Extreme ultraviolet light generation apparatus
US-2016370706-A1 · Dec 22, 2016 · US
Radiation source
US9192039B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9192039-B2 |
| Application number | US-201214241993-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jul 27, 2012 |
| Priority date | Sep 2, 2011 |
| Publication date | Nov 17, 2015 |
| Grant date | Nov 17, 2015 |
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Abstract
Official abstract text for this publication.
A radiation source having a nozzle configured to direct a stream of fuel droplets along a trajectory towards a plasma formation location, a laser configured to direct laser radiation at the fuel droplets at the plasma formation location to generate, in use, a radiation generating plasma. The nozzle has an internal surface that is configured to prevent contamination present in fuel used to form the fuel droplets from being deposited on that internal surface.
First claim
Opening claim text (preview).
The invention claimed is: 1. A radiation source comprising: a nozzle configured to direct a stream of fuel droplets along a trajectory towards a plasma formation location; and a laser configured to direct laser radiation at the fuel droplets at the plasma formation location to generate, in use, a radiation generating plasma, wherein the nozzle has an internal surface that is configured to prevent contamination present in fuel used to form the fuel droplets from being deposited…
Assignees
Inventors
Classifications
- H05G2/0023Primary
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
- G03F7/70033Primary
Physics · mapped topic
Electricity · mapped topic
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Frequently asked questions
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- What does patent US9192039B2 cover?
- A radiation source having a nozzle configured to direct a stream of fuel droplets along a trajectory towards a plasma formation location, a laser configured to direct laser radiation at the fuel droplets at the plasma formation location to generate, in use, a radiation generating plasma. The nozzle has an internal surface that is configured to prevent contamination present in fuel used to form …
- Who is the assignee on this patent?
- Kempen Antonius Theodorus Wilhelmus, Loopstra Erik Roelof, Rentrop Corne, and 5 more
- What technology area does this patent fall under?
- Primary CPC classification H05G2/0023. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Nov 17 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).