Group III nitride wafers and fabrication method and testing method

Patent metadata

Field	Value
Publication number	US-10156530-B2
Application number	US-201514806644-A
Country	US
Kind code	B2
Filing date	Jul 22, 2015
Priority date	Apr 7, 2006
Publication date	Dec 18, 2018
Grant date	Dec 18, 2018

Abstract

The invention provides, in one instance, a group III nitride wafer sliced from a group III nitride ingot, polished to remove the surface damage layer and tested with x-ray diffraction. The x-ray incident beam is irradiated at an angle less than 15 degree and diffraction peak intensity is evaluated. The group III nitride wafer passing this test has sufficient surface quality for device fabrication. The invention also provides, in one instance, a method of producing group III nitride wafer by slicing a group III nitride ingot, polishing at least one surface of the wafer, and testing the surface quality with x-ray diffraction having an incident beam angle less than 15 degree to the surface. The invention also provides, in an instance, a test method for testing the surface quality of group III nitride wafers using x-ray diffraction having an incident beam angle less than 15 degree to the surface.

First claim

What is claimed is:

1. A method of testing surface damage of a first wafer of group III nitride wafers sliced from a bulk group III nitride crystal comprising measuring an X-ray diffraction peak of the wafer from 114 plane of the group III nitride with an incident beam at an angle less than 15 degrees to the damaged surface.

2. A method according to claim 1 , wherein peak intensity of the X-ray diffraction peak with the incident beam at said angle less than 15 degrees to the damaged surface is compared with a peak intensity of a diffraction peak with an incident beam at an angle more than 15 degree to the damaged surface.

3. A method according to claim 1 , wherein the wafer has a surface (a) oriented with c-plane or (b) misoriented from the c-plane, and wherein said surface misorientation is within +/−10 degrees.

4. A method according to claim 2 , wherein the peak intensity of the diffraction peak from 114 plane is compared with the peak intensity of the diffraction peak from 002 plane.

5. A method according to claim 4 , and further comprising verifying that the peak intensity of the diffraction peak from 114 plane is more than 1/100 of the peak intensity of the diffraction peak from 002 plane.

6. A method according to claim 1 wherein the X-ray diffraction peak indicates that the wafer requires removal of the surface damage.

7. A method according to claim 4 wherein the X-ray diffraction peak from 114 plane indicates that the wafer requires removal of the surface damage.

8. A method according to claim 5 wherein the X-ray diffraction peak from 114 plane indicates that the wafer requires removal of the surface damage.

9. A method according to claim 1 wherein the X-ray diffraction peak indicates the degree of removal of the surface damage.

10. A method according to claim 4 wherein the X-ray diffraction peak from 114 plane indicates the degree of removal of the surface damage.

11. A method according to claim 5 wherein the X-ray diffraction peak from 114 plane indicates the degree of removal of the surface damage.

12. A method according to claim 1 wherein the diffraction geometry is asymmetric.

13. A method according to claim 3 wherein the diffraction geometry is asymmetric.

14. A method according to claim 1 , wherein group III nitride comprises gallium nitride.

15. A method according to claim 2 , wherein group III nitride comprises gallium nitride.

16. A method according to claim 3 , wherein group III nitride comprises gallium nitride.

17. A method according to claim 4 , wherein group III nitride comprises gallium nitride.

18. A method according to claim 5 , wherein group III nitride comprises gallium nitride.

19. A method according to claim 1 , wherein the wafer is selected from the group consisting of m-, a-, 101, 102, 103, 111, 112 and 113 base plane oriented wafers, wherein the wafer has a surface (a) oriented with the base-plane or (b) misoriented from the base-plane, and wherein said surface misorientation is within +/−10 degrees.

Assignees

• Sixpoint Mat Inc
• Seoul Semiconductor Co Ltd

Inventors

• Hashimoto Tadao

Classifications

• H10P90/12

  Preparing bulk and homogeneous wafers · CPC title

• H10P74/203 Primary

  Structural properties, e.g. testing or measuring thicknesses, line widths, warpage, bond strengths or physical defects · CPC title

• H10P54/00

  Cutting or separating of wafers, substrates or parts of devices · CPC title

• H10P52/402

  of semiconductor materials · CPC title

• H01L21/0201

  Electricity · mapped topic