution treating unit arranged substantially in an up-down direction with the second solution treating unit for performing solution treatment of the substrates;
a first chamber for housing the first solution treating unit and the second solution treating unit;
a second chamber for housing the third solution treating unit and the fourth solution treating unit;
a first individual gas supply device provided to correspond to the first solution treating unit, for supplying gas at a variable rate to the first solution treating unit;
a second individual gas supply device provided to correspond to the second solution treating unit, for supplying gas at a variable rate to the second solution treating unit;
a third individual gas supply device provided to correspond to the third solution treating unit, for supplying gas at a variable rate to the third solution treating unit;
a fourth individual gas supply device provided to correspond to the fourth solution treating unit, for supplying gas at a variable rate to the fourth solution treating unit;
a first distributing pipe for distributing the gas to the first individual gas supply device and the third individual gas supply device; and
a second distributing pipe for distributing the gas to the second individual gas supply device and the fourth individual gas supply device;
wherein
the first individual gas supply device includes:
a first supply pipe extending in a first direction from an interior of the first chamber to an exterior of the first chamber; and
a first supply adjuster for adjusting the rate of gas supply to the first solution treating unit;

the second individual gas supply device includes:
a second supply pipe extending in a second direction from the interior of the first chamber to the exterior of the first chamber; and
a second supply adjuster for adjusting the rate of gas supply to the second solution treating unit; and

the first direction is different from the second direction.

2. The substrate treating apparatus according to claim 1 , wherein the first individual gas supply device and the second individual gas supply device are separated from one another at least inside the substrate treating apparatus.

3. The substrate treating apparatus according to claim 2 , wherein:
the first individual gas supply device includes a first supply port disposed in a bottom surface of the substrate treating apparatus and coupled to the first supply pipe for connection to external equipment installed outside the substrate treating apparatus; and
the second individual gas supply device includes a second supply port disposed in the bottom surface of the substrate treating apparatus and coupled to the second supply pipe for connection to the external equipment installed outside the substrate treating apparatus.

4. The substrate treating apparatus according to claim 1 , further comprising:
a first blowout unit housed in the first chamber and connected to the first individual gas supply device for blowing out the gas to the first solution treating unit; and
a second blowout unit housed in the first chamber and connected to the second individual gas supply device for blowing out the gas to the second solution treating unit.

5. The substrate treating apparatus according to claim 4 , wherein:
the first supply pipe is connected to the first blowout unit;
the second supply pipe is connected to the second blowout unit; and
a direction in which the first supply pipe extends from the first blowout unit is different from a direction in which the second supply pipe extends from the second blowout unit.

6. The substrate treating apparatus according to claim 1 , further comprising a controller for controlling the rate of gas supply from the first individual gas supply device to the first solution treating unit and the rate of gas supply from the second individual gas supply device to the second solution treating unit;
wherein the controller changes individually the rate of gas supply to the first solution treating unit and the rate of gas supply to the second solution treating unit.

7. The substrate treating apparatus according to claim 6 , wherein the controller changes the rate of gas supply to the first solution treating unit while the first solution treating unit is engaged in the solution treatment, and changes the rate of gas supply to the second solution treating unit while the second solution treating unit is engaged in the solution treatment.

8. The substrate treating apparatus according to claim 1 , further comprising:
a first individual gas exhaust device provided to correspond to the first solution treating unit for exhausting gas at a variable rate from the first solution treating unit; and
a second individual gas exhaust device provided to correspond to the second solution treating unit for exhausting gas at a variable rate from the second solution treating unit.

9. The substrate treating apparatus according to claim 1 , wherein the first solution treating unit and the second solution treating unit are arranged to perform the same type of solution treatment of the substrates.

10. The substrate treating apparatus according to claim 1 , wherein the first direction is opposite to the second direction.

11. The substrate treating apparatus according to claim 1 , wherein
the first distributing pipe is installed in a first position laterally of the first chamber and the second chamber;
the second distributing pipe is installed in a second position laterally of the first chamber and the second chamber; and
the first position is different from the second position.

12. A substrate treating apparatus comprising:
a first solution treating unit for performing solution treatment of substrates;
a second solution treating unit for performing solution treatment of the substrates;
a third solution treating unit arranged substantially in an up-down direction with the first solution treating unit for performing solution treatment of the substrates;
a fourth solution treating unit arranged substantially in an up-down direction with the second solution treating unit for performing solution treatment of the substrates;
a first chamber for housing the first solution treating unit and the second solution treating unit;
a second chamber for housing the third solution treating unit and the fourth solution treating unit;
a first individual gas exhaust device provided to correspond to the first solution treating unit for exhausting gas at a variable rate from the first solution treating unit;
a second individual gas exhaust device provided to correspond to the second solution treating unit for exhausting gas at a variable rate from the second solution treating unit;
a third individual gas exhaust device provided to correspond to the third solution treating unit, for exhausting gas at a variable rate from the third solution treating unit;
a fourth individual gas exhaust device provided to correspond to the fourth solution treating unit, for exhausting gas at a variable rate from the fourth solution treating unit;
a first collecting pipe for collecting the gas from the first individual gas exhaust device and the third individual gas exhaust device; and
a second collectin pipe for collecting the gas from the

Assignees

• Screen Holdings Co Ltd

Inventors

• Maeda Masafumi

Classifications

• H10P95/00

  Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass · CPC title

• H10P72/3302

  Mechanical parts of transfer devices · CPC title

• H10P72/0604

  Process monitoring, e.g. flow or thickness monitoring · CPC title

• H10P72/0462

  characterised by the construction of the processing chambers, e.g. modular processing chambers · CPC title

• H10P72/0456

  in-line arrangement · CPC title