Substrate treating apparatus
US-2022277971-A1 · Sep 1, 2022 · US
This patent family groups 7 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 58689838 |
| Family type | — |
| Earliest priority | Nov 13, 2015 |
| First filing country | US |
| Member publications | 7 |
| Countries | US |
| Representative publication | US2022277971A1 — Substrate treating apparatus |
Best representative member for this family based on priority and filing country.
US2022277971A1 — Substrate treating apparatus (published Sep 1, 2022)
Related publications in this family.
US-2022277971-A1 · Sep 1, 2022 · US
US-11373889-B2 · Jun 28, 2022 · US
US-2021082721-A1 · Mar 18, 2021 · US
US-10879091-B2 · Dec 29, 2020 · US
US-2019096719-A1 · Mar 28, 2019 · US
US-10170349-B2 · Jan 1, 2019 · US
US-2017136489-A1 · May 18, 2017 · US