Method and apparatus for real-time monitoring of plasma chamber wall condition

Patent metadata

Field	Value
Publication number	US-10134569-B1
Application number	US-201715824061-A
Country	US
Kind code	B1
Filing date	Nov 28, 2017
Priority date	Nov 28, 2017
Publication date	Nov 20, 2018
Grant date	Nov 20, 2018

Abstract

A substrate processing system includes a processing chamber. A pedestal and a showerhead are arranged in the processing chamber. A surface plasmon resonance (SPR) fiber has a central portion disposed in the processing chamber, and opposing ends disposed outside the processing chamber. A light source provides input light at one end of the SPR fiber, and a detector receives output light from the other end of the SPR fiber. Surface plasmon waves and evanescent waves constitute the output light, which is processed and analyzed to determine a condition of the processing chamber.

First claim

What is claimed is:

1. A substrate processing system comprising:
a processing chamber having a chamber wall;
a pedestal arranged in the processing chamber to hold a substrate for processing;
a showerhead arranged in the processing chamber to distribute plasma in the processing chamber;
and
a detector system configured to detect a condition of the chamber wall, the detector system comprising:
a first surface plasmon resonance (SPR) fiber having a first end and a second end positioned outside the processing chamber, and an inner portion of the first SPR fiber positioned inside the processing chamber;
a light source providing light as first input light to the first end of the first SPR fiber; and
a controller configured to control an amount of light provided to the first end of the first SPR fiber, and to receive light at the second end of the first SPR fiber as first output light, the controller analyzing the first input light and the first output light to determine the condition of the chamber wall.

2. The substrate processing system of claim 1 , wherein the processing chamber further includes a first feedthrough; and wherein the first and second ends of the first SPR fiber extend through the first feedthrough.

3. The substrate processing system of claim 2 , wherein the processing chamber further includes a second feedthrough, and the first end of the first SPR fiber extends through the first feedthrough, and the second end of the first SPR fiber extends through the second feedthrough.

4. The substrate processing system of claim 3 , wherein the first and second feedthroughs are proximate each other on one side of the processing chamber.

5. The substrate processing system of claim 3 , wherein the first and second feedthroughs are on opposite sides of the processing chamber.

6. The substrate processing system of claim 1 , wherein the first SPR fiber comprises a first central optical fiber with first cladding surrounding the first central optical fiber, the first cladding having a first opening positioned so that the first opening is inside the processing chamber, the first SPR fiber further comprising, within the first opening:
a first metal film disposed over the first central optical fiber; and
a first layer of plasma resistant material disposed over the first metal film.

7. The substrate processing system of claim 6 , wherein the plasma resistant material comprises a material selected from the group consisting of nitrides and oxides of zirconium and yttrium.

8. The substrate processing system of claim 6 , wherein the first cladding has a second opening positioned inside the processing chamber, the first SPR fiber further comprising, within the second opening:
a second metal film disposed over the first central optical fiber; and
a second layer of plasma resistant material disposed over the second metal film.

9. The substrate processing system of claim 3 , wherein the processing chamber further includes third and fourth feedthroughs, the detector system further comprising a second SPR fiber having a first end and a second end positioned outside the processing chamber, and an inner portion of the second SPR fiber positioned inside the processing chamber, on an opposite side of the processing chamber from the first SPR fiber;
the light source providing light as second input light to the first end of the second SPR fiber; and
the controller configured to control an amount of light provided to the first end of the second SPR fiber, and to receive light at the second end of the second SPR fiber as second output light, the controller analyzing the second input light and the second output light to determine the condition of the chamber wall.

10. The substrate processing system of claim 9 , wherein the second SPR fiber comprises a second central optical fiber with second cladding surrounding the second central optical fiber, the second cladding having a third opening positioned so that the third opening is inside the processing chamber, the second SPR fiber further comprising, within the third opening:
a third metal film disposed over the second central optical fiber; and
a third layer of plasma resistant material disposed over the third metal film.

11. The substrate processing system of claim 10 , wherein the second cladding has a fourth opening positioned inside the processing chamber, the second SPR fiber further comprising, within the fourth opening:
a fourth metal film disposed over the second central optical fiber; and
a fourth layer of plasma resistant material disposed over the fourth metal film.

12. The substrate processing system of claim 3 , the detector system further comprising:
a reference surface plasmon resonance (SPR) fiber having first and second ends and positioned outside the processing chamber;
the light source providing light as reference input light to the first end of the reference SPR fiber; and
the controller configured to control an amount of light provided to the first end of the reference SPR fiber, and to receive light at the second end of the reference SPR fiber as reference output light, the controller to compare the reference output light to the first output light to determine a baseline for ascertaining the condition of the chamber wall.

13. The substrate processing system of claim 12 , the controller to compare the reference output light to the first output light after the processing chamber wall has been cleaned, and before subsequent use of the substrate processing system.

14. In a substrate processing system comprising a processing chamber having a chamber wall and at least one feedthrough, a pedestal arranged in the processing chamber to hold a substrate for processing, and a showerhead arranged in the processing chamber to distribute plasma in the processing chamber;
a detector system configured to detect a condition of the chamber wall, the detector system comprising:
a first surface plasmon resonance (SPR) fiber having a first end and a second end positioned outside the processing chamber, and an inner portion of the first SPR fiber positioned inside the processing chamber;
a light source providing light as first input light to the first end of the first SPR fiber; and
a controller configured to control an amount of light provided to the first end of the first SPR fiber, and to receive light at the second end of the first SPR fiber as first output light, the controller analyzing the first input light and the first output light to determine the condition of the chamber wall.

15. The detector system of claim 1 , wherein the first SPR fiber comprises a first central optical fiber with first cladding surrounding the first central optical fiber, the first cladding having a first opening positioned so that the first opening is inside the processing chamber, the first SPR fiber further comprising, within the first opening:
a first metal film disposed over the first central optical fiber; and
a first layer of plasma resistant material disposed over the first metal film.

16. The detector system of claim 15 , wherein the first cladding has a second opening positioned inside the processing chamber, the first SPR fiber further comprising, within the second opening:
a second metal film disposed over the first central optical fiber; and
a second layer of plasma resistant material disposed over the second metal film.

17. The detector system of claim 14 , further comprising a second SPR fiber having a first end and a second end positioned outside the processing chamber, and an inner portion of the second SPR fiber positi

Assignees

• Lam Res Corp

Inventors

• Albarede Luc
• Kabouzi Yassine
• Luque Jorge

Classifications

• G01N21/648

  using evanescent coupling or surface plasmon coupling for the excitation of fluorescence · CPC title

• G02B6/02

  Optical fibres with cladding {with or without a coating} · CPC title

• H01J37/32917 Primary

  Plasma diagnostics · CPC title

• G02B6/0239

  Comprising means for varying the guiding properties, e.g. tuning means · CPC title

• G01N21/553

  and using surface plasmons (fluorescence excitation G01N21/648; enhanced Raman G01N21/658) · CPC title