Scanning probe microscope

Patent metadata

Field	Value
Publication number	US-10088499-B2
Application number	US-201715712760-A
Country	US
Kind code	B2
Filing date	Sep 22, 2017
Priority date	Oct 19, 2016
Publication date	Oct 2, 2018
Grant date	Oct 2, 2018

Abstract

Provided is a scanning probe microscope capable of performing observation with high accuracy even when a beam splitter is configured to be movable.
When checking positions of a sample and a cantilever in a scanning probe microscope, by disposing an optical microscope to face a first opening portion of a top surface of a housing, and by gripping and rotating an operating portion provided on a side surface of the housing, a user rotates and moves a beam splitter held by a holding portion in the housing, and retracts the beam splitter from the field of view of the optical microscope. Therefore, the beam splitter can always be disposed in the housing, and the user can be prevented from touching the beam splitter. As a result, it is possible to prevent the beam splitter from being damaged or stains from adhering to the beam splitter. Further, the moving distance of the bears splitter 6 can be shortened. Therefore, it is possible to suppress the occurrence of a deviation in the position of the beam splitter.

First claim

What is claimed is:

1. A scanning probe microscope comprising:
a cantilever scanned along a surface of a sample;
a beam source which irradiates the cantilever with beam;
a beam receiving unit which receives reflected beam from the cantilever;
a beam splitter provided on an optical path from the beam source to the beam receiving unit to reflect beam passing through the optical path;
a housing which houses at least the cantilever and the beam splitter therein; and
a rotation mechanism which retracts the beam splitter from the optical path inside the housing by rotationally moving the beam splitter,
wherein an opening portion is formed on a top surface of the housing, an optical microscope for observing the surface of the sample being disposed to face the opening portion,
the beam splitter is disposed within the field of view of the optical microscope when located on the optical path, and retracts from the field of view of the optical microscope by being rotationally moved by the rotation mechanism to retract from the optical path, and
the rotation mechanism includes an operating portion which is provided on a side surface other than the top surface of the housing, and is gripped by a user when rotationally moving the beam splitter.

2. The scanning probe microscope according to claim 1 , wherein the rotation mechanism includes a holding portion which holds the beam splitter, and a shaft portion connected to the holding portion, and
the holding portion connected to the shaft portion rotates and moves together with the beam splitter by rotation of the shaft portion based on operation of the operating portion.

3. The scanning probe microscope according to claim 2 , wherein the shaft portion is connected to the holding portion such that an extension line thereof is eccentric to the center of the beam splitter.

4. The scanning probe microscope according to claim 1 , wherein an elastic member for preventing rattling of the rotation mechanism is provided between the rotation mechanism and the side surface.

5. The scanning probe microscope according to claim 1 , further comprising:
a stopper which regulates a rotational position of the operating portion at each of an insertion position at which the beam splitter is located on the optical path and a retracted position at which the beam splitter is retracted from the optical path.

Assignees

• Shimadzu Corp

Inventors

• Kobayashi Kanji
• Hirade Masato

Classifications

• G01Q30/025 Primary

  Optical microscopes coupled with SPM · CPC title

• G01Q20/02

  by optical means · CPC title