Field-mapping and focal-spot tracking for S-SNOM

Patent metadata

Field	Value
Publication number	US-10067159-B2
Application number	US-201515119283-A
Country	US
Kind code	B2
Filing date	Feb 17, 2015
Priority date	Feb 19, 2014
Publication date	Sep 4, 2018
Grant date	Sep 4, 2018

Abstract

System and method for optical alignment of a near-field system, employing reiterative analysis of amplitude (irradiance) and phase maps of irradiated field obtained in back-scattered light while adjusting the system to arrive at field pattern indicative of and sensitive to a near-field optical wave produced by diffraction-limited irradiation of a tip of the near-field system. Demodulation of optical data representing such maps is carried out at different harmonics of probe-vibration frequency. Embodiments are operationally compatible with methodology of chemical nano-identification of sample utilizing normalized near-field spectroscopy, and may utilize suppression of background contribution to collected data based on judicious coordination of data acquisition with motion of the tip. Such coordination may be defined without knowledge of separation between the tip and sample. Computer program product with instructions effectuating the method and operation of the system.

First claim

What is claimed is:

1. A method for optical alignment of a near-field system, the method comprising:
detecting a spatial light pattern obtained in light that has been delivered, through an optical system of said near-field system, to a probe of the near-field system and backscattered by said probe;
repositioning the optical system to cause a focal spot of a beam of light, that has been delivered to the probe through said optical system, spatially coincide with a tip of the probe;
maximizing an amplitude, of said spatial light pattern, that is sensitive to a near-field optical wave produced only by the tip in response to interaction thereof with said beam of light, and
vibrating the tip at a chosen frequency above a surface of a sample under test, wherein said maximizing includes demodulating optical data representing said spatial light pattern at a harmonic of said chosen frequency.

2. A method according to claim 1 wherein said demodulating includes demodulating optical data representing said spatial light pattern at the harmonic of said chosen frequency that differs from said chosen frequency.

3. A method according to claim 1 , further comprising:
determining, from optical data representing irradiance of said spatial light pattern, a geometrical characteristic of said spatial light pattern defined with respect to a point, of said spatial light pattern, that corresponds to a maximum value of said irradiance.

4. A method according to claim 3 , further comprising:
determining whether said focal spot is diffraction-limited, based on comparison between said geometrical parameter with a geometrical value representing a diffraction-limited focal spot.

5. A method according to claim 1 , wherein said repositioning includes changing at least one of a position and an orientation of said optical system with respect to the probe, while the tip is being vibrated at the chosen frequency, to form an image of a region of interest (ROI) irradiated with said beam, the ROI including the tip, the image containing at least a central lobe of an Airy pattern.

6. A method according to claim 1 , further comprising:
processing data representing a detected spatial light pattern in time domain to extract a first portion of the data, the first portion representing electromagnetic field caused by near-field interaction between the tip and a surface of the sample during a motion of the tip above the surface.

7. A method according to claim 6 , wherein said detecting includes acquiring the spatial light pattern by interfering two portions of said light, one of which portions has been delayed in phase with respect to another,
and further comprising:
normalizing the first portion of the data by reference optical data, that have been acquired with the near-field system in a process of backscattering of said light by the tip moving above the surface of the reference sample, to determine at least one of real and imaginary pats of a complex-valued difference between first and second values of electric field characterizing said near-field interaction, wherein the first and second values respectively correspond to first and second phases of the motion.

8. A method according to claim 6 , further comprising:
suppressing a contribution of background electromagnetic radiation to the first portion to obtain a second portion of said data in which said contribution is reduced as compared to the first portion,
wherein said suppressing includes determining the first portion at first, second, third, and fourth phases of said motion as respective first, second, third, and fourth values,
and further comprising:
determining a difference between a sum of the first and third values and a sum of the second and fourth values.

9. A method according to claim 6 , wherein the motion includes a recurring motion, and further comprising:
negating a contribution of background electromagnetic radiation to the first portion by irradiating the tip with pulsed laser light only at moments corresponding to a chosen phase of the recurring motion.

10. A method according to claim 9 , wherein said negating includes irradiating the tip only at the moments corresponding to a phase, of the recurring motion, that has been chosen without knowledge of a separation distance between the tip and the surface.

11. A method according to claim 6 , wherein the motion includes a recurring motion, and further comprising:
negating a contribution of background electromagnetic radiation in the first portion by irradiating the tip with light from a CW laser source, and
detecting said spatial light pattern only at moments corresponding to a chosen phase of the recurring motion.

12. A method according to claim 1 , further comprising:
processing data representing a detected spatial light pattern to extract a first portion of the data that represent electromagnetic field caused by near-field interaction between the tip and the surface of the sample during a recurring motion of the tip above the surface,
wherein said light includes a plurality of wavelengths,
wherein said detecting includes acquiring the spatial light pattern by interfering two portions of said light, one of which portions has been delayed in phase with respect to another by an amount that is being modulated during said acquiring, said acquiring occurring only at moments corresponding to a chosen phase of the recurring motion.

13. A method for optical alignment of a near-field system, the method comprising:
acquiring, with an optical detection unit of the near-field system, optical data representing a spatial light pattern formed with the use of a first light beam that has been
(i) converged, through an optical system of the near-field system, on a region of interest (ROI) including a tip of a cantilever probe of the near-field system, to form a converged light beam and
(ii) back-scattered by the ROI; and

based on an output, generated by the optical detection unit in response to said acquiring, repositioning said optical system along a spatial trajectory to achieve a target spatial coordination, between said optical system and said ROI,
wherein achieving said target spatial coordination includes
(a) causing a focal spot of said first light beam to coincide with the tip, and
(b) maximizing an amplitude of the spatial light pattern, said amplitude being sensitive to a near-field optical wave produced only by the tip in response to interaction thereof with said converged light beam.

14. A method according to claim 13 , wherein said acquiring includes acquiring optical data representing the spatial light pattern that has been formed by interfering two portions of the first light beam, one of which portions has been delayed in phase with respect to another.

15. A method according to claim 13 , further comprising forming an image associated with said near-field optical wave and corresponding to a position along said spatial trajectory, wherein the image contains a feature, of said spatial light pattern, indicating that the target spatial coordination between said optical system and said ROI has been achieved.

16. A method according to claim 13 , further comprising:
determining, from said optical data, a first value of a geometrical characteristic, of said spatial light pattern, defined with respect to a point of said spatial light pattern,
wherein said point corresponds to a maximum value of said optical data.

17. A method according to claim 16 , further comprising comparing the first value with a second value of said geometrical characteristic to determine whether said

Assignees

• Bruker Nano Inc

Inventors

• Andreev Gregory
• Osechinskiy Sergey

Classifications

• G01Q60/22

  Probes, their manufacture, or their related instrumentation, e.g. holders · CPC title

• G01Q20/02 Primary

  by optical means · CPC title

• G01Q30/04

  Display or data processing devices · CPC title