Substrate processing apparatus

Patent metadata

Field	Value
Publication number	US-10131984-B2
Application number	US-201313965242-A
Country	US
Kind code	B2
Filing date	Aug 13, 2013
Priority date	Feb 27, 2009
Publication date	Nov 20, 2018
Grant date	Nov 20, 2018

Abstract

Provided is a substrate processing apparatus. The apparatus includes: a process chamber configured to accommodate substrates which are horizontally oriented and stacked in multiple stages and process the substrates; a process gas supply unit configured to supply a process gas to the process chamber; an inert gas supply unit configured to supply an inert gas to the process chamber; and an exhaust unit configured to exhaust the process chamber. The process gas supply unit includes a process gas supply nozzle. The inert gas supply unit includes inert gas supply nozzles disposed at both sides of the process gas supply nozzle. Each of the inert gas supply nozzles includes at least one first inert gas ejection hole formed in a region where the substrates are stacked and at least one second inert gas ejection hole formed in a region where the substrates are not stacked.

First claim

What is claimed is:

1. A substrate processing apparatus comprising:
a substrate holding tool comprising: a lower end plate; an upper end plate disposed above the lower end plate; and holding members vertically provided between the lower end plate and the upper end plate, wherein substrates are held by the holding members and stacked in a region between the lower end plate and the upper end plate;
a process chamber where the substrates loaded in the substrate holding tool are processed;
a process gas supply unit configured to supply a process gas to the process chamber, the process gas supply unit comprising a process gas supply nozzle extending along an inner wall of the process chamber in a stacked direction of the substrates so as to supply the process gas to the process chamber, and the process gas supply nozzle comprising: a first upper portion, a first middle portion, a first lower portion, and a plurality of process gas ejection holes provided only at the first middle portion exclusive of the first upper portion and the first lower portion to face substrates held by the holding members in the region between the lower end plate and the upper end plate, wherein the first middle portion is disposed in the region between the lower end plate and the upper end plate where the substrates loaded in the substrate holding tool are present, the first upper portion extends upward from the first middle portion into a region higher than the upper end plate where the substrates are not present, and the first lower portion extends downward from the first middle portion into a region lower than the lower end plate where the substrates are not present;
an inert gas supply unit configured to supply an inert gas to the process chamber, the inert gas supply unit comprising a first inert gas supply nozzle disposed on a first side of the process gas supply nozzle and a second inert gas supply nozzle disposed on a second side of the process gas supply nozzle opposite to the first side along a circumferential direction of the substrates, wherein each of the first inert gas supply nozzle and the second inert gas supply nozzle extends along the inner wall of the process chamber in the stacked direction of the substrates so as to supply the inert gas to the process chamber, and each of the first inert gas supply nozzle and the second inert gas supply nozzle comprises: a second upper portion, a second middle portion, a second lower portion, a plurality of first inert gas ejection holes, and a plurality of second inert gas ejection holes, wherein the second middle portion is disposed in the region between the lower end plate and the upper end plate where the substrates loaded in the substrate holding tool are present, the second upper portion extends upward from the second middle portion into the region higher than the upper end plate where the substrates are not present, the second lower portion extends downward from the second middle portion into the region lower than the lower end plate where the substrates are not present, the plurality of first inert gas ejection holes is provided only at the second middle portion exclusive of the second upper portion and the second lower portion to face the substrates stacked in the region between the lower end plate and the upper end plate, and the plurality of second inert gas ejection holes is provided only at the second upper portion and the second lower portion exclusive of the second middle portion such that the plurality of second inert gas ejection holes does not face the substrates stacked in the region between the lower end plate and the upper end plate;
an exhaust unit configured to exhaust the process chamber; and
an exhaust opening disposed on a sidewall of the process chamber opposite to the process gas supply nozzle such that: a first imaginary line connecting the process gas supply nozzle and the exhaust opening passes through a center region of the substrates, a second imaginary line connecting the first inert gas supply nozzle and the exhaust opening is disposed at a first side of the first imaginary line, and a third imaginary line connecting the second inert gas supply nozzle and the exhaust opening is disposed at a second side of the first imaginary line opposite to the first side of the first imaginary line,
wherein the plurality of first inert gas ejection holes provided only at the second middle portion of the first inert gas supply nozzle points outward from the second imaginary line, and the plurality of first inert gas ejection holes provided only at the second middle portion of the second inert gas supply nozzle points outward from the third imaginary line.

2. The substrate processing apparatus of claim 1 , wherein the plurality of second inert gas ejection holes provided only at the second upper portion and the second lower portion is opened toward a centerline of the substrates.

3. The substrate processing apparatus of claim 1 , further comprising:
a heater configured to heat an inside atmosphere of the process chamber; and
a control unit configured to control at least the process gas supply unit, the inert gas supply unit, and the heater,
wherein the control unit controls the process gas supply unit and the inert gas supply unit so that the inert gas is supplied through the plurality of first inert gas ejection holes at a flowrate higher than a flowrate of the process gas, and controls the heater so that the inside atmosphere of the process chamber is kept at a predetermined process temperature.

4. The substrate processing apparatus of claim 1 , wherein a process temperature is set higher than a thermal decomposition temperature of the process gas.

Assignees

• Hitachi Int Electric Inc
• Kokusai Electric Corp

Inventors

• Okada Satoshi

Classifications

• H10P72/127

  characterised by the substrate support · CPC title

• H10P72/12

  Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements · CPC title

• H10P72/0434

  mainly by convection · CPC title

• C23C16/45546

  specially adapted for a substrate stack in the ALD reactor · CPC title

• C23C16/45519 Primary

  Inert gas curtains · CPC title