Lithium sputter targets

Patent metadata

Field	Value
Publication number	US-10125419-B2
Application number	US-201715668631-A
Country	US
Kind code	B2
Filing date	Aug 3, 2017
Priority date	Apr 21, 2011
Publication date	Nov 13, 2018
Grant date	Nov 13, 2018

Abstract

Described are methods of fabricating lithium sputter targets, lithium sputter targets, associated handling apparatus, and sputter methods including lithium targets. Various embodiments address adhesion of the lithium metal target to a support structure, avoiding and/or removing passivating coatings formed on the lithium target, uniformity of the lithium target as well as efficient cooling of lithium during sputtering. Target configurations used to compensate for non-uniformities in sputter plasma are described. Modular format lithium tiles and methods of fabrication are described. Rotary lithium sputter targets are also described.

First claim

What is claimed is:

1. A lithium sputter target comprising:
i) a substantially non-passivated target surface; and
ii) a removable coating on the substantially non-passivated target surface;
wherein the removable coating is mechanically-removable or removable by peeling from the substantially non-passivated target surface and is configured to substantially inhibit the formation of a passivating layer on the substantially non-passivated target surface.

2. The lithium sputter target of claim 1 , wherein the removable coating comprises a polymeric material.

3. The lithium sputter target of claim 1 , wherein the removable coating is configured to adhere to the substantially non-passivated target surface by vacuum sealing, electrostatically, or spray or dip coating.

4. The lithium sputter target of claim 1 , wherein the removable coating comprises a metal foil.

5. The lithium sputter target of claim 4 , wherein the metal foil comprises a lithium foil.

6. The lithium sputter target of claim 1 , wherein the removable coating is a laminate of a lithium foil and another metal foil laminated to the lithium foil.

7. The lithium sputter target of claim 4 , wherein the metal foil is bonded to and located within a perimeter region of the substantially non-passivated target surface.

8. The lithium sputter target of claim 4 , further comprising an inert gas in a space between the metal foil and the substantially non-passivated target surface.

9. The lithium sputter target of claim 1 , wherein the lithium sputter target is one of a plurality of targets assembled adjacently to form a target assembly.

10. The lithium sputter target of claim 1 , further comprising:
a copper backing plate; and
a lithium metal layer adhered to the copper backing plate, wherein the lithium metal layer comprises the substantially non-passivated target surface.

11. The lithium sputter target of claim 10 , wherein the removable coating is configured to adhere electrostatically to the lithium metal layer.

12. The lithium sputter target of claim 10 , the removable coating comprises a polymeric material.

13. The lithium sputter target of claim 10 , wherein the copper backing plate is rectangular and has a size of between about 6 inches and about 36 inches on any side.

14. The lithium sputter target of claim 1 , wherein the removable coating is an inorganic material comprising at least one oxide of aluminum, silicon, zinc or tin.

15. A lithium sputter target comprising:
i) a substantially non-passivated target surface; and
ii) a removable coating comprising a polymeric material,
wherein the polymeric material is directly on the substantially non-passivated target surface and
wherein the removable coating is configured to substantially inhibit the formation of a passivating layer on the substantially non-passivated target surface.

16. The lithium sputter target of claim 15 , wherein the substantially non-passivated target surface includes a reducing agent.

17. The lithium sputter target of claim 16 , wherein the reducing agent is a non-aqueous reducing agent.

18. The lithium sputter target of claim 16 , wherein the reducing agent is one of a borane, a diborane, a alkyl borane, and a lithium ammonia borane.

19. The lithium sputter target of claim 15 , wherein the polymeric material is one of Teflon, mylar, polypropylene, polyethylene, and polyvinylchloride.

20. The lithium sputter target of claim 15 , wherein the removable coating is configured to adhere to the substantially non-passivated target surface by vacuum sealing, electrostatically, spray coating, or dip coating.

21. The lithium sputter target of claim 15 , wherein the polymeric material has one or more reducing groups or oxygen scavenging groups.

22. The lithium sputter target of claim 15 , wherein the removable layers are configured to adhere to the substantially non-passivated target surface via vacuum sealing, electrostatically, spray coating, or dip coating.

23. A lithium sputter target comprising:
i) a substantially non-passivated target surface; and
ii) removable layers including a metal layer and a polymer layer, wherein the polymer layer is located directly on the substantially non-passivated target surface, wherein the removable layers are configured to substantially inhibit the formation of a passivating layer on the substantially non-passivated target surface.

24. The lithium sputter target of claim 23 , wherein the metal layer is laminated to the polymer layer.

25. The lithium sputter target of claim 23 , wherein the substantially non-passivated target surface includes a reducing agent.

26. The lithium sputter target of claim 25 , wherein the reducing agent is a non-aqueous reducing agent.

27. The lithium sputter target of claim 23 , wherein the polymer layer is made of one of a Teflon material, a mylar material, a polypropylene material, a polyethylene material, and a polyvinylchloride material.

28. The lithium sputter target of claim 23 , wherein the metal layer is a metal foil.

29. The lithium sputter target of claim 23 , wherein the polymer layer is adhered to the perimeter region of the substantially non-passivated target surface.

30. The lithium sputter target of claim 29 , wherein the polymer layer has a smaller area than the metal layer.

31. A lithium sputter target comprising:
i) a substantially non-passivated target surface; and
ii) a removable coating on the substantially non-passivated target surface;
wherein the removable coating is configured to substantially inhibit the formation of a passivating layer on the substantially non-passivated target surface, and
wherein the removable coating comprises one or more agents configured to chemically protect the substantially non-passivated target surface and configured to provide a physical barrier to protect the substantially non-passivated target surface.

32. The lithium sputter target of claim 31 , wherein the one or more agents comprises a reducing agent.

33. The lithium sputter target of claim 32 , wherein the reducing agent is one of a borane, a diborane, a alkyl borane, or a lithium ammonia borane.

34. The lithium sputter target of claim 31 , wherein the removable coating is configured to be removable by sputtering.

Assignees

• View Inc

Inventors

• Neumann Martin John
• Nguyen Que Anh Song
• Pradhan Anshu A
• Rozbicki Robert T
• Shrivastava Dhairya
• Satern Jason
• Martin Todd

Classifications

• H01J37/3414

  Targets · CPC title

• C01B33/113

  Silicon oxides; Hydrates thereof {(preparing monoxide by reduction of siliceous material C01B33/182)} · CPC title

• C08L23/06

  Polyethylene · CPC title

• C01G19/02

  Oxides · CPC title

• H01J37/3426

  Material · CPC title