Filter and target supply apparatus

Patent metadata

Field	Value
Publication number	US-10143074-B2
Application number	US-201414992477-A
Country	US
Kind code	B2
Filing date	Jun 13, 2014
Priority date	Aug 1, 2013
Publication date	Nov 27, 2018
Grant date	Nov 27, 2018

Abstract

A filter may include: a first member having a first surface provided with a channel; and a second member set with a second surface thereof covering the channel. The first member may include a first passable portion that allows a fluid to pass between the first surface and a first space, which is defined beside a surface of the first member opposite to the first surface, through a first area of the channel. The second member may include a second passable portion that allows the fluid to pass between the second surface and a second space, which is defined beside a surface of the second member opposite to the second surface, through a second area of the channel distanced from the first area.

First claim

What is claimed is:

1. A filter comprising:
a first member having a first surface provided with a plurality of grooves; and
a second member set with a second surface thereof covering the plurality of grooves,
the first member including a first passable portion that allows a fluid to pass between the first surface and a first space, which is defined beside a surface of the first member opposite to the first surface, through a first area of the plurality of grooves,
the second member including a second passable portion that allows the fluid to pass between the second surface and a second space, which is defined beside a surface of the second member opposite to the second surface, through a second area of the plurality of grooves distanced from the first area,
wherein the first member is made of a material selected from molybdenum, tungsten, aluminum oxide, silicon dioxide glass, silicon carbide, tungsten carbide, aluminum nitride, zirconium boride, and boron carbide, and
wherein the second member exposes a part of the plurality of grooves therethrough to the second space.

2. The filter according to claim 1 , wherein the first passable portion is defined by a first through-hole penetrating through the first member.

3. The filter according to claim 2 , wherein the first through-hole penetrates through a substantial center of the first member.

4. The filter according to claim 3 , wherein the plurality of grooves includes a radial portion in which the grooves are formed radially around the first through-hole.

5. The filter according to claim 4 , wherein a width of each of the grooves in the radial portion becomes larger as going away from the first through-hole.

6. The filter according to claim 3 , wherein the plurality of grooves includes an annular portion in which the grooves are formed concentrically around the first through-hole.

7. The filter according to claim 6 , wherein a width of each of the grooves becomes larger as going away from the first through-hole.

8. The filter according to claim 6 , wherein the plurality of grooves further includes a radial portion in which the grooves are formed radially around the first through-hole.

9. The filter according to claim 8 , wherein the plurality of grooves further includes a crossing portion where a groove in the annular portion and a groove in the radial portion are crossed, and the second member exposes the crossing portion therethrough to the second space.

10. The filter according to claim 1 , wherein
the first member is roll-pressed substantially into a plate shape, and the plurality of grooves extend in a direction intersecting with a roll-press direction of the first member.

11. The filter according to claim 1 , wherein the first member includes:
a first plate-shaped member; and
a second plate-shaped member stacked on the first plate-shaped member, and the plurality of grooves include a third through-hole penetrating through the second plate-shaped member.

12. The filter according to claim 1 , wherein
the second member is disposed with a part of the second surface projecting from the first surface,
the plurality of grooves reach an outer periphery of the first member, and
the first passable portion is defined by the part of the second surface projecting from the first surface and a side space facing the outer periphery of the first member.

13. The filter according to claim 1 , wherein
the first member is disposed with a part of the first surface projecting from the second surface,
the plurality of grooves reach an outer periphery of the second member, and
the second passable portion is defined by the part of the first surface projecting from the second surface and a side space facing the outer periphery of the second member.

14. The filter according to claim 1 , wherein the second member is made of a material selected from molybdenum, tungsten, aluminum oxide, silicon dioxide glass, silicon carbide, tungsten carbide, aluminum nitride, zirconium boride, and boron carbide.

15. A filter comprising:
a first member having a first surface provided with a plurality of grooves; and
a second member set with a second surface thereof covering the plurality of grooves, the first member including a first passable portion that allows a fluid to pass between the first surface and a first space, which is defined beside a surface of the first member opposite to the first surface, through a first area of the plurality of grooves, the second member including a second passable portion that allows the fluid to pass between the second surface and a second space, which is defined beside a surface of the second member opposite to the second surface, through a second area of the plurality of grooves distanced from the first area,
wherein the first member is made of a material selected from molybdenum, tungsten, aluminum oxide, silicon dioxide glass, silicon carbide, tungsten carbide, aluminum nitride, zirconium boride, and boron carbide,
wherein the second member is made of a material selected from molybdenum, tungsten, aluminum oxide, silicon dioxide glass, silicon carbide, tungsten carbide, aluminum nitride, zirconium boride, and boron carbide, and
wherein the first member and the second member are diffusion-bonded to each other.

16. A filter comprising:
a first member having a first surface provided with a plurality of grooves; and a second member set with a second surface thereof covering the plurality of grooves, the first member including a first passable portion that allows a fluid to pass between the first surface and a first space, which is defined beside a surface of the first member opposite to the first surface, through a first area of the plurality of grooves,
the second member including a second passable portion that allows the fluid to pass between the second surface and a second space, which is defined beside a surface of the second member opposite to the second surface, through a second area of the plurality of grooves distanced from the first area,
wherein the second member is made of a material selected from molybdenum, tungsten, aluminum oxide, silicon dioxide glass, silicon carbide, tungsten carbide, aluminum nitride, zirconium boride, and boron carbide, and
wherein the second member exposes a part of the plurality of grooves therethrough to the second space.

17. The filter according to claim 16 , wherein the second passable portion is defined by a second through-hole penetrating through the second member.

18. The filter according to claim 17 , wherein the second through-hole penetrates through a substantial center of the second member.

19. The filter according to claim 17 , wherein the first passable portion is defined by a first through-hole penetrating through the first member.

20. The filter according to claim 19 , wherein the first through-hole penetrates through a substantial center of the first member.

21. The filter according to claim 20 , wherein the second passable portion is defined by a plurality of the second through-holes disposed circularly around the first through-hole.

22. The filter according to claim 21 , wherein the first member and the second member are diffusion-bonded to each other.

Assignees

• Gigaphoton Inc

Inventors

• ICHINOSE Tomohide
• Iwamoto Fumio
• Shiraishi Yutaka
• Hori Tsukasa
• Hoshino Hideo

Classifications

• B01D46/406

  of stacked bodies · CPC title

• G03F7/70191

  Optical correction elements, filters or phase plates for controlling intensity, wavelength, polarisation, phase or the like · CPC title

• B01D29/46

  of flat, stacked bodies · CPC title

• H05G2/006 Primary

  Electricity · mapped topic

• H05G2/005

  Electricity · mapped topic