Power minimizing controller for a stage assembly

Patent metadata

Field	Value
Publication number	US-10084364-B2
Application number	US-201414505852-A
Country	US
Kind code	B2
Filing date	Oct 3, 2014
Priority date	Oct 5, 2013
Publication date	Sep 25, 2018
Grant date	Sep 25, 2018

Abstract

A method for moving a stage includes coupling a stage mover to the stage, and directing current to the stage mover with a control system. The stage mover includes a magnet array and a conductor array positioned adjacent to the magnet array. The conductor array includes a first layer of coils and a second layer of coils, with the first layer of coils being closer to the magnet array than the second layer of coils. The control system directs current to the first layer of coils and the second layer of coils independently. Further, the control system directs more current to the first layer of coils than the second layer of coils during a movement step to reduce the power consumption.

First claim

What is claimed is:

1. A method for moving a workpiece a movement step, the method comprising the steps of:
coupling a stage mover to the workpiece, the stage mover including (i) a magnet array having one or more magnet groups, each of the one or more magnet groups including a plurality of magnets that are positioned substantially adjacent to one another; and (ii) a conductor array positioned adjacent to the magnet array, the conductor array including a first layer of conductors and a second layer of conductors that is adjacent to the first layer of conductors, wherein the first layer of conductors is closer to the magnet array than the second layer of conductors, wherein the first layer of conductors is positioned in a stronger magnetic field than the second layer of conductors, wherein the magnet array is positioned on one side of the conductor array, and wherein a first force constant of the first layer of conductors is larger than a second force constant of the second layer of conductors; and
directing current to the first layer of conductors and the second layer of conductors independently with a control system, wherein the control system simultaneously directs a first current to the first layer of conductors and a second current to the second layer of conductors, and wherein the first current is greater than the second current during the movement step.

2. The method of claim 1 wherein the step of directing includes directing current so that the first current is at least approximately 1.2 times greater than the second current during the movement step.

3. The method of claim 1 wherein the step of directing includes directing current so that the first current is at least approximately 1.5 times greater than the second current during the movement step.

4. The method of claim 1 wherein the step of directing includes directing current so that the first current is at least approximately two times greater than the second current during the movement step.

5. The method of claim 1 further comprising the step of determining a current ratio using the first force constant of the first layer of conductors and the second force constant of the second layer of conductors, and wherein the step of directing includes using the current ratio to determine the first current and the second current.

6. The method of claim 1 wherein the step of coupling a stage mover includes coupling a planar motor to the workpiece.

7. The method of claim 1 wherein the step of coupling a stage mover includes coupling a linear motor to the workpiece.

8. The method of claim 1 wherein the step of coupling a stage mover includes coupling a voice coil motor to the workpiece.

9. The method of claim 1 wherein the step of coupling includes the stage mover further comprises at least a third layer of conductors, wherein the third layer of conductors is further from the magnet array than the second layer of conductors, and wherein the step of directing current includes the control system also directing a third current to the third layer of conductors, and wherein the second current is greater than the third current during the movement step to reduce the power consumption.

10. The method of claim 1 wherein the step of coupling a stage mover includes the magnet array includes a first magnet group and a second magnet group that is spaced apart from the first magnet group; wherein the stage mover includes a third layer of conductors; wherein the first layer of conductors is closer to the first magnet group than the second layer of conductors, and the second layer of conductors is closer to the first magnet group than the third layer of conductors; wherein the third layer of conductors is closer to the second magnet group than the second layer of conductors, and the second layer of conductors is closer to the second magnet group than the first layer of conductors; and wherein the step of directing current includes the control system directing a third current to the third layer of conductors, and wherein the third current is greater than the second current during the movement step to reduce the power consumption.

11. A stage assembly for moving a workpiece a movement step, the stage assembly comprising:
a stage mover that is coupled to the workpiece, the stage mover including (i) a magnet array having one or more magnet groups, each of the one or more magnet groups including a plurality of magnets that are positioned substantially adjacent to one another; and (ii) a conductor array positioned adjacent to the magnet array, the conductor array including a first layer of conductors and a second layer of conductors that is adjacent to the first layer of conductors, wherein the first layer of conductors is closer to the magnet array than the second layer of conductors, wherein the magnet array is positioned on one side of the conductor array, wherein the first layer of conductors is positioned in a stronger magnetic field than the second layer of conductors, and wherein a first force constant of the first layer of conductors is larger than a second force constant of the second layer of conductors; and
a control system that directs current to the first layer of conductors and the second layer of conductors independently, wherein the control system simultaneously directs a first current to the first layer of conductors and a second current to the second layer of conductors, and wherein the first current is greater than the second current during the movement step.

12. The stage assembly of claim 11 wherein the control system directs current so that the first current is at least approximately 1.2 times greater than the second current during the movement step.

13. The stage assembly of claim 11 wherein the control system directs current so that the first current is at least approximately 1.5 times greater than the second current during the movement step.

14. The stage assembly of claim 11 wherein the control system directs current so that the first current is at least approximately two times greater than the second current during the movement step.

15. A stage assembly for moving a workpiece a movement step, the stage assembly comprising:
a stage mover that is coupled to the workpiece, the stage mover including a magnet array and a conductor array positioned adjacent to the magnet array, the conductor array including a first layer of conductors and a second layer of conductors, wherein the first layer of conductors is closer to the magnet array than the second layer of conductors; wherein the first layer of conductors is positioned in a stronger magnetic field than the second layer of conductors, and wherein the magnet array is positioned on only one side of the conductor array; and
a control system that directs current to the first layer of conductors and the second layer of conductors independently, wherein the control system simultaneously directs a first current to the first layer of conductors and a second current to the second layer of conductors, wherein the first current is always greater than the second current during the movement step, wherein the control system directs current so that a current ratio between the first current and the second current is greater than one, and wherein the current ratio is approximately equal to the ratio of (i) a resistance of the second layer of conductors multiplied by a first force constant of the first layer of conductors, and (ii) a resistance of the first layer of conductors multiplied by a second force constant of the second layer of conductors.

16. The stage assembly of claim 11 wherein the stage mover is selected

Assignees

• Nikon Corp
• Nikon Res Corporation Of America

Inventors

• Hemati Neyram
• Binnard Michael

Classifications

• H10P95/00

  Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass · CPC title

• H02K41/033 Primary

  with armature and magnets on one member, the other member being a flux distributor · CPC title

• H02K16/00

  Machines with more than one rotor or stator {(machines for transmitting mechanical power from a driving shaft to a driven shaft and comprising structurally interrelated motor and generator parts H02K51/00; permanent magnet machines with multiple rotors or stators relatively rotated for vectorially combining the excitation fields or the armature voltages H02K21/029)} · CPC title

• G03F7/70725

  control · CPC title

• H02K41/031 Primary

  of the permanent magnet type · CPC title