Three-dimensional fine movement device

Patent metadata

Field	Value
Publication number	US-10161958-B2
Application number	US-201514794968-A
Country	US
Kind code	B2
Filing date	Jul 9, 2015
Priority date	Jul 9, 2014
Publication date	Dec 25, 2018
Grant date	Dec 25, 2018

Abstract

A three-dimensional fine movement device includes a moving body, a fixation member to which the moving body is fixed, a three-dimensional fine movement unit, to which the fixation member is fixed, and which allows for three-dimensional fine movement of the moving body with the fixation member interposed therebetween, a base member to which the three-dimensional fine movement unit is fixed, and movement amount detecting means that is fixed to the base member to detect a movement amount of the fixation member.

First claim

What is claimed is:

1. A scanning probe microscope having a three-dimensional fine movement device, the three-dimensional fine movement device comprising:
a moving body comprising a cantilever;
a fixation member to which the moving body is fixed, the fixation member comprising a cantilever attachment unit, a diffraction grating being attached to the cantilever attachment unit;
a three-dimensional fine movement unit comprising a piezoelectric three-axis scanner having a plurality of piezoelectric elements including a first piezoelectric element configured to linearly move the scanner in an X direction independently of a Z direction, a second piezoelectric element configured to linearly move the scanner in a Y direction independently of the Z direction, and a third piezoelectric element configured to linearly move the scanner in the Z direction independently of the X and Y directions, wherein the fixation member is fixed to the three-dimensional fine movement unit, and wherein the three-dimensional fine movement unit allows for the three-dimensional fine movement of the moving body with the fixation member interposed therebetween in the Z direction orthogonal to an X-Y plane defined by the X and Y directions, wherein the piezoelectric scanner is configured to move the moving body in the X-Y plane independently of moving the moving body along the Z direction;
a three-dimensional coarse movement unit comprising another scanner different from the piezoelectric three-axis scanner, three-dimensional coarse movement unit comprising an X-component coarse movement unit, a Y-component coarse movement unit, and a Z-component coarse movement unit, wherein the three-dimensional fine movement unit is directly fixed to the Z-component coarse movement unit, and the three-dimensional coarse movement unit providing coarse movement of the three-dimensional fine movement unit on at least one axis of three-dimensional axes at a movement amount greater than that of the three-dimensional fine movement unit;
a base member to which the three-dimensional coarse movement unit is fixed, wherein the three-dimensional fine movement unit is disposed between the Z-component coarse movement unit and both of the X-component coarse movement unit and Y-component coarse movement unit in the Z direction, and wherein the three-dimensional fine movement unit is fixed to the base member via the Z-component coarse movement unit; and
a movement amount detector that is fixed to the Z-component coarse movement unit of the three-dimensional coarse movement unit, the movement amount detector being configured to detect a movement amount of the fixation member, the movement amount detector comprising a non-contact optical sensor configured to detect the diffraction grating, wherein the non-contact optical sensor is disposed facing a side face of the fixation member, the fixation member being configured to move independently of and relative to the non-contact optical sensor in each of the three dimensions.

2. The three-dimensional fine movement device according to claim 1 ,
wherein the movement amount detector is configured to detect a plurality of detection surfaces of the fixation member,
wherein each of the plurality of detection surfaces is arranged on a respective axis of the three dimensions, and a respective diffraction grating is provided on the respective detection surface on each respective axis to detect the corresponding detection surface.

3. The three-dimensional fine movement device according to claim 1 ,
wherein the cantilever is configured to come into contact with or approach a sample,
wherein the three-dimensional fine movement device further comprises a sample stage that is fixed to the base member with X-component coarse movement unit and Y-component coarse movement unit interposed therebetween in the Z direction, and faces the cantilever,
wherein the Z-component coarse movement unit is disposed on an opposite side of the sample stage, in the Z direction, relative to the X-component coarse movement unit and Y-component coarse movement unit, and
wherein the sample is disposed on a surface of the sample stage.

4. The three-dimensional fine movement device according to claim 3 ,
wherein the three-dimensional coarse movement unit moves coarsely on an axis that is different from an axis onto which the three-dimensional coarse movement unit moves coarsely.

5. The three-dimensional fine movement device according to claim 1 , further comprising:
a control device configured to perform control on a position on at least one axis of three-dimensional positions of the moving body through closed loop control based on the movement amount detected by the movement amount detector.

Assignees

• Hitachi High Tech Science Corp

Inventors

• Shigeno Masatsugu
• Watanabe Kazutoshi
• Watanabe Masafumi

Classifications

• G01Q20/00

  Monitoring the movement or position of the probe · CPC title

• G01Q10/02

  Coarse scanning or positioning · CPC title

• G01Q20/02

  by optical means · CPC title

• G01Q10/04 Primary

  Fine scanning or positioning · CPC title

• G01Q70/04

  with compensation for temperature or vibration induced errors · CPC title