Semiconductor device interconnect structures formed by metal reflow process

Patent metadata

Field	Value
Publication number	US-10109586-B2
Application number	US-201715592291-A
Country	US
Kind code	B2
Filing date	May 11, 2017
Priority date	Dec 14, 2015
Publication date	Oct 23, 2018
Grant date	Oct 23, 2018

Abstract

Methods are devices are provided in which interconnection structures are formed using metal reflow techniques. For example, a method to fabricate a semiconductor device includes forming an opening in an ILD (inter-level dielectric) layer. The opening includes a via hole and a trench. A layer of diffusion barrier material is deposited to cover the ILD layer and to line the opening with the diffusion barrier material. A layer of first metallic material is deposited on the layer of diffusion barrier material to cover the ILD layer and to line the opening with the first metallic material. A reflow process is performed to allow the layer of first metallic material to reflow into the opening and at least partially fill the via hole with the first metallic material. A layer of second metallic material is deposited to at least partially fill a remaining portion of the opening in the ILD layer.

First claim

We claim:

1. A semiconductor device, comprising:
an ILD (inter-level dielectric) layer comprising an opening, wherein the ILD layer is formed as part of a BEOL (back-end-of-line) structure and further wherein the opening comprises a via hole and a trench having sidewalls which is disposed over the via hole;
wherein the opening is lined with a layer of diffusion barrier material;
wherein the opening comprises a first metallic material that is disposed at a bottom of the via hole and which at least partially fills the via hole and lines the sidewalls of the trench, wherein the first metallic material comprises reflowed Cobalt; and
wherein the opening comprises a second metallic material that is in physical contact with the first metallic material and fills a remaining portion of the opening of the ILD layer, wherein the second metallic material is different than the first metallic material; and
wherein the second metallic material is in physical contact with the reflowed Cobalt.

2. The semiconductor device of claim 1 , wherein the second metallic material comprises copper.

3. The semiconductor device of claim 1 , wherein the second metallic material comprises a reflowed metallic material.

4. The semiconductor device of claim 1 , wherein the second metallic material comprises W or Al.

5. The semiconductor device of claim 1 , further comprising a seed layer disposed between the first metallic material and the second metallic material.

6. A semiconductor device, comprising:
an ILD (inter-level dielectric) layer comprising a metallic interconnect structure disposed within an opening etched into the ILD layer, wherein the ILD layer is formed as part of a BEOL (back-end-of-line) structure and further wherein the opening comprises a via hole and a trench which is disposed over the via hole;
wherein the metallic interconnect structure comprises a conductive via formed in the via hole and a metal line formed in the trench, which is disposed over the conductive via;
wherein the conductive via comprises a first metallic material, wherein the first metallic material comprises reflowed Cobalt which is disposed at a bottom of the via hole and which completely fills the via hole; and
wherein the metal line comprises a second metallic material which fills the trench and which is formed in physical contact with the reflowed Cobalt of the conductive via, wherein the second metallic material is different than the first metallic material.

7. The semiconductor device of claim 6 , wherein the second metallic material comprises copper.

8. The semiconductor device of claim 6 , wherein the second metallic material comprises W or Al.

9. The semiconductor device of claim 6 , wherein the second metallic material comprises a reflowed metal material.

10. The semiconductor device of claim 6 , wherein the metallic interconnect structure comprises a seed layer disposed between the the first metallic material and the second metallic material.

11. The semiconductor device of claim 10 , wherein the metallic interconnect structure comprises a liner layer which is disposed between the ILD layer and the metal line, and between the ILD layer and an upper portion of the conductive via, wherein the liner layer is formed by the reflowed Cobalt.

Assignees

• IBM

Inventors

• Murray Conal E
• Yang Chih-Chao

Classifications

• H10W20/4437

  the principal metal being a transition metal · CPC title

• H10W20/084

  for dual-damascene structures · CPC title

• H10W20/081

  by forming openings in the dielectric parts · CPC title

• H10W20/056

  by filling conductive material into holes, grooves or trenches · CPC title

• H10W20/43

  Layouts of interconnections · CPC title